US5076094A
Expired / Lapsed
US
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Dual output acoustic wave sensor for molecular identification
Assignee: United States Department of Energy
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Filing: 1990-10-03
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Granted: 1991-12-31
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Expires: 2010-10-03
Abstract
Abstract A method of identification and quantification of absorbed chemical species by measuring changes in both the velocity and the attenuation of an acoustic wave traveling through a thin film into which the chemical species is sorbed. The dual output response provides two independent sensor responses from a single sensing device thereby providing twice as much information as a single output sensor. This dual output technique and analysis allows a single sensor to provide both the concentration and the identity of a chemical species or permits the number of sensors required for mixtures to be reduced by a factor of two.
Inventors
- 👤 Gregory C. Frye
- 👤 Stephen J. Martin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 20:13
CPC Classifications
G; G01; G01N; G01N29/00; G01N29/02; G01N29/022; G01N2291/00; G01N2291/02; G01N2291/025; G01N2291/0256; G01N2291/028; G01N2291/02818; G01N2291/04; G01N2291/042; G01N2291/0423; G01N2291/0427
Claims Analysis
Total Claims: 52
Claim 1
Independent Claim
110 words
A method for the identification and quantification of sorbed chemical species onto a coating of a device capable of generating and receiving an acoustic wave, comprising: (a) measuring the changes in the velocity of the acoustic wave resulting from the sorption of the chemical species into the coating as the wave travels through the coating; (b) measuring the changes in the attenuation of an acoustic wave resulting from the sorption of the chemical species into the coating as the wave travels through the coating; (c) correlating the magnitudes of the changes of velocity with respect to changes of the attenuation of the acoustic wave to identify the sorbed chemical species.
Claim 2
Independent Claim
110 words
A method for the identification and quantification of sorbed chemical species onto a coating of a device capable of generating and receiving an acoustic wave, comprising: (a) measuring the changes in the velocity of the acoustic wave resulting from the sorption of the chemical species into the coating as the wave travels through the coating; (b) measuring the changes in the attenuation of an acoustic wave resulting from the sorption of the chemical species into the coating as the wave travels through the coating; (c) correlating the magnitudes of the changes of velocity with respect to changes of the attenuation of the acoustic wave to identify the sorbed chemical species.
Claim 3
Dependent Claim
24 words
The method of claim 1, further comprising: (d) correlating the absolute magnitude of the velocity changes to the concentration of the identified chemical species.
Claim 4
Dependent Claim
24 words
The method of claim 1, further comprising: (d) correlating the absolute magnitude of the attenuation changes to the concentration of the identified chemical species.
Claim 5
Dependent Claim
16 words
The method of claim 2 or 3, wherein the chemical species is in a gas phase.
Claim 6
Dependent Claim
16 words
The method of claim 2 or 3, wherein the chemical species is in a liquid phase.
Claim 7
Dependent Claim
17 words
The method of claim 2 or 3, wherein the chemical species is derived from a solid phase.
Claim 8
Independent Claim
185 words
An apparatus for detecting and identifying at least one unknown chemical species, comprising: (a) an acoustic wave device capable of generating, transmitting and receiving an acoustic wave, said device coated with a material, said material having properties which change upon sorption of a chemical species; (b) means for measuring the velocity of an acoustic wave travelling through said material; (c) means for simultaneously measuring the attenuation of the acoustic wave traveling through said coating material; (d) sampling means to contact said acoustic wave device to said unknown chemical species for sorption of said unknown chemical species into said coating material; (e) means for determining the changes in both the attenuation and velocity values of said acoustic wave upon sorption of said unknown chemical species into said coating material; and (f) means for correlating the magnitudes of the changes of velocity with respect to the changes of the attenuations of the acoustic wave; and (g) means for comparing the values of the velocity and attenuation changes to known values of velocity and attenuation of known chemical species in order to identify said unknown sorbed chemical species.
