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Fabrication of organic semiconductor devices using ink jet printing

Assignee: Princeton University
•
Filing: 1999-01-28
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Granted: 2000-07-11
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Expires: 2019-01-28
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Abstract

Abstract A method of fabricating semiconductor devices using ink-jet printing is provided to directly deposit patterned polymer films to create OLED's and other semiconductor devices. The luminescence of poly-vinylcarbazol (PVK) films, with dyes of coumarin 6 (C6), coumarin 47 (C47), and nile red was similar to that of films of the same composition deposited by spin-coating. Light emitting diodes with low turn-on voltages were also fabricated in PVK doped with C6 deposited by ink-jet printing.

Inventors

  • 👤 James C. Sturm
  • 👤 Chung Chih Wu
  • 👤 Duane Marcy
  • 👤 Thomas R. Hebner

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-24 14:09
CPC Classifications
H; H10; H10K; H10K50/00; H10K10/00; H10K10/40; H10K10/46; H10K10/462; H10K10/464; C; C09; C09K; C09K11/00; C09K11/06; H10K10/466; H10K10/468; H10K50/10; H10K50/11; H10K50/80; H10K50/805; H10K59/00; H10K59/80; H10K59/805; H10K71/00; H10K71/10; H10K71/12; H10K71/13; H10K71/135; H10K59/10; H10K59/12; H10K59/17; H10K59/30; H10K59/35; H10K71/30; H10K85/00; H10K85/10; H10K85/141; H10K85/146; H10K85/60

