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US6037003A
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Chemical vapor deposition of aluminum oxide
Assignee: Harvard University
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Filing: 1997-10-15
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Granted: 2000-03-14
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Expires: 2017-10-15
Abstract
Abstract An aluminum oxide film is deposited on a heated substrate by CVD from one or more alkylaluminum alkoxide compounds having composition R n Al 2 (OR') 6-n , wherein R and R' are alkyl groups and n is in the range of 1 to 5.
Inventors
- 👤 Roy Gordon
- 👤 Keith Kramer
- 👤 Xinye Liu
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 01:51
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/22; C23C16/30; C23C16/40; C23C16/403
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
70 words
A process for forming a material comprising aluminum oxide, comprising: providing a vapor generated from a non-pyrophoric liquid, said liquid comprised of one or more alkylaluminum alkoxide compounds having a composition R n Al 2 (OR') 6-n , where R and R' are alkyl groups and n is in the range of 1 to 5; and contacting the vapor with a heated surface to deposit an aluminum oxide containing material.
Claim 2
Dependent Claim
70 words
A process for forming a material comprising aluminum oxide, comprising: providing a vapor generated from a non-pyrophoric liquid, said liquid comprised of one or more alkylaluminum alkoxide compounds having a composition R n Al 2 (OR') 6-n , where R and R' are alkyl groups and n is in the range of 1 to 5; and contacting the vapor with a heated surface to deposit an aluminum oxide containing material.
Claim 3
Dependent Claim
58 words
A process for forming a material comprising aluminum oxide, comprising: providing a vapor comprised of one or more alkylaluminum alkoxide compounds having a composition R n Al 2 (OR') 6-n , where R and R' are alkyl groups and n is less than four; and contacting the vapor with a heated surface to deposit an aluminum oxide-containing material.
Claim 4
Dependent Claim
58 words
A process for forming a material comprising aluminum oxide, comprising: providing a vapor comprised of one or more alkylaluminum alkoxide compounds having a composition R n Al 2 (OR') 6-n , where R and R' are alkyl groups and n is less than four; and contacting the vapor with a heated surface to deposit an aluminum oxide-containing material.
Claim 5
Dependent Claim
11 words
The process of claim 1, wherein n is less than four.
Claim 6
Dependent Claim
12 words
The process of claim 1 or 2, wherein n is about three.
Claim 7
Dependent Claim
19 words
The process of claim 1 or 2, in which the vapor further includes a reactive oxygen-containing gas or vapor.
Claim 8
Dependent Claim
14 words
The process of claim 5, in which the reactive oxygen-containing gas is oxygen gas.
Claim 9
Dependent Claim
24 words
The process of claim 1 or 2, wherein the vapor comprises a predominant amount of an alkylaluminum alkoxide, wherein n is three or less.
Claim 10
Dependent Claim
17 words
The process of claim 1 or 2, wherein the vapor comprises a predominant amount of triethyldialuminum tri-sec-butoxide.
Claim 11
Dependent Claim
17 words
The process of claim 1 or 2, wherein the vapor comprises a predominant amount of triethyldialuminum tri-isopropoxide.
Claim 12
Dependent Claim
21 words
The process of claim 1 or 2, in which the substrate temperature is in the range from 500 to 700° C.
Claim 13
Dependent Claim
19 words
The process of claim 6, in which the substrate temperature is in the range from 300 to 500° C.
Claim 14
Dependent Claim
14 words
The process of claim 1, wherein the liquid is vaporized by thin film evaporation.
Claim 15
Dependent Claim
16 words
The process of claim 1, wherein the liquid is vaporized by nebulization into a carrier gas.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-14 | 2003-09-13 | 2004-03-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-14 | 2007-09-13 | 2008-03-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-14 | 2011-09-13 | 2012-03-14 | $7700.00 | Window Closed / Lapsed |