Claim 9
Independent Claim
185 words
An apparatus for detecting and identifying at least one unknown chemical species, comprising: (a) an acoustic wave device capable of generating, transmitting and receiving an acoustic wave, said device coated with a material, said material having properties which change upon sorption of a chemical species; (b) means for measuring the velocity of an acoustic wave travelling through said material; (c) means for simultaneously measuring the attenuation of the acoustic wave traveling through said coating material; (d) sampling means to contact said acoustic wave device to said unknown chemical species for sorption of said unknown chemical species into said coating material; (e) means for determining the changes in both the attenuation and velocity values of said acoustic wave upon sorption of said unknown chemical species into said coating material; and (f) means for correlating the magnitudes of the changes of velocity with respect to the changes of the attenuations of the acoustic wave; and (g) means for comparing the values of the velocity and attenuation changes to known values of velocity and attenuation of known chemical species in order to identify said unknown sorbed chemical species.
Claim 10
Dependent Claim
39 words
The apparatus of claim 7, further comprising: (g) means for comparing the magnitude of the changes in the velocity response to known values of known chemical species in order to determine the concentration of said unknown sorbed chemical species.
Claim 11
Dependent Claim
39 words
The apparatus of claim 7, further comprising: (g) means for comparing the magnitude of the changes in the attenuation response to known values of known chemical species in order to determine the concentration of said unknown sorbed chemical species.
Claim 12
Independent Claim
69 words
The apparatus of claims 8 or 9, wherein said acoustic wave device comprises a piezoelectric substrate having two interdigitated transducers at opposing ends of said substrate, one of said transducers to generate an acoustic wave, and the other of said transducers to receive an acoustic wave as said wave is transmitted through said piezoelectric substrate and generate a signal having a frequency of said acoustic wave in response thereto.
Claim 13
Independent Claim
78 words
The apparatus of claims 8 or 9, wherein said acoustic wave device comprises a substrate having two interdigitated transducers at opposing ends of said substrate and a piezoelectric coating material on one face of each transducer, one of said transducers to generate an acoustic wave, and the other of said transducers to receive an acoustic wave as said wave is transmitted through said substrate and generate a signal having a frequency of said acoustic wave in response thereto.
Claim 14
Dependent Claim
13 words
The apparatus of claim 11, wherein said piezoelectric coating material is aluminum nitride.
Claim 15
Dependent Claim
21 words
The apparatus of claim 10 wherein said interdigitated transducers are lithographically patterned from a metallized aluminum layer cast onto the substrate.
Claim 16
Dependent Claim
20 words
The apparatus of claim 11 wherein said interdigitated transducers are lithographically patterned from a metallized layer cast onto the substrate.
Claim 17
Dependent Claim
11 words
The apparatus of claim 14 wherein said metallized layer is aluminum.
Claim 18
Dependent Claim
12 words
The apparatus of claim 14 wherein said metallized layer is gold-on-chrome composite.
Claim 19
Independent Claim
16 words
The apparatus of claims 8 or 9, wherein said acoustic wave is a surface acoustic wave.
Claim 20
Independent Claim
16 words
The apparatus of claims 8 or 9, wherein said acoustic wave is an acoustic plate mode.
Claim 21
Independent Claim
15 words
The apparatus of claims 8 or 9, wherein said acoustic wave is a Lamb wave.
Claim 22
Independent Claim
15 words
The apparatus of claims 8 or 9, wherein said acoustic wave is a Love wave.
Claim 23
Dependent Claim
26 words
The apparatus of claim 7 wherein one of said properties of said material which change upon sorption of a chemical species is mass of said material.
Claim 24
Dependent Claim
27 words
The apparatus of claim 7 wherein one of said properties of said material which change upon sorption of a chemical species is the viscoelasticity of said material.
