US6083822A
Expired / Lapsed
US
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Fabrication process for copper structures
Assignee: Transpacific IP Ltd
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Filing: 1999-08-12
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Granted: 2000-07-04
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Expires: 2019-08-12
Abstract
Abstract A process for creating a dual damascene opening, in a composite insulator layer, to be used to accommodate a dual damascene copper structure, has been developed. The process features the use of a composite insulator layer, comprised with silicon oxide layers, and with multiple silicon nitride layers, used as stop layers, during selective, anisotropic RIE procedures, used to create the dual damascene opening, in the composite insulator layer. The multiple silicon nitride stop layers, are maintained at minimum thicknesses, to still allow selective formation of the dual damascene opening, however avoiding the capacitance increases, encountered with thicker silicon nitride counterparts. A dual damascene copper structure, formed in the dual damascene opening, exhibits minimum RC delays, as a result of the use of low resistivity copper, and as a result of the use of a minimum of silicon nitride etch stop layers, in the composite insulator.
Inventors
- 👤 Tze-Liang Lee
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 16:28
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/084; H10W20/088; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
314 words
A method of fabricating a dual damascene metal structure, in a dual damascene opening, on a semiconductor substrate, wherein the dual damascene opening is formed in a composite insulator layer, comprising the steps of: providing an underlying metal interconnect structure; depositing a barrier layer; depositing said composite insulator layer, on said barrier layer, with said composite insulator layer comprised of: an underlying, first insulator layer; a first silicon nitride layer; a second insulator layer; a second silicon nitride layer; and a third insulator layer; using a first photoresist shape as a mask to form a first, initial diameter opening, in said third insulator layer, in said second silicon nitride layer, in said second insulator layer, and in said first silicon nitride layer; using a second photoresist shape as a mask to form a final diameter opening in said third insulator layer, wherein said final diameter is wider than said first, initial diameter, while using said first, initial diameter opening, in said second silicon nitride layer, as a mask for removal of said first insulator layer, creating a second, initial diameter opening, of said dual damascene opening, comprised in said second silicon nitride layer, in said second insulator layer, in said first silicon nitride layer, in said first insulator layer, wherein diameter of said first, initial diameter opening, is equal to diameter of said second, initial diameter opening; removing a region of said barrier layer, exposed at the bottom of said second, initial diameter opening, exposing a portion of the top surface of said underlying, metal interconnect structure, while also removing regions of said second silicon nitride layer, exposed in said final diameter opening; and forming said dual damascene metal structure, in said dual damascene opening, in said composite insulator layer, with said dual damascene metal structure, contacting the top surface of said underlying metal structure, located at the bottom of said dual damascene opening.
Claim 2
Independent Claim
314 words
A method of fabricating a dual damascene metal structure, in a dual damascene opening, on a semiconductor substrate, wherein the dual damascene opening is formed in a composite insulator layer, comprising the steps of: providing an underlying metal interconnect structure; depositing a barrier layer; depositing said composite insulator layer, on said barrier layer, with said composite insulator layer comprised of: an underlying, first insulator layer; a first silicon nitride layer; a second insulator layer; a second silicon nitride layer; and a third insulator layer; using a first photoresist shape as a mask to form a first, initial diameter opening, in said third insulator layer, in said second silicon nitride layer, in said second insulator layer, and in said first silicon nitride layer; using a second photoresist shape as a mask to form a final diameter opening in said third insulator layer, wherein said final diameter is wider than said first, initial diameter, while using said first, initial diameter opening, in said second silicon nitride layer, as a mask for removal of said first insulator layer, creating a second, initial diameter opening, of said dual damascene opening, comprised in said second silicon nitride layer, in said second insulator layer, in said first silicon nitride layer, in said first insulator layer, wherein diameter of said first, initial diameter opening, is equal to diameter of said second, initial diameter opening; removing a region of said barrier layer, exposed at the bottom of said second, initial diameter opening, exposing a portion of the top surface of said underlying, metal interconnect structure, while also removing regions of said second silicon nitride layer, exposed in said final diameter opening; and forming said dual damascene metal structure, in said dual damascene opening, in said composite insulator layer, with said dual damascene metal structure, contacting the top surface of said underlying metal structure, located at the bottom of said dual damascene opening.
Claim 3
Dependent Claim
39 words
The method of claim 1, wherein said barrier layer is a silicon nitride layer, obtained via low pressure chemical vapor deposition, (LPCVD), or plasma enhanced chemical vapor deposition, (PECVD), procedures, at a thickness between about 300 to 1000 Angstroms.
Claim 4
Dependent Claim
30 words
The method of claim 1, wherein said first insulator layer is a silicon oxide layer, obtained via LPCVD or PECVD procedures, at a thickness between about 5000 to 6000 Angstroms.
Claim 5
Dependent Claim
27 words
The method of claim 1, wherein said first silicon nitride layer is obtained via LPCVD or PECVD procedures, at a thickness between about 125 to 175 Angstroms.
