US6076406A
Expired / Lapsed
US
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Integrated sensing platform and method for improved quantitative and selective monitoring of chemical analytes in both liquid and gas phase
Assignee: National Technology and Engineering Solutions of Sandia LLC
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Filing: 1998-03-25
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Granted: 2000-06-20
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Expires: 2018-03-25
Abstract
Abstract By measuring two or more physical parameters of a thin sensing film which are altered when exposed to chemicals, more effective discrimination between chemicals can be achieved. In using more than one sensor, the sensors are preferably integrated on the same substrate so that they may measure the same thin film. Even more preferably, the sensors are provided orthogonal to one another so that they may measure the same portion of the thin film. These provisions reduce problems in discrimination arising from variations in thin films.
Inventors
- 👤 Dianna S. Blair
- 👤 Gregory C. Frye-Mason
- 👤 Michael A. Butler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 13:27
CPC Classifications
G; G01; G01N; G01N29/00; G01N29/02; G01N29/032; G01N29/022; G01N29/024; G01N21/00; G01N21/75; G01N21/77; G01N2021/7769; G01N2021/7779; G01N21/7703; G01N2291/00; G01N2291/02; G01N2291/021; G01N2291/022; G01N2291/025; G01N2291/0256; G01N2291/04; G01N2291/042; G01N2291/0423
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
57 words
An integrated sensor comprising: a thin film which reacts when exposed to chemicals; a first sensor sensing a first property of said thin film; and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate.
Claim 2
Dependent Claim
57 words
An integrated sensor comprising: a thin film which reacts when exposed to chemicals; a first sensor sensing a first property of said thin film; and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate.
Claim 3
Dependent Claim
19 words
The sensor of claim 1, wherein said first sensor and said second sensor are positioned orthogonally to one another.
Claim 4
Dependent Claim
22 words
The sensor according to claim 1, wherein said first sensor and said second sensor sense a same portion of said thin film.
Claim 5
Dependent Claim
22 words
The sensor according to claim 1, wherein said first property is a mechanical property and said second property is an optical property.
Claim 6
Dependent Claim
26 words
The sensor according to claim 4, wherein said first sensor is a surface acoustic wave detector and said second sensor is an optical refractive index detector.
Claim 7
Dependent Claim
38 words
The sensor of claim 1, further comprising a third sensor integrated on the substrate, said third sensor sensing a third property of said thin film, said third property being different from said first property and said second property.
Claim 8
Dependent Claim
29 words
The sensor according to claim 6, wherein said first property is a mechanical property, said second property is an optical property, and said third property is an electrical property.
Claim 9
Independent Claim
73 words
A method of forming an integrated sensor comprising: providing a thin film on a substrate, the thin film having physical parameters which change when exposed to chemicals; providing a first sensor on the substrate, the first sensor, measuring a first parameter of the thin film; and providing a second sensor on the substrate, the second sensor measuring a second parameter of the thin film, said second parameter being different from said first parameter.
Claim 10
Independent Claim
73 words
A method of forming an integrated sensor comprising: providing a thin film on a substrate, the thin film having physical parameters which change when exposed to chemicals; providing a first sensor on the substrate, the first sensor, measuring a first parameter of the thin film; and providing a second sensor on the substrate, the second sensor measuring a second parameter of the thin film, said second parameter being different from said first parameter.
Claim 11
Dependent Claim
19 words
The method of claim 8, further comprising providing the first sensor and the second sensor orthogonally to one another.
Claim 12
Dependent Claim
29 words
The method of claim 8, further comprising providing further sensors for measuring further parameters of the thin film, the further parameters being different than said first and second parameters.
Claim 13
Independent Claim
584 words
A method of multivariate analysis comprising the step of: collecting data using a sensor selected from the group consisting of an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate; an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and wherein said first sensor and said second sensor are positioned orthogonally to one another, an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and wherein said first sensor and said second sensor sense a same portion of said thin film, an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and wherein said first property is a mechanical property and said second property is an optical property; an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and wherein said first sensor is a surface acoustic wave detector and said second sensor is an optical refractive index detector; an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and further comprising a third sensor integrated on the substrate, said third sensor sensing a third property of said thin film, said third property being different from said first property and said second property; an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and further comprising a third sensor integrated on the substrate, said third sensor sensing a third property of said thin film, said third property being different from said first property and said second property, wherein said first property is a mechanical property, said second property is an optical property, and said third property is an electrical property; and any combination thereof.
Claim 14
Independent Claim
584 words
A method of multivariate analysis comprising the step of: collecting data using a sensor selected from the group consisting of an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate; an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and wherein said first sensor and said second sensor are positioned orthogonally to one another, an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and wherein said first sensor and said second sensor sense a same portion of said thin film, an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and wherein said first property is a mechanical property and said second property is an optical property; an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and wherein said first sensor is a surface acoustic wave detector and said second sensor is an optical refractive index detector; an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and further comprising a third sensor integrated on the substrate, said third sensor sensing a third property of said thin film, said third property being different from said first property and said second property; an integrated sensor comprising: a thin film which reacts when exposed to chemicals, a first sensor sensing a first property of said thin film, and a second sensor sensing a second property, different from said first property, of said thin film, wherein said thin film, said first sensor and said second sensor are integrated on a substrate, and further comprising a third sensor integrated on the substrate, said third sensor sensing a third property of said thin film, said third property being different from said first property and said second property, wherein said first property is a mechanical property, said second property is an optical property, and said third property is an electrical property; and any combination thereof.
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