Claim 25
Dependent Claim
233 words
The apparatus of claim 10, wherein said means for measuring the velocity of an acoustic wave traveling through said material further comprises an oscillator loop comprising: (a) a first coupler electrically connected to said acoustic wave device to direct a fraction of said signal's power into a first and second path; (b) a RF amplifier electrically connected along said first path to said first coupler to amplify said signal; (c) a directional coupler electrically connected to said first path to direct a portion of said signal along said first path and along a third path; (d) a frequency counter electrically connected along said third path to said directional coupler, said frequency counter to measure a frequency shift (Δf) of said signal which is related to the velocity shift (Δv) of said wave as it travels through said material by Δf/f o =KΔv/v o where K is the fraction of the acoustic wave path covered by said material sorbing said unknown chemical species and v o and f o are the unperturbed velocity and frequency, respectively; (e) a second coupler electrically connected along said first path to said directional coupler to direct a portion of said signal along said first path into said acoustic wave device and along a fourth path; (f) means for measuring power of said wave electrically connected between said first and second couplers along said second and fourth paths respectively.
Claim 26
Dependent Claim
15 words
The apparatus of claim 23, wherein said means for measuring power is a vector voltmeter.
Claim 27
Dependent Claim
100 words
The apparatus of claim 23, further comprising: (g) two impedance matching networks, one of said networks electrically connected to said input transducer and the other of said networks electrically connected to said output transducer; (h) a variable attenuator electrically connected along said first path between said directional coupler and said second coupler, to reduce the power of the signal; (i) a phase shifter electrically connected along said first path between said RF amplifier and said directional coupler; and (j) a bandpass filter electrically connected along said first path between said phase shifter and said RF amplifier, to filter the signal.
Claim 28
Dependent Claim
140 words
The apparatus of claim 10, further comprising: (a) means for generating an input signal into said input transducer to launch an acoustic wave external, but electrically connected along a first path, to said acoustic wave device; (b) a first coupler electrically connected to said signal generating means along said first path between said generating means and said input transducer, said first coupler to direct a portion of said signal along a second path means for measuring the phase of said signal; (c) a second coupler electrically connected to said output transducer to receive an output signal, said second coupler to direct a portion of said output signal along a third path; (d) means for measuring the phase shift and the attenation shift of said signal electrically interconnected between said first and second couplers along said second and third paths, respectively.
Claim 29
Dependent Claim
200 words
The apparatus of claim 10, further comprising: (a) means for generating an input signal into said input transducer to launch an acoustic wave external, but electrically connected along a first path, to said acoustic wave device, and the frequency of said input signal from said signal generating means is maintained at a constant phase value; (b) a first coupler electrically connected to said signal generating means along said first path between said generating means and said input transducer, said first coupler to direct a portion of said signal along a second path means for measuring the power of said signal; (c) a second coupler electrically connected to said output transducer to receive an output signal, said second coupler to direct a portion of said output signal along a third path; (d) means for monitoring the frequency shift of said output signal, where the velocity shift (Δv) of said acoustic wave is determined from the frequency shift (Δf) using Δf/f o =KΔv/v o where K is a fraction of said acoustic wave path covered by said coating material sorbing said unknown chemical species and v o and f o are the unperturbed velocity and frequency of said wave and signal, respectively.
Claim 30
Dependent Claim
55 words
The apparatus of claim 23, wherein said means for measuring the attenuation of said acoustic wave traveling through said material is measured using said first and second couplers to divide a portion of said signal at the input and output transducers, respectively, and to measure power level of said signal by means for measuring power.
Claim 31
Dependent Claim
15 words
The apparatus of claim 28, wherein said means for measuring power is a vector voltmeter.
Claim 32
Dependent Claim
15 words
The apparatus of claim 28, wherein said means for measuring power is a power meter.
Claim 33
Dependent Claim
55 words
The apparatus of claim 26, wherein said means for measuring the attenuation of said acoustic wave traveling through said material is measured using said first and second couplers to divide a portion of said signal at the input and output transducers, respectively, and to measure power level of said signal by means for measuring power.