Claim 6
Dependent Claim
30 words
The method of claim 1, wherein said second insulator layer is a silicon oxide layer, obtained via LPCVD or PECVD procedures, at a thickness between about 3000 to 4000 Angstroms.
Claim 7
Dependent Claim
27 words
The method of claim 1, wherein said second silicon nitride layer is obtained via LPCVD or PECVD procedures, at a thickness between about 800 to 900 Angstroms.
Claim 8
Dependent Claim
30 words
The method of claim 1, wherein said third insulator layer is a silicon oxide layer, obtained via LPCVD or PECVD procedures, at a thickness between about 5000 to 6000 Angstroms.
Claim 9
Dependent Claim
147 words
The method of claim 1, wherein said first, initial diameter opening, is formed via an anisotropic reactive ion etching, (RIE), procedure, using CHF 3 as an etchant for said third insulator layer, and for said second insulator layer, with an etch rate selectivity of said third insulator layer, and of said second insulator layer, to said second silicon nitride layer, and to said first silicon nitride layer, of about 2 to 1, while a fluorine based chemistry, chosen from a group that contains CF 4 , CH 2 F 2 , or CH 3 F, is used as an etchant for said second silicon nitride layer, and for said first silicon nitride layer, with an etch rate selectivity of said second silicon nitride layer, and of said first silicon nitride layer, to said third insulator layer, and to said second insulator layer, of about 8 to 1.
Claim 10
Dependent Claim
28 words
The method of claim 1, wherein the diameter of said first initial diameter opening, and of said second, initial diameter opening, is between about 0.18 to 0.22 um.
Claim 11
Dependent Claim
49 words
The method of claim 1, wherein said final diameter opening, in said third insulator layer, is formed via an anisotropic RIE procedure, using CHF 3 as an etchant, with an etch rate selectivity of said third insulator layer, to said second silicon nitride layer, of about 2 to 1.
Claim 12
Dependent Claim
20 words
The method of claim 1, wherein the diameter of said final diameter opening, is between about 0.28 to 0.32 um.
Claim 13
Dependent Claim
92 words
The method of claim 1, wherein said barrier layer, exposed at the bottom of said second, initial diameter opening, and regions of said second silicon nitride layer, exposed in said final diameter opening, is removed via an anisotropic RIE procedure, using a fluorine based chemistry, chosen from a group that includes CF 4 , CH 2 F 2 , or CH 3 F, as an etchant, with an etch rate selectivity of said barrier layer, and of said second silicon nitride layer, to said third insulator layer, of about 8 to 1.
Claim 14
Dependent Claim
21 words
The method of claim 1, wherein said dual damascene metal structure, formed in said dual damascene opening, is comprised of copper.
Claim 15
Independent Claim
370 words
A method of forming a dual damascene copper structure, in a dual damascene opening, created in a composite insulator layer, wherein said composite insulator layer is comprised of silicon oxide layers, and multiple silicon nitride, etch stop layers, comprising the steps of: forming an underlying, metal interconnect structure; depositing a first silicon nitride layer, overlying said underlying, metal interconnect structure; depositing a first silicon oxide layer, on said first silicon nitride layer; depositing a second silicon nitride layer, on said first silicon oxide layer; depositing a second silicon oxide layer, on said second silicon nitride layer; depositing a third silicon nitride layer, on said second silicon oxide layer; depositing a third silicon oxide layer, on said third silicon nitride layer; using a first photoresist shape as a mask, to anisotropically create a first, initial diameter opening, in said third silicon oxide layer, in said third silicon nitride layer, in said second silicon oxide layer, and in said second silicon nitride layer; using a second photoresist shape as a mask, to anisotropically create a final diameter opening, in said third silicon oxide layer, wherein said final diameter is wider than said first, initial diameter, while using said first, initial diameter opening, in said third silicon nitride layer, as a mask, to create a second, initial diameter opening, in said third silicon nitride layer, in said second silicon oxide layer, in said second silicon nitride layer, and in said first silicon oxide layer, wherein diameter of said first, initial diameter opening is equal to diameter of said second, initial diameter opening, resulting in said dual damascene opening; anisotropically removing the portion of said first silicon nitride layer, exposed at the bottom of said second, initial diameter opening, while anisotropically removing the regions of said third silicon nitride layer, exposed in said final diameter opening; depositing a copper layer; and removing portions of copper layer from the top surface of said third silicon oxide layer, forming said dual damascene copper structure, in said dual damascene opening, in said composite insulator layer, with said dual damascene copper structure comprised of a copper interconnect structure, located in said wide diameter opening, and comprised of a copper via structure, located in said second, initial diameter opening.
