Method of forming a contact of a semiconductor device

Claim 1

A method of forming a contact of a semiconductor device comprising steps of: providing a semiconductor substrate defined as a memory cell portion and a memory cell peripheral portion; sequentially forming a gate insulating film, a first conductive layer and a first insulating film on top of the semiconductor substrate; patterning said gate insulating film, said first conductive layer and said first insulating film; forming a first spacer at a sidewall of said first insulating film and said first conductive layer patterned; sequentially forming an etching barrier layer and a second insulating film on the exposed surface of the entire structure; forming a first photoresist pattern on said second insulating film; simultaneously forming the first contact hole and the storage node contact hole respectively on the top of said second insulating film disposed on the memory cell portion and memory cell peripheral portion by selectively removing said second insulating film and etching barrier layer by using the first photoresist film pattern as a mask; forming said first photoresist film pattern; forming a conductive layer on the exposed surface of the entire structure; etching said conductive layer, to form a second spacer to the sidewall of said first contact hole and a storage node plug in the storage node contact hole; forming a third insulating film on the surface of the entire structure, and forming a second photoresist film pattern on said third insulating film in order to form a contact between a third conductive layer formed according to the following process and said first conductive layer disposed on the memory cell peripheral portion, and the bit line contact hole of the memory cell portion; simultaneously forming the bit line contact hole and a second contact hole by selectively removing said third insulating film and second insulating film and first insulating film by using said second photoresist film pattern as a mask; and removing said second photoresist film pattern, and forming and patterning the second conductive layer on the surface of the entire structure.

Claim 2

A method of forming a contact of a semiconductor device comprising steps of: providing a semiconductor substrate defined as a memory cell portion and a memory cell peripheral portion; sequentially forming a gate insulating film, a first conductive layer and a first insulating film on top of the semiconductor substrate; patterning said gate insulating film, said first conductive layer and said first insulating film; forming a first spacer at a sidewall of said first insulating film and said first conductive layer patterned; sequentially forming an etching barrier layer and a second insulating film on the exposed surface of the entire structure; forming a first photoresist pattern on said second insulating film; simultaneously forming the first contact hole and the storage node contact hole respectively on the top of said second insulating film disposed on the memory cell portion and memory cell peripheral portion by selectively removing said second insulating film and etching barrier layer by using the first photoresist film pattern as a mask; forming said first photoresist film pattern; forming a conductive layer on the exposed surface of the entire structure; etching said conductive layer, to form a second spacer to the sidewall of said first contact hole and a storage node plug in the storage node contact hole; forming a third insulating film on the surface of the entire structure, and forming a second photoresist film pattern on said third insulating film in order to form a contact between a third conductive layer formed according to the following process and said first conductive layer disposed on the memory cell peripheral portion, and the bit line contact hole of the memory cell portion; simultaneously forming the bit line contact hole and a second contact hole by selectively removing said third insulating film and second insulating film and first insulating film by using said second photoresist film pattern as a mask; and removing said second photoresist film pattern, and forming and patterning the second conductive layer on the surface of the entire structure.

Claim 8

A method of forming a contact of a semiconductor device comprising steps of: providing a semiconductor substrate defined as a memory cell portion and a memory cell peripheral portion; sequentially forming a gate insulating film, a first silicide film and a first silicon nitride film on said semiconductor substrate; patterning said gate insulating film, said first silicide film and said first silicon nitride film; forming a first spacer at sidewall of said first silicide film and first silicon nitride film patterned; sequentially forming an etching barrier layer and a first insulating film on the exposed surface of the entire structure; forming a first photoresist pattern on said first insulating film; simultaneously forming the first contact hole and the storage node contact hole respectively on the top of said first insulating film of the memory cell portion and memory cell peripheral portion by selectively removing said first insulating film and etching barrier layer by using the first photoresist film pattern as a mask; removing said first photoresist film pattern and forming a conductive layer on the exposed surface of the entire structure; etching the entire surface of said conductive layer, to form a second spacer at the sidewall of said first contact hole and a storage node plug in the storage node contact hole; forming a second insulating film on the surface of the entire structure, and forming a second photoresist film pattern on said second insulating film in order to form a contact between a second silicide film formed according to the following process and said first silicide film disposed on the memory cell peripheral portion, and the bit line contact hole disposed on the memory cell portion; simultaneously forming the bit line contact hole and a second contact hole by selectively removing said second insulating film and first insulating film and first silicon nitride film by using said second photoresist film pattern as a mask; and removing said second photoresist film pattern, and forming and patterning the second silicide film on the surface of the entire structure.

Claim 9

A method of forming a contact of a semiconductor device comprising steps of: providing a semiconductor substrate defined as a memory cell portion and a memory cell peripheral portion; sequentially forming a gate insulating film, a first silicide film and a first silicon nitride film on said semiconductor substrate; patterning said gate insulating film, said first silicide film and said first silicon nitride film; forming a first spacer at sidewall of said first silicide film and first silicon nitride film patterned; sequentially forming an etching barrier layer and a first insulating film on the exposed surface of the entire structure; forming a first photoresist pattern on said first insulating film; simultaneously forming the first contact hole and the storage node contact hole respectively on the top of said first insulating film of the memory cell portion and memory cell peripheral portion by selectively removing said first insulating film and etching barrier layer by using the first photoresist film pattern as a mask; removing said first photoresist film pattern and forming a conductive layer on the exposed surface of the entire structure; etching the entire surface of said conductive layer, to form a second spacer at the sidewall of said first contact hole and a storage node plug in the storage node contact hole; forming a second insulating film on the surface of the entire structure, and forming a second photoresist film pattern on said second insulating film in order to form a contact between a second silicide film formed according to the following process and said first silicide film disposed on the memory cell peripheral portion, and the bit line contact hole disposed on the memory cell portion; simultaneously forming the bit line contact hole and a second contact hole by selectively removing said second insulating film and first insulating film and first silicon nitride film by using said second photoresist film pattern as a mask; and removing said second photoresist film pattern, and forming and patterning the second silicide film on the surface of the entire structure.