Claim 34
Dependent Claim
15 words
The apparatus of claim 31, wherein said means for measuring power is a vector voltmeter.
Claim 35
Dependent Claim
55 words
The apparatus of claim 27, wherein said means for measuring the attenuation of said acoustic wave traveling through said material is measured using said first and second couplers to divide a portion of said signal at the input and output transducers, respectively, and to measure power level of said signal by means for measuring power.
Claim 36
Dependent Claim
15 words
The apparatus of claim 33, wherein said means for measuring power is a vector voltmeter.
Claim 37
Dependent Claim
233 words
The apparatus of claim 11, wherein said means for measuring the velocity of an acoustic wave traveling through said material further comprises an oscillator loop comprising: (a) a first coupler electrically connected to said acoustic wave device to direct a fraction of said signal's power into a first and second path; (b) a RF amplifier electrically connected along said first path to said first coupler to amplify said signal; (c) a directional coupler electrically connected to said first path to direct a portion of said signal along said first path and along a third path; (d) a frequency counter electrically connected along said third path to said directional coupler, said frequency counter to measure a frequency shift (Δf) of said signal which is related to the velocity shift (Δv) of said wave as it travels through said material by Δf/f o =KΔv/v o where K is the fraction of the acoustic wave path covered by said material sorbing said unknown chemical species and v o and f o are the unperturbed velocity and frequency, respectively; (e) a second coupler electrically connected along said first path to said directional coupler to direct a portion of said signal along said first path into said acoustic wave device and along a fourth path; (f) means for measuring power of said wave electrically connected between said first and second couplers along said second and fourth paths respectively.
Claim 38
Dependent Claim
15 words
The apparatus of claim 35, wherein said means for measuring power is a vector voltmeter.
Claim 39
Dependent Claim
100 words
The apparatus of claim 35, further comprising: (g) two impedance matching networks, one of said networks electrically connected to said input transducer and the other of said networks electrically connected to said output transducer; (h) a variable attenuator electrically connected along said first path between said directional coupler and said second coupler, to reduce the power of the signal; (i) a phase shifter electrically connected along said first path between said RF amplifier and said directional coupler; and (j) a bandpass filter electrically connected along said first path between said phase shifter and said RF amplifier, to filter the signal.
Claim 40
Dependent Claim
165 words
The apparatus of claim 11, further comprising: (a) means for generating an input signal into said input transducer to launch an acoustic wave external, but electrically connected along a first path, to said acoustic wave device; (b) a first coupler electrically connected to said signal generating means along said first path between said generating means and said acoustic wave device, said first coupler to direct a portion of said signal along a second path means for measuring the phase shift of said signal; (c) a second coupler electrically connected to said acoustic wave device along said first path to receive an output signal from said acoustic wave device, said second coupler to direct a portion of said output signal along a third path for measuring the phase shift and the velocity shift of said output signal; and (d) means for measuring phase and monitoring the frequency shift of said signal electrically interconnected between said first and second couplers along said second and third paths, respectively.
Claim 41
Dependent Claim
195 words
The apparatus of claim 11, further comprising: (a) means for generating an input signal into said input transducer to launch an acoustic wave external, but electrically connected along a first path, to said acoustic wave device, and the frequency of said input signal from said signal generating means is maintained at a constant phase value; (b) a first coupler electrically connected to said signal generating means along said first path between said generating means and said input transducer, said first coupler to direct a portion of said signal along a second path means for measuring the power of said signal; (c) a second coupler electrically connected to said output transducer to receive an output signal, said second coupler to direct a portion of said output signal along a third path; (d) means for monitoring frequency shift where the velocity shift (Δv) of said acoustic wave is determined from the frequency shift (Δf) using Δf/f o =KΔv/v o where K is a fraction of said acoustic wave path covered by said coating material sorbing said unknown chemical species and v o and f o are the unperturbed velocity and frequency of said wave and signal, respectively.