Claim 16
Independent Claim
370 words
A method of forming a dual damascene copper structure, in a dual damascene opening, created in a composite insulator layer, wherein said composite insulator layer is comprised of silicon oxide layers, and multiple silicon nitride, etch stop layers, comprising the steps of: forming an underlying, metal interconnect structure; depositing a first silicon nitride layer, overlying said underlying, metal interconnect structure; depositing a first silicon oxide layer, on said first silicon nitride layer; depositing a second silicon nitride layer, on said first silicon oxide layer; depositing a second silicon oxide layer, on said second silicon nitride layer; depositing a third silicon nitride layer, on said second silicon oxide layer; depositing a third silicon oxide layer, on said third silicon nitride layer; using a first photoresist shape as a mask, to anisotropically create a first, initial diameter opening, in said third silicon oxide layer, in said third silicon nitride layer, in said second silicon oxide layer, and in said second silicon nitride layer; using a second photoresist shape as a mask, to anisotropically create a final diameter opening, in said third silicon oxide layer, wherein said final diameter is wider than said first, initial diameter, while using said first, initial diameter opening, in said third silicon nitride layer, as a mask, to create a second, initial diameter opening, in said third silicon nitride layer, in said second silicon oxide layer, in said second silicon nitride layer, and in said first silicon oxide layer, wherein diameter of said first, initial diameter opening is equal to diameter of said second, initial diameter opening, resulting in said dual damascene opening; anisotropically removing the portion of said first silicon nitride layer, exposed at the bottom of said second, initial diameter opening, while anisotropically removing the regions of said third silicon nitride layer, exposed in said final diameter opening; depositing a copper layer; and removing portions of copper layer from the top surface of said third silicon oxide layer, forming said dual damascene copper structure, in said dual damascene opening, in said composite insulator layer, with said dual damascene copper structure comprised of a copper interconnect structure, located in said wide diameter opening, and comprised of a copper via structure, located in said second, initial diameter opening.
Claim 17
Dependent Claim
27 words
The method of claim 14, wherein said first silicon nitride layer is obtained via LPCVD or PECVD procedures, at a thickness between about 300 to 1000 Angstroms.
Claim 18
Dependent Claim
27 words
The method of claim 14, wherein said first silicon oxide layer is obtained via LPCVD or PECVD procedures, at a thickness between about 5000 to 6000 Angstroms.
Claim 19
Dependent Claim
27 words
The method of claim 14, wherein said second silicon nitride layer is obtained via LPCVD or PECVD procedures, at a thickness between about 125 to 175 Angstroms.
Claim 20
Dependent Claim
27 words
The method of claim 14, wherein said second silicon oxide layer is obtained via LPCVD or PECVD procedures, at a thickness between about 3000 to 4000 Angstroms.
Claim 21
Dependent Claim
27 words
The method of claim 14, wherein said third silicon nitride layer is obtained via LPCVD or PECVD procedures, at a thickness between about 800 to 900 Angstroms.
Claim 22
Dependent Claim
27 words
The method of claim 14, wherein said third silicon oxide layer is obtained via LPCVD or PECVD procedures, at a thickness between about 5000 to 6000 Angstroms.
Claim 23
Dependent Claim
28 words
The method of claim 14, wherein the diameter of said first, initial diameter opening, and of said second, initial diameter opening, is between about 0.18 to 0.28 um.
Claim 24
Dependent Claim
78 words
The method of claim 14, wherein said first, initial diameter opening, is formed via an anisotropic RIE procedure, using CHF 3 as an etchant for said third silicon oxide layer, and for said second silicon oxide layer, while a fluorine based gas, chosen from a group that contains C F , CH 3 F, or CH 2 F 2 , is used as an etchant for said third silicon nitride layer, and for said second silicon nitride layer.
Claim 25
Dependent Claim
27 words
The method of claim 14, wherein the etch rate ratio of silicon oxide to silicon nitride, using CHF 3 as an etchant, is about 2 to 1.
Claim 26
Dependent Claim
44 words
The method of claim 14, wherein the etch rate ratio of silicon nitride to silicon oxide, in a fluorine based chemistry, chosen from a group that includes CF 4 , CH 2 F 2 , or CH 3 F, is about 8 to 1.
Claim 27
Dependent Claim
45 words
The method of claim 14, wherein said final diameter opening, is formed in said third silicon oxide layer, via an anisotropic RIE procedure, using CHF 3 as an etchant, with a etch rate ratio, of silicon oxide to silicon nitride, of about 2 to 1.
Claim 28
Dependent Claim
26 words
The method of claim 14, wherein the diameter of said final diameter opening, in said third silicon oxide layer, is between about 0.28 to 0.38 um.
Claim 29
Dependent Claim
85 words
The method of claim 14, wherein said first silicon nitride layer, exposed at the bottom of said second, initial diameter opening, and wherein regions of said third silicon nitride layer, exposed in said final diameter opening, are removed via an anisotropic RIE procedure, using a fluorine based chemistry, chosen from a group that includes CF 4 , CH 2 F 2 , or CH 3 F, as an etchant, with an etch rate ratio, of silicon nitride to silicon oxide, of about 8 to 1.
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