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US6084053A
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Electronic part and process for manufacturing the same
Assignee: JSR Corp
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Filing: 1998-04-15
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Granted: 2000-07-04
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Expires: 2018-04-15
Abstract
Abstract Electronic parts and a process for manufacturing the electronic parts are provided. The electronic parts comprise an electric insulating material exhibiting a high heat resistance and low dielectric constant as a structural component. The electric insulating material is formed of a polyimide containing a recurring unit represented by the following general formula (1).
Inventors
- 👤 Minoru Matsubara
- 👤 Yasutake Inoue
- 👤 Mayumi Kakuta
- 👤 Igor Rozhanskii
- 👤 Kohei Goto
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:49
CPC Classifications
H; H01; H01B; H01B3/00; H01B3/18; H01B3/30; H01B3/303; H01B3/306; C; C08; C08G; C08G73/00; C08G73/06; C08G73/10; C08G73/1039; C08G73/1057; C08G73/106; C08L; C08L79/00; C08L79/04; C08L79/08; C08L2203/00; C08L2203/20; C08L2203/206; H05; H05K; H05K1/00; H05K1/02; H05K1/03; H05K1/0313; H05K1/032; H05K1/0346; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/31504; Y10T428/31721
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
204 words
An electronic part comprising, as a structural component, an electrical insulating material formed of a polyimide containing a recurring unit represented by the following general formula (1): ##STR20## wherein X represents at least one group selected from the following X1, X2 and X5, Y represents at least one group selected from the following Y1 to Y3, provided that at least one of X and Y has a fluorene skeleton, R1 to R9 in X1 and X2 and Y1 and Y3 respectively represent an alkyl group, an aryl group, an arylalkyl group, or an alkyl halide group, repeat numbers n, m, p, q, s, t, w and z denote integers from 0 to 2, and r denotes integers from 1 to 2, ##STR21## wherein the symbol D represents a group shown by the formula --CYY'--, wherein Y and Y' respectively represent an alkyl group or an alkyl halide group; a group represented by the following formula: ##STR22## a group represented by the following formula: ##STR23## or a group represented by the following formula: ##STR24## wherein the symbol B represents a group --C(CH 3 ) 2 --, --C(CF 3 ) 2 --, --O--, ##STR25## and a repeat number v denotes an integer of 0 or 1.
Claim 2
Dependent Claim
204 words
An electronic part comprising, as a structural component, an electrical insulating material formed of a polyimide containing a recurring unit represented by the following general formula (1): ##STR20## wherein X represents at least one group selected from the following X1, X2 and X5, Y represents at least one group selected from the following Y1 to Y3, provided that at least one of X and Y has a fluorene skeleton, R1 to R9 in X1 and X2 and Y1 and Y3 respectively represent an alkyl group, an aryl group, an arylalkyl group, or an alkyl halide group, repeat numbers n, m, p, q, s, t, w and z denote integers from 0 to 2, and r denotes integers from 1 to 2, ##STR21## wherein the symbol D represents a group shown by the formula --CYY'--, wherein Y and Y' respectively represent an alkyl group or an alkyl halide group; a group represented by the following formula: ##STR22## a group represented by the following formula: ##STR23## or a group represented by the following formula: ##STR24## wherein the symbol B represents a group --C(CH 3 ) 2 --, --C(CF 3 ) 2 --, --O--, ##STR25## and a repeat number v denotes an integer of 0 or 1.
Claim 3
Dependent Claim
16 words
The electronic part according to claim 1, wherein Y is Y1 in the general formula (1).
Claim 4
Dependent Claim
16 words
The electronic part according to claim 1, wherein X is X1 in the general formula (1).
Claim 5
Dependent Claim
42 words
The electronic part according to claim 1, wherein Y in the general formula (1) includes the following group Y4: ##STR26## wherein R10 represents an alkyl group or an aryl group and a repeat number x denotes an integer from 1 to 100.
Claim 6
Dependent Claim
37 words
The electronic part according to claim 1, wherein the inherent viscosity of the polyimide (measured in a N-methylpyrrolidone solvent at a concentration of 0.5 g/dl at 30° C.) is in a range from 0.05 to 10 dl/g.
Claim 7
Dependent Claim
25 words
The electronic part according to claim 1, wherein the content of fluorine in the polyimide is within a range from 0.1 to 30% by weight.
Claim 8
Dependent Claim
45 words
The electronic part according to claim 1, wherein the polyimide contains the recurring unit shown by the following general formula (2) at a proportion of 50 mol % or less: ##STR27## wherein X and Y are the same as previously defined for the formula (1).
Claim 9
Dependent Claim
21 words
The electronic part according to claim 1, wherein the dielectric constant (frequency: 1 MHz) of the polyimide is 2.95 or less.
Claim 10
Dependent Claim
21 words
The electronic part according to claim 1, wherein the electric insulating material forms a layer insulation film or a flattening film.
Claim 11
Dependent Claim
15 words
The electronic part according to claim 1, wherein the electric part is a semiconductor device.
Claim 12
Dependent Claim
61 words
A process for manufacturing an electronic part, which comprises the following steps (A) to (C): (A) a step for preparing polyimide solution containing a recurring unit represented by the general formula (1) of claim 1; (B) a step for applying the polyimide solution on a substrate; and (C) a step for forming an electric insulating material by drying the polyimide solution.
Claim 13
Dependent Claim
40 words
The process according to claim 11, wherein the polyimide solution comprises the solvent such as at least one solvent selected from the group consisting of N-methylpyrrolidone, N,N-dimethylformamide, N,N-dimethylacetamide, γ-butylolactone, ethyl lactate, methoxymethyl propionate, propylene glycol monomethyl ether acetate, and cyclohexanone.
References Cited (Backward Citations)
US3758434A
Cited
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