Claim 42
Dependent Claim
55 words
The apparatus of claim 35, wherein said means for measuring the attenuation of said acoustic wave traveling through said material is measured using said first and second couplers to divide a portion of said signal at the input and output transducers, respectively, and to measure power level of said signal by means for measuring power.
Claim 43
Dependent Claim
15 words
The apparatus of claim 40, wherein said means for measuring power is a vector voltmeter.
Claim 44
Dependent Claim
54 words
The apparatus of claim 38, wherein said means for measuring the attenuation of said acoustic wave traveling through said material is measured using said first and second couplers to divide a portion of said signal at the input and output transducers, respectively, and to measure power level of said signal by a vector voltmeter.
Claim 45
Dependent Claim
54 words
The apparatus of claim 39, wherein said means for measuring the attenuation of said acoustic wave traveling through said material is measured using said first and second couplers to divide a portion of said signal at the input and output transducers, respectively, and to measure power level of said signal by a vector voltmeter.
Claim 46
Dependent Claim
47 words
The apparatus of claim 7, wherein said sampling means further comprises a semipermeable membrane surrounding said acoustic wave device which permits said unknown chemical species in a liquid solution to be transported across said membrane into a gas phase to be contacted with said acoustic wave device.
Claim 47
Dependent Claim
23 words
An array comprising a plurality of the apparatus of claim 7, each apparatus electrically interconnected for the purpose of detecting multiple chemical species.
Claim 48
Dependent Claim
62 words
The array of claim 45, further comprising a pattern recognition means interconnected to said array, said pattern recognitions means to identify and quantify said multiple chemical species based on a plurality of correlated velocity and attenuation changes, each of said correlated velocity and attenuation changes associated with one of said sensors, said plurality of correlated changes analyzed by said pattern recognition menus.
Claim 49
Independent Claim
509 words
An apparatus for detecting and identifying at least one unknown chemical species, comprising: (a) at least one acoustic wave device, wherein said acoustic wave device comprises a piezoelectric substrate having two interdigitated transducers at opposing ends of said substrate, one of said transducers to generate an acoustic wave, and the other of said transducers to receive an acoustic wave as said wave is transmitted through said piezoelectric substrate and to generate a signal having a frequency of said acoustic wave in response thereto, said substrate coated with a material, said material having properties which change upon sorption of a chemical species; (b) an oscillator loop to measure the velocity of an acoustic wave traveling through said material, said loop further comprising a first coupler electrically connected to said acoustic wave device to direct a fraction of said signal's power into a first and second path, a RF amplifier electrically connected along said first path to said first coupler to amplify said signal, a directional coupler electrically connected to said first path to direct a portion of said signal along said first path and along a third path, a frequency counter electrically connected along said third path to said directional coupler, said frequency counter to measure a frequency shift (Δf) of said signal which is related to the velocity shift (Δv) of said wave as it travels through said material by Δf/f o =KΔv/v o where K is the fraction of the acoustic wave path covered by said material sorbing said unknown chemical species and v o and f o are the unperturbed velocity and frequency, respectively, a second coupler electrically connected along said first path to said directional coupler to direct a portion of said signal along said first path into said acoustic wave device and along a fourth path, and a bandpass filter electrically connected along said first path between said directional coupler and said RF amplifier, to filter the signal (c) a vector voltmeter electrically connected between said first and second couplers along said second and fourth paths to divide said signal at said output transducer and to divide said signal at said input transducer, respectively, for measuring the power level of said signal which power level is proportional to the attenuation of power of said wave traveling through said material; (d) sampling means to contact said acoustic wave device to said unknown chemical species for sorption of said unknown chemical species into said coating material; (e) microprocessing means for acquiring data indicating changes in and storing the values of said changes of both the attenuation and velocity values of said acoustic wave upon sorption of said unknown chemical species; (f) a microprocessing analysis means for comparing the values of the velocity and attenuation changes to known values of known chemical species in order to identify said unknown sorbed chemical species; and (g) microprocessing comparing means for comparing the absolute value of the changes in the velocity response to known values of known chemical species in order to determine the concentration of said unknown sorbed chemical species.
