Hybrid heater with ceramic foil serrated plate and gas assist

Claim 2

A substrate heating apparatus for heating a substrate, comprising: a chamber; and a substrate heater disposed in said chamber, said substrate heater comprising: a first plate having a bottom surface with at least one groove along said bottom surface, said first plate forming at least two individual thermal zones at least partially insulated from each other by said at least one groove, wherein said at least one groove forms an insulating boundary between said at least two thermal zones extending into said first plate from said bottom surface; a heater element; and a second plate; wherein said heater element is disposed between said bottom surface of said first plate and said second plate for heating said substrate.

Claim 3

A substrate heating apparatus as set forth in claim 1, wherein said first plate is comprised of a material having high emissivity, high thermal conductivity, high thermal mass and non-electrical conductivity.

Claim 4

A substrate heating apparatus as set forth in claim 2, wherein said material is comprised of aluminum nitride.

Claim 5

A substrate heating apparatus as set forth in claim 1, wherein said first plate is about 0.500 inches thick, and said at least one groove is about 0.375 inches deep.

Claim 6

A substrate heating apparatus as set forth in claim 1, wherein said at least one groove is comprised of a plurality of grooves which form a plurality of thermal zones on said first plate.

Claim 7

A substrate heating apparatus as set forth in claim 5, wherein said plurality of grooves are comprised of a plurality of concentric rings.

Claim 8

A substrate heating apparatus as set forth in claim 5, wherein said plurality of grooves are comprised of a plurality of elongated grooves.

Claim 9

A substrate heating apparatus as set forth in claim 1, wherein said first plate further comprises a top surface, said top surface having grooves therealong to distribute gas during gas conduction heating.

Claim 10

A substrate heating apparatus as set forth in claim 1, wherein said heater element is comprised of a thin film ribbon heater element having a plurality of distinct and different heat generation zones, said plurality of distinct and different heat generation zones providing different levels of power density per unit area and, thus, different levels of heat generation.

Claim 11

A substrate heating apparatus as set forth in claim 1, wherein said second plate is comprised of a material that is a thermal and electrical insulator.

Claim 12

A substrate heating apparatus as set forth in claim 1, wherein said heater element is sandwiched directly between said bottom surface of said first plate and said second plate.

Claim 13

A substrate heating apparatus as set forth in claim 11, wherein said sandwiched configuration is retained by a retaining ring.

Claim 14

A substrate heater for heating a substrate, comprising: a heater plate having a rear surface with at least one groove, said at least one groove being configured to divide said heater plate into at least two separate thermal zones; and a heater element having a plurality of distinct and different heat generation zones, said plurality of distinct and different heat generation zones providing different levels of heat generation; wherein said heater plate is disposed in close proximity to said heater element such that said at least two separate thermal zones of said heater plate and said plurality of distinct and different heat generation zones of said heater element cooperate to provide zones in which different rates of heat transfer between said heater plate and said substrate, and wherein said substrate increases its temperature substantially uniformly across a surface of the substrate.

Claim 15

A substrate heater for heating a substrate, comprising: a heater plate having a rear surface with at least one groove, said at least one groove being configured to divide said heater plate into at least two separate thermal zones; and a heater element having a plurality of distinct and different heat generation zones, said plurality of distinct and different heat generation zones providing different levels of heat generation; wherein said heater plate is disposed in close proximity to said heater element such that said at least two separate thermal zones of said heater plate and said plurality of distinct and different heat generation zones of said heater element cooperate to provide zones in which different rates of heat transfer between said heater plate and said substrate, and wherein said substrate increases its temperature substantially uniformly across a surface of the substrate.

Claim 16

A substrate heater as set forth in claim 13, wherein said heater plate is comprised of a material having high emissivity, high thermal conductivity, high thermal mass and non-electrical conductivity.

Claim 17

A substrate heater as set forth in claim 13, wherein a depth of said at least one groove is about two-thirds of a thickness of said heater plate.

Claim 18

A substrate heater as set forth in claim 13, wherein said heater plate further comprises a front surface opposite said rear surface with said at least one groove configured to form said at least two separate thermal zones, said opposite front surface having grooves therealong to distribute gas during gas conduction heating.

Claim 23

A method for heating a substrate as set forth in claim 18, wherein the predetermined point in the heating of the substrate is a point in which a predetermined temperature is measured in the chamber.

Claim 24

A method for heating a substrate as set forth in claim 18, wherein the predetermined point in the heating of the substrate is a point in which a predetermined time period, measured from the start of the heating, elapses.