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US6066419A Expired / Lapsed US ⏱️ 0.0 years remaining

Method for monitoring dosage/focus/leveling

Assignee: United Microelectronics Corp
•
Filing: 1999-03-16
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Granted: 2000-05-23
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Expires: 2019-03-16
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Abstract

Abstract A method for monitoring dosage/focus/leveling is provided. A control wafer is provided and divided into several regions. Five of the regions near the center of the wafer are used to monitor normally. Other regions are used as dummy shots. When a situation of a stepper changes greatly, the dosage/focus/leveling of the control wafer is monitored using the dummy shots. In monitoring exposure dosage, the middlemost region is monitored. One of the five regions, which is the most central, is exposed with a low exposure energy to enhance sensitivity of critical dimension versus energy. Many points with small areas are developed in the centermost region to take sufficient samples. Since the developed points are close, effects from the nonuniformity of development and from the nonuniformity of the photoresist layer are prevented. In focus/leveling monitoring, a curve diagram of exposure dosage versus critical dimension is provided. An exposure parameter is taken at a range of the curve with a large slope. The focus/leveling is monitored at the other four regions near the middlemost region.

Inventors

  • 👤 Cheng-Kuan Wu
  • 👤 Te-Yang Fang

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-31 19:44
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70483; G03F7/7055; G03F7/70558; G03F7/70605; G03F7/70616; G03F7/70625; G03F7/70641

Claims Analysis

Total Claims: 9
Claim 1
Independent Claim 65 words
A method for monitoring dosage/focus/leveling, comprising the steps of: providing a controlling wafer comprising a first region, second regions, first dummy shots and second dummy shots, wherein the first region has exposure points; applying a low exposure energy to the exposure points of the first region to monitor exposure dosage; and applying a high exposure energy to the second regions to monitor focus and leveling.
Claim 2
Independent Claim 65 words
A method for monitoring dosage/focus/leveling, comprising the steps of: providing a controlling wafer comprising a first region, second regions, first dummy shots and second dummy shots, wherein the first region has exposure points; applying a low exposure energy to the exposure points of the first region to monitor exposure dosage; and applying a high exposure energy to the second regions to monitor focus and leveling.
Claim 3
Dependent Claim 16 words
The method according to claim 1, wherein an anti-reflecting layer is formed on the controlling wafer.
Claim 4
Dependent Claim 14 words
The method according to claim 2, wherein the anti-reflecting layer is an organic layer.
Claim 5
Dependent Claim 14 words
The method according to claim 2, wherein the anti-reflecting layer is an inorganic layer.
Claim 6
Dependent Claim 21 words
The method according to claim 1, wherein a monitoring range of focus is between about -0.3 μm and about 0.3 μm.
Claim 7
Dependent Claim 29 words
The method according to claim 5, wherein the first dummy shots are monitored when the monitoring range of focus is smaller than -0.3 μm or larger than 0.3 μm.
Claim 8
Dependent Claim 21 words
The method according to claim 1, wherein a monitoring range of leveling is between about -15 μrad and about 15 μrad.
Claim 9
Dependent Claim 29 words
The method according to claim 7, wherein the second dummy shots are monitored when the monitoring range of leveling is smaller than -15 μrad or larger than 15 μrad.

References Cited (Backward Citations)

US5288572A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2003-05-23 2003-11-22 2004-05-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2007-05-23 2007-11-22 2008-05-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2011-05-23 2011-11-22 2012-05-23 $7700.00 Window Closed / Lapsed

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