Electro-optic polymer waveguide device for decreasing a driving voltage and an optical loss and method of making the same

Claim 1

An electro-optic polymer waveguide device which decreases a driving voltage and an optical loss, wherein a vertical tapered waveguide region is formed between passive input and output portions in a waveguide and an electro-optic modulating region, and wherein an amplitude of a waveguide mode of the input and output portions is equal to that of a coupled optical fiber, thereby minimizing a connection loss with the optical fiber.

Claim 8

A method of manufacturing an electro-optic polymer waveguide device comprising the steps of: forming a lower cladding layer of a passive waveguide and a first core layer on a substrate; forming a lower electrode which is deposited partially on a portion of the first core layer; forming a second core layer on said layers and said electrode; forming an electro-optic waveguide core layer on the second core layer to make a shape of a channel waveguide; etching an exposed portion using a mask pattern by reactive ion etching RIE method, so that the electro-optic waveguide core layer and the second core layer are removed in a tapered shape; forming a third core layer, an upper electrode on the third core layer corresponding to the lower electrode, and a fourth core layer on the resultant structure; etching an exposed core layer using a mask pattern for an electro-optic waveguide region and a mask pattern for a waveguide by RIE method to complete the passive waveguide core layer; and forming an upper cladding layer of the passive waveguide on the resultant structure, thereby completing the electro-optic polymer waveguide device.

Claim 9

A method of manufacturing an electro-optic polymer waveguide device comprising the steps of: forming a lower cladding layer of a passive waveguide and a first core layer on a substrate; forming a lower electrode which is deposited partially on a portion of the first core layer; forming a second core layer on said layers and said electrode; forming an electro-optic waveguide core layer on the second core layer to make a shape of a channel waveguide; etching an exposed portion using a mask pattern by reactive ion etching RIE method, so that the electro-optic waveguide core layer and the second core layer are removed in a tapered shape; forming a third core layer, an upper electrode on the third core layer corresponding to the lower electrode, and a fourth core layer on the resultant structure; etching an exposed core layer using a mask pattern for an electro-optic waveguide region and a mask pattern for a waveguide by RIE method to complete the passive waveguide core layer; and forming an upper cladding layer of the passive waveguide on the resultant structure, thereby completing the electro-optic polymer waveguide device.