US6071795A
Expired / Lapsed
US
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Separation of thin films from transparent substrates by selective optical processing
Assignee: University of California
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Filing: 1998-01-23
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Granted: 2000-06-06
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Expires: 2018-01-23
Abstract
Abstract A method of separating a thin film of GaN epitaxially grown on a sapphire substrate. The thin film is bonded to an acceptor substrate, and the sapphire substrate is laser irradiated with a scanned beam at a wavelength at which sapphire is transparent but the GaN is strongly absorbing, e.g., 248 nm. After the laser irradiation, the sample is heated above the melting point of gallium, i.e., above 30° C., and the acceptor substrate and attached GaN thin film are removed from the sapphire growth substrate. If the acceptor substrate is flexible, the GaN thin film can be scribed along cleavage planes of the GaN, and, when the flexible substrate is bent, the GaN film cleaves on those planes. Thereby, GaN lasers and other electronic and opto-electronic devices can be formed.
Inventors
- 👤 Nathan W. Cheung
- 👤 Timothy D. Sands
- 👤 William S. Wong
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 06:46
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1914; H10H; H10H20/00; H10H20/01; H10H20/011; H10H20/013; H10H20/0133; H10H20/01335; H10P34/00; H10P34/40; H10P34/42; H10H20/018; H10P72/00; H10P72/70; H10P72/74; H10P72/7432; H10W; H10W90/00; H10W90/701; H10W90/751; H10W90/752
Claims Analysis
Total Claims: 27
Claim 1
Independent Claim
150 words
A method of separating a thin film from a growth substrate, comprising the steps of: growing a film of a first composition on a first side of a crystallographically oriented first substrate of a second composition, wherein said film comprises a III-V nitride compound and said first substrate comprises sapphire; bonding said film on a side thereof opposite said first substrate to a second substrate; irradiating said first substrate from an irradiation side thereof with light of a wavelength that is substantially more strongly absorbed in said film than in the one of said first and second substrates on said irradiation side of said film, wherein said irradiating step forms an interfacial layer between said film and said first substrate; and after completion of said irradiating step, detaching said second substrate with portions of said film attached thereto from said first substrate, wherein said detaching step severs said interfacial layer.
Claim 2
Independent Claim
150 words
A method of separating a thin film from a growth substrate, comprising the steps of: growing a film of a first composition on a first side of a crystallographically oriented first substrate of a second composition, wherein said film comprises a III-V nitride compound and said first substrate comprises sapphire; bonding said film on a side thereof opposite said first substrate to a second substrate; irradiating said first substrate from an irradiation side thereof with light of a wavelength that is substantially more strongly absorbed in said film than in the one of said first and second substrates on said irradiation side of said film, wherein said irradiating step forms an interfacial layer between said film and said first substrate; and after completion of said irradiating step, detaching said second substrate with portions of said film attached thereto from said first substrate, wherein said detaching step severs said interfacial layer.
Claim 3
Dependent Claim
16 words
The method of claim 1, wherein said irradiation side is a second side of said first.
Claim 4
Dependent Claim
13 words
The method of claim 1, wherein said detaching step liquifies said interfacial layer.
Claim 5
Dependent Claim
23 words
The method of claim 1, wherein said detaching step ultrasonically irradiates said first and second substrates so as to dissolve said interfacial layer.
Claim 6
Dependent Claim
15 words
The method of claim 1, wherein said detaching step selectively etches away said interfacial layer.
Claim 7
Dependent Claim
21 words
The method of claim 1, wherein said irradiating step raster scans a laser beam over an area of said first substrate.
Claim 8
Dependent Claim
14 words
The method of claim 1, wherein said irradiating step uses a KrF excimer laser.
Claim 9
Dependent Claim
14 words
The method of claim 1, wherein said III-V nitride compound comprises gallium and nitrogen.
Claim 10
Dependent Claim
28 words
The method of claim 8, wherein said detaching step includes heating said first and second substrates and said film to a temperature above a melting point of gallium.
Claim 11
Dependent Claim
18 words
The method of claim 9, wherein said irradiating step is performed at a temperature below said melting point.
Claim 12
Dependent Claim
14 words
The method of claim 1, wherein said III-V nitride compound comprises aluminum and nitrogen.
Claim 13
Dependent Claim
12 words
The method of claim 1, wherein said second substrate comprises a wax.
Claim 14
Dependent Claim
13 words
The method of claim 1, wherein said second substrate comprises a silicon substrate.
Claim 15
Dependent Claim
12 words
The method of claim 1, wherein said second substrate comprises a ceramic.
Claim 16
Dependent Claim
12 words
The method of claim 1, wherein said second substrate comprises a perovskite.
Claim 17
Dependent Claim
12 words
The method of claim 1, wherein said substrate comprises a flexible substrate.
Claim 18
Dependent Claim
40 words
The method of claim 16, further comprising: etching scribe lines in said thin film along cleavage planes of said thin film; and bending said flexible substrate in a direction perpendicular to said scribe lines sufficiently to cleave said thin film.
Claim 19
Dependent Claim
13 words
The method of claim 17, wherein said thin film comprises gallium and nitrogen.
Claim 20
Dependent Claim
21 words
The method of claim 1, wherein said bonding step includes applying a glue layer between said film and said second substrate.
Claim 21
Dependent Claim
21 words
The method of claim 1, wherein said bonding step includes applying a metal layer between said film and said second substrate.
Claim 22
Dependent Claim
17 words
The method of claim 1, wherein said bonding step includes fusing said film to said second substrate.
Claim 23
Dependent Claim
25 words
The method of claim 1, comprising the further step of lifting off said thin film from said second substrate to form a free-standing thin film.
Claim 24
Dependent Claim
20 words
The method of claim 1, further comprising epitaxially growing another film on said thin film bonded to said second substrate.
Claim 25
Independent Claim
132 words
A method of separating a thin film from a growth substrate, comprising the steps of: growing a film of a first composition on a first side of a crystallographically oriented first substrate of a second composition, wherein said film comprises GaN; bonding said film on a side thereof opposite said first substrate to a second substrate; irradiating said first substrate from a second side thereof with light of a wavelength that is substantially more strongly absorbed in said film than in said first substrate, said irradiating step producing an interfacial layer between said first substrate and said film and not causing said second substrate to separate from said first substrate; and after completion of said irradiating step, detaching said second substrate with portions of said film attached thereto from said first substrate.
Claim 26
Independent Claim
132 words
A method of separating a thin film from a growth substrate, comprising the steps of: growing a film of a first composition on a first side of a crystallographically oriented first substrate of a second composition, wherein said film comprises GaN; bonding said film on a side thereof opposite said first substrate to a second substrate; irradiating said first substrate from a second side thereof with light of a wavelength that is substantially more strongly absorbed in said film than in said first substrate, said irradiating step producing an interfacial layer between said first substrate and said film and not causing said second substrate to separate from said first substrate; and after completion of said irradiating step, detaching said second substrate with portions of said film attached thereto from said first substrate.
Claim 27
Dependent Claim
23 words
The method of claim 24, wherein said detaching step includes heating said first and second substrates to above a melting point of gallium.
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