Claims Analysis

Total Claims: 56
Claim 1
Independent Claim 45 words
A process for forming a pattern on a substrate by deposition of an organic material comprising the steps of: depositing a semiconducting organic material in a solvent onto a substrate by ink-jet printing; and evaporating the solvent, whereby said organic material remains on the substrate.
Claim 2
Dependent Claim 45 words
A process for forming a pattern on a substrate by deposition of an organic material comprising the steps of: depositing a semiconducting organic material in a solvent onto a substrate by ink-jet printing; and evaporating the solvent, whereby said organic material remains on the substrate.
Claim 3
Dependent Claim 15 words
The process of claim 1, further comprising drying the deposited material to remove said solvent.
Claim 4
Dependent Claim 13 words
The process of claim 1 wherein said organic material is a luminescent polymer.
Claim 5
Dependent Claim 11 words
The process of claim 1 wherein said material includes polyvinylcarbazol film.
Claim 6
Dependent Claim 10 words
The process of claim 1 wherein said solvent is chloroform.
Claim 7
Dependent Claim 12 words
The process of claim 1 wherein said material includes light emitting dyes.
Claim 8
Dependent Claim 15 words
The process of claim 6 wherein said light emitting dyes include coumarin and nile red.
Claim 9
Dependent Claim 11 words
The process of claim 7 wherein said coumarin is coumarin 6.
Claim 10
Dependent Claim 11 words
The process of claim 7 wherein said coumarin is coumarin 47.
Claim 11
Dependent Claim 14 words
The process of claim 7 wherein said coumarin is coumarin 6 and coumarin 47.
Claim 12
Dependent Claim 18 words
The process of claim 1 wherein said organic material is a mixture of polymers and other organic molecules.
Claim 13
Dependent Claim 37 words
A process for making organic light emitting diodes comprising the steps of: depositing a semiconducting organic material in a solvent onto a substrate by ink-jet printing; and evaporating the solvent, said organic material remaining on the substrate.
Claim 14
Dependent Claim 37 words
A process for making organic light emitting diodes comprising the steps of: depositing a semiconducting organic material in a solvent onto a substrate by ink-jet printing; and evaporating the solvent, said organic material remaining on the substrate.
Claim 15
Dependent Claim 23 words
The process of claim 12 wherein said depositing step operates an ink-jet printer in a mode to create a continuous sheet of polymer.
Claim 16
Dependent Claim 15 words
The process of claim 13 further including the step of metallizing said ink-jet printed substrates.
Claim 17
Dependent Claim 20 words
The process of claim 14 further including the step of depositing with ink-jet printing top metal contacts on said substrate.
Claim 18
Dependent Claim 16 words
The process of claim 15 wherein said top metal contacts are deposited through a shadow mask.
Claim 19
Dependent Claim 20 words
The process of claim 12 further including the step of depositing with ink-jet printing bottom metal contacts on said substrate.
Claim 20
Dependent Claim 15 words
The process of claim 15 wherein said top metal contacts are deposited in a pattern.
Claim 21
Dependent Claim 15 words
The process of claim 17 wherein said bottom metal contacts are deposited in a pattern.
Claim 22
Dependent Claim 14 words
The process of claim 12 further wherein said organic material includes light emitting dyes.
Claim 23
Dependent Claim 21 words
The process of claim 20 further including the step of depositing top contacts on said organic material by ink jet printing.
Claim 24
Dependent Claim 19 words
The process of claim 21 further including the step of depositing bottom contacts on said substrate by ink-jet printing.
Claim 25
Dependent Claim 49 words
A process of forming thin film field effect transistors comprising the steps of: forming a gate electrode on a substrate; forming a gate insulator over said gate electrode; forming a polymer semiconducting layer on said insulator by ink-jet printing; and forming source and drain contacts on said semiconducting layer.
Claim 26
Dependent Claim 49 words
A process of forming thin film field effect transistors comprising the steps of: forming a gate electrode on a substrate; forming a gate insulator over said gate electrode; forming a polymer semiconducting layer on said insulator by ink-jet printing; and forming source and drain contacts on said semiconducting layer.
Claim 27
Dependent Claim 21 words
The process of claim 23 wherein said gate insulator is formed by ink-jet printing, and the semiconducting layer by other techniques.
Claim 28
Dependent Claim 24 words
The process of claim 23 wherein the source and drain contacts are applied directly on the gate insulator before the semiconducting layer is deposited.
Claim 29
Dependent Claim 24 words
The process of claim 24 wherein the source and drain contacts are applied directly on the gate insulator before the semiconducting layer is deposited.
Claim 30
Dependent Claim 20 words
The process of claim 23 wherein the semiconducting layer comprises a non-polymeric organic film or a polymer/small organic molecule blend.
Claim 31
Dependent Claim 20 words
The process of claim 24 wherein the semiconducting layer comprises a non-polymeric organic film or a polymer/small organic molecule blend.
Claim 32
Dependent Claim 20 words
The process of claim 25 wherein the semiconducting layer comprises a non-polymeric organic film or a polymer/small organic molecule blend.
Claim 33
Dependent Claim 46 words
A process for forming a pattern on a substrate by deposition of an organic material comprising the steps of: depositing organic material including polyvinylcarbazol film in a solvent onto a substrate by ink-jet printing; and evaporating the solvent, whereby said organic material remains on the substrate.
Claim 34
Dependent Claim 46 words
A process for forming a pattern on a substrate by deposition of an organic material comprising the steps of: depositing organic material including polyvinylcarbazol film in a solvent onto a substrate by ink-jet printing; and evaporating the solvent, whereby said organic material remains on the substrate.
Claim 35
Dependent Claim 15 words
The process of claim 30, further comprising drying the deposited material to remove said solvent.
Claim 36
Dependent Claim 11 words
The process of claim 30 wherein said organic material is semiconducting.
Claim 37
Dependent Claim 13 words
The process of claim 30 wherein said organic material is a luminescent polymer.
Claim 38
Dependent Claim 10 words
The process of claim 30 wherein said solvent is chloroform.
Claim 39
Dependent Claim 12 words
The process of claim 30 wherein said material includes light emitting dyes.
Claim 40
Dependent Claim 15 words
The process of claim 35 wherein said light emitting dyes include coumarin and nile red.
Claim 41
Dependent Claim 11 words
The process of claim 36 wherein said coumarin is coumarin 6.
Claim 42
Dependent Claim 11 words
The process of claim 36 wherein said coumarin is coumarin 47.
Claim 43
Dependent Claim 14 words
The process of claim 36 wherein said coumarin is coumarin 6 and coumarin 47.
Claim 44
Dependent Claim 18 words
The process of claim 30 wherein said organic material is a mixture of polymers and other organic molecules.
Claim 45
Dependent Claim 38 words
A process for making organic light emitting diodes comprising the steps of: depositing organic material including polyvinylcarbazol film in a solvent onto a substrate by ink-jet printing; and evaporating the solvent, said organic material remaining on the substrate.
Claim 46
Dependent Claim 38 words
A process for making organic light emitting diodes comprising the steps of: depositing organic material including polyvinylcarbazol film in a solvent onto a substrate by ink-jet printing; and evaporating the solvent, said organic material remaining on the substrate.
Claim 47
Dependent Claim 23 words
The process of claim 41 wherein said depositing step operates an ink-jet printer in a mode to create a continuous sheet of polymer.
Claim 48
Dependent Claim 15 words
The process of claim 42 further including the step of metallizing said ink-jet printed substrates.
Claim 49
Dependent Claim 20 words
The process of claim 43 further including the step of depositing with ink-jet printing top metal contacts on said substrate.
Claim 50
Dependent Claim 16 words
The process of claim 44 wherein said top metal contacts are deposited through a shadow mask.
Claim 51
Dependent Claim 20 words
The process of claim 41 further including the step of depositing with ink-jet printing bottom metal contacts on said substrate.
Claim 52
Dependent Claim 15 words
The process of claim 44 wherein said top metal contacts are deposited in a pattern.
Claim 53
Dependent Claim 15 words
The process of claim 46 wherein said bottom metal contacts are deposited in a pattern.
Claim 54
Dependent Claim 14 words
The process of claim 41 further wherein said organic material includes light emitting dyes.
Claim 55
Dependent Claim 21 words
The process of claim 49 further including the step of depositing top contacts on said organic material by ink jet printing.
Claim 56
Dependent Claim 19 words
The process of claim 50 further including the step of depositing bottom contacts on said substrate by ink-jet printing.

References Cited (Backward Citations)

US4736704A Cited
US5132248A Cited
US5250439A Cited
US5312654A Cited
US5385848A Cited
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US5880176A Cited
US5919532A Cited
WO1998028946A1 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-07-11 2004-01-10 2004-07-11 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-07-11 2008-01-10 2008-07-11 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-07-11 2012-01-10 2012-07-11 $7700.00 Window Closed / Lapsed

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