Claim 50
Independent Claim
509 words
An apparatus for detecting and identifying at least one unknown chemical species, comprising: (a) at least one acoustic wave device, wherein said acoustic wave device comprises a piezoelectric substrate having two interdigitated transducers at opposing ends of said substrate, one of said transducers to generate an acoustic wave, and the other of said transducers to receive an acoustic wave as said wave is transmitted through said piezoelectric substrate and to generate a signal having a frequency of said acoustic wave in response thereto, said substrate coated with a material, said material having properties which change upon sorption of a chemical species; (b) an oscillator loop to measure the velocity of an acoustic wave traveling through said material, said loop further comprising a first coupler electrically connected to said acoustic wave device to direct a fraction of said signal's power into a first and second path, a RF amplifier electrically connected along said first path to said first coupler to amplify said signal, a directional coupler electrically connected to said first path to direct a portion of said signal along said first path and along a third path, a frequency counter electrically connected along said third path to said directional coupler, said frequency counter to measure a frequency shift (Δf) of said signal which is related to the velocity shift (Δv) of said wave as it travels through said material by Δf/f o =KΔv/v o where K is the fraction of the acoustic wave path covered by said material sorbing said unknown chemical species and v o and f o are the unperturbed velocity and frequency, respectively, a second coupler electrically connected along said first path to said directional coupler to direct a portion of said signal along said first path into said acoustic wave device and along a fourth path, and a bandpass filter electrically connected along said first path between said directional coupler and said RF amplifier, to filter the signal (c) a vector voltmeter electrically connected between said first and second couplers along said second and fourth paths to divide said signal at said output transducer and to divide said signal at said input transducer, respectively, for measuring the power level of said signal which power level is proportional to the attenuation of power of said wave traveling through said material; (d) sampling means to contact said acoustic wave device to said unknown chemical species for sorption of said unknown chemical species into said coating material; (e) microprocessing means for acquiring data indicating changes in and storing the values of said changes of both the attenuation and velocity values of said acoustic wave upon sorption of said unknown chemical species; (f) a microprocessing analysis means for comparing the values of the velocity and attenuation changes to known values of known chemical species in order to identify said unknown sorbed chemical species; and (g) microprocessing comparing means for comparing the absolute value of the changes in the velocity response to known values of known chemical species in order to determine the concentration of said unknown sorbed chemical species.
Claim 51
Independent Claim
128 words
A method for the identification and quantification of sorbed chemical species into a coating of a device capable of generating, transmitting and receiving an acoustic wave, comprising: (a) measuring the changes in the velocity of the acoustic wave resulting from the sorption of the chemical species into the coating as the wave travels through the coating; (b) measuring the changes in the attenuation of an acoustic wave resulting from the sorption of the chemical species into the coating as the wave travels through the coating; (c) correlating the magnitudes of the changes of velocity with respect to changes of the attenuation of the acoustic wave to identify the sorbed chemical species. (d) correlating the absolute magnitude of the velocity changes to the concentration of the identified chemical species.
Claim 52
Independent Claim
128 words
A method for the identification and quantification of sorbed chemical species into a coating of a device capable of generating, transmitting and receiving an acoustic wave, comprising: (a) measuring the changes in the velocity of the acoustic wave resulting from the sorption of the chemical species into the coating as the wave travels through the coating; (b) measuring the changes in the attenuation of an acoustic wave resulting from the sorption of the chemical species into the coating as the wave travels through the coating; (c) correlating the magnitudes of the changes of velocity with respect to changes of the attenuation of the acoustic wave to identify the sorbed chemical species. (d) correlating the absolute magnitude of the velocity changes to the concentration of the identified chemical species.
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