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Insulated gate bipolar transistor

Assignee: Fuji Electric Co Ltd
•
Filing: 1993-11-12
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Granted: 2000-06-06
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Expires: 2013-11-12
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Abstract

Abstract A insulated gate bipolar transistor comprising a semiconductor substrate layer having an impurity concentration of not less than 4.0×10 13 /cm 3 , and being substantially free of lifetime killers.

Inventors

  • 👤 Noriyuki Iwamuro

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-06 05:33
CPC Classifications
H; H10; H10D; H10D12/00; H10D12/01; H10D12/031; H10D12/032; H10D12/411; H10D12/441; H10D62/00; H10D62/10; H10D62/17; H10D62/351; H10D62/60

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 164 words
A semiconductor element, comprising: a substrate of first conductivity type having an impurity concentration of not less than 4.0×10 13 /cm 3 , said substrate being produced from a single silicon crystal prepared by a zone melting method and substantially free of lifetime killers; a first diffused region of second conductivity type in a first surface of the substrate; a second diffused region of first conductivity type in the first region such that a channel region is formed between the second region and the substrate through the first region; an insulating film on the first surface of the substrate over the channel region; a gate electrode on the insulating film; a source electrode on the first surface of the substrate in contact with the first and second regions; a third diffused region of second conductivity type formed in an opposite second surface of the substrate and having a depth of at least 2 microns; and a drain electrode in contact with said third region.
Claim 2
Dependent Claim 164 words
A semiconductor element, comprising: a substrate of first conductivity type having an impurity concentration of not less than 4.0×10 13 /cm 3 , said substrate being produced from a single silicon crystal prepared by a zone melting method and substantially free of lifetime killers; a first diffused region of second conductivity type in a first surface of the substrate; a second diffused region of first conductivity type in the first region such that a channel region is formed between the second region and the substrate through the first region; an insulating film on the first surface of the substrate over the channel region; a gate electrode on the insulating film; a source electrode on the first surface of the substrate in contact with the first and second regions; a third diffused region of second conductivity type formed in an opposite second surface of the substrate and having a depth of at least 2 microns; and a drain electrode in contact with said third region.
Claim 3
Dependent Claim 30 words
The semiconductor element according to claim 1, comprising a high impurity concentration buffer fourth diffused region of first conductivity type in the substrate beyond and adjacent to the third region.
Claim 4
Dependent Claim 18 words
The semiconductor element according to claim 1, wherein the zone melting method is a floating zone melting process.
Claim 5
Dependent Claim 15 words
The semiconductor element according to claim 1, wherein the substrate is approximately 200 microns thick.
Claim 6
Dependent Claim 70 words
An insulated gate bipolar transistor comprising: a semiconductor substrate of first conductivity type having an impurity concentration of not less than 4.0×10 13 /cm 3 , and being produced from a single silicon crystal prepared by a zone melting method and substantially free of lifetime killers; and a diffused region of second conductivity type formed in a surface of the substrate and having a depth of at least 2 microns.
Claim 7
Dependent Claim 70 words
An insulated gate bipolar transistor comprising: a semiconductor substrate of first conductivity type having an impurity concentration of not less than 4.0×10 13 /cm 3 , and being produced from a single silicon crystal prepared by a zone melting method and substantially free of lifetime killers; and a diffused region of second conductivity type formed in a surface of the substrate and having a depth of at least 2 microns.

References Cited (Backward Citations)

US4782372A Cited
US5031009A Cited
EP0330122A1 Cited
US5237183A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-06-06 2003-12-06 2004-06-06 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-06-06 2007-12-06 2008-06-06 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-06-06 2011-12-06 2012-06-06 $7700.00 Window Closed / Lapsed

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