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US6034390A
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Multi-bit trench capacitor
Assignee: Qimonda AG
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Filing: 1999-06-25
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Granted: 2000-03-07
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Expires: 2019-06-25
Abstract
Abstract A multi-bit trench capacitor having first and second storage nodes provided in the lower region thereof is described. The storage nodes are separated by a dielectric layer that separates the sensing voltage into upper and lower ranges corresponding to data stored in the first and second storage nodes.
Inventors
- 👤 Helmut Tews
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:59
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/34
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
52 words
A multi-bit trench capacitor comprising: a trench in a substrate, the trench having upper and lower portions; a node dielectric layer on sidewalls of the lower portion of the trench; a dielectric layer separating the lower portion into a first storage portion and a second storage portion above the first storage portion.
Claim 2
Dependent Claim
52 words
A multi-bit trench capacitor comprising: a trench in a substrate, the trench having upper and lower portions; a node dielectric layer on sidewalls of the lower portion of the trench; a dielectric layer separating the lower portion into a first storage portion and a second storage portion above the first storage portion.
Claim 3
Dependent Claim
22 words
The multi-bit trench capacitor of claim 1 further comprises a transistor coupled to the multi-bit trench capacitor to form a memory cell.
Claim 4
Dependent Claim
21 words
The multi-bit trench capacitor of claim 1 further comprises an isolation collar on sidewalls of the upper portion of the trench.
Claim 5
Dependent Claim
19 words
The multi-bit trench capacitor of claim 3 further comprises an outer plate surrounding the lower portion of the trench.
Claim 6
Dependent Claim
18 words
The multi-bit trench capacitor of claim 4 wherein the outer plate comprises a diffusion region doped with dopants.
Claim 7
Dependent Claim
21 words
The multi-bit trench capacitor of claim 2 further comprises an isolation collar on sidewalls of the upper portion of the trench.
Claim 8
Dependent Claim
19 words
The multi-bit trench capacitor of claim 6 further comprises an outer plate surrounding the lower portion of the trench.
Claim 9
Dependent Claim
24 words
The multi-bit trench capacitor of claim 1 wherein the dielectric layer is conductive at a voltage greater or equal to about a specified voltage.
Claim 10
Dependent Claim
51 words
The multi-bit trench capacitor of claim 8 wherein the specified voltage separates a sensing voltage into upper and lower sensing voltage ranges, the upper sensing voltage range is a sensing range for the first storage portion and the lower sensing voltage range is the sensing range for the second storage portion.
Claim 11
Dependent Claim
33 words
The multi-bit trench capacitor of claim 9 wherein the upper and lower sensing voltage ranges are further subdivided in logic 1 and 0 voltage levels to represent data stored in the storage portions.
Claim 12
Dependent Claim
17 words
The multi-bit trench capacitor of claim 10 wherein the specified voltage is about 1/2 the sensing voltage.
Claim 13
Dependent Claim
17 words
The multi-bit trench capacitor of claim 8 wherein the specified voltage is about 1/2 the sensing voltage.
Claim 14
Dependent Claim
17 words
The multi-bit trench capacitor of claim 9 wherein the specified voltage is about 1/2 the sensing voltage.
Claim 15
Dependent Claim
17 words
The multi-bit trench capacitor of claim 10 wherein the specified voltage is about 1/2 the sensing voltage.
References Cited (Backward Citations)
US5909619A
Cited
US5920785A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-07 | 2003-09-06 | 2004-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-07 | 2007-09-06 | 2008-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-07 | 2011-09-06 | 2012-03-07 | $7700.00 | Window Closed / Lapsed |