US6033919A
Expired / Lapsed
US
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Method of forming sidewall capacitance structure
Assignee: Entegris Inc
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Filing: 1997-10-22
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Granted: 2000-03-07
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Expires: 2017-10-22
Abstract
Abstract A capacitive structure on an integrated circuit and a method of making the same are disclosed, which is particularly useful in random-access memory devices. Generally, the method of the present invention comprises the steps of forming a substantially vertical temporary support 54 (preferably by forming a cylindrical aperture in an insulating layer) on a semiconductor substrate 10 and forming a substantially vertical dielectric film 32 (preferably a high dielectric constant perovskite-phase dielectric film, and more preferably barium strontium titanate) on temporary support 54. The method further comprises depositing a first conductive (e.g. platinum) electrode 60 on substantially vertical dielectric film 32, and subsequently replacing temporary support 54 with a second conductive (e.g. platinum) electrode 64, such that a thin film capacitor 44 which is substantially vertical with respect to substrate 10 is formed. The entire capacitor is essentially self-aligned, such that some embodiments require only one lithography step to complete the capacitor. Also, an advantage of this method is that a high temperature, high oxygen activity dielectric deposition may be completed prior to formation of either electrode, thus greatly simplifying both electrode structure and processing.
Inventors
- 👤 Bruce Gnade
- 👤 Scott Summerfelt
- 👤 Peter Kirlin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-06 17:20
CPC Classifications
H; H10; H10D; H10D84/00; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10D1/00; H10D1/60; H10D1/68; H10D1/682; H10D1/692; H10D1/694; H10D1/711; H10D1/716
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
183 words
A method of forming a microelectronic device on a semiconductor substrate, said method comprising the steps of: forming a first layer overlying said substrate and comprising an insulating bottom sublayer and a sacrificial top sublayer; anisotropicaily etching a pattern in said top sublayer, thereby creating an aperture having a substantially vertical sidewall extending through said top sublayer; depositing a substantially conformal perovskite-phase dielectric film over said first layer, said film having an inner surface in contact with said sidewall and an outer surface; extending said aperture through said bottom sublayer; depositing a first conductive electrode within said aperture, thereby forming a conductive plug electrically contacting said substrate and said outer surface of said dielectric layer; removing said sacrificial top sublayer in contact with said dielectric film thereby exposing said inner surface of said dielectric layer; and depositing a second conductive electrode electrically contacting said inner surface of said dielectric layer; whereby said plug, said dielectric film, and said second conductive electrode complete a capacitive structure having two electrodes and an intervening dielectric wherein said dielectric is formed prior to formation of either electrode.
Claim 2
Independent Claim
183 words
A method of forming a microelectronic device on a semiconductor substrate, said method comprising the steps of: forming a first layer overlying said substrate and comprising an insulating bottom sublayer and a sacrificial top sublayer; anisotropicaily etching a pattern in said top sublayer, thereby creating an aperture having a substantially vertical sidewall extending through said top sublayer; depositing a substantially conformal perovskite-phase dielectric film over said first layer, said film having an inner surface in contact with said sidewall and an outer surface; extending said aperture through said bottom sublayer; depositing a first conductive electrode within said aperture, thereby forming a conductive plug electrically contacting said substrate and said outer surface of said dielectric layer; removing said sacrificial top sublayer in contact with said dielectric film thereby exposing said inner surface of said dielectric layer; and depositing a second conductive electrode electrically contacting said inner surface of said dielectric layer; whereby said plug, said dielectric film, and said second conductive electrode complete a capacitive structure having two electrodes and an intervening dielectric wherein said dielectric is formed prior to formation of either electrode.
Claim 3
Independent Claim
95 words
A method of forming a microelectronic device on a semiconductor substrate, said method comprising the steps of: providing a sidewall; forming a substantially vertical temporary support on said sidewall; forming a substantially vertical dielectric film on said temporary support; then forming a first conductive electrode on said dielectric film; and then replacing said temporary support with a second conductive electrode disposed on said dielectfic film to create a thin film capacitor, wherein said capacitor has a substantially vertical dielectric film which has been formed prior to formation of either said first or said second electrode.
Claim 4
Independent Claim
95 words
A method of forming a microelectronic device on a semiconductor substrate, said method comprising the steps of: providing a sidewall; forming a substantially vertical temporary support on said sidewall; forming a substantially vertical dielectric film on said temporary support; then forming a first conductive electrode on said dielectric film; and then replacing said temporary support with a second conductive electrode disposed on said dielectfic film to create a thin film capacitor, wherein said capacitor has a substantially vertical dielectric film which has been formed prior to formation of either said first or said second electrode.
Claim 5
Independent Claim
166 words
A method of forming a microelectronic device on a semiconductor substrate, said method comprising the steps of: providing a substrate; forming an insulating layer overlying said substrate; anisotropically etching a pattern in said insulating layer to create at least one substantially vertical sidewall extending at least partially through said insulating layer; forming a dielectric film on said sidewall, said film having an inner surface in contact with said sidewall and a substantially vertical outer surface; then forming a first conductive electrode directly upon said outer surface of said dielectric film; removing at least a portion of said insulating layer contacting said inner surface of said dielectric film to at least partially expose said inner surface; and then forming a second conductive electrode electrically contacting said inner surface to form with said first and second conductive electrodes and said dielectric film a capacitive structure having two electrodes and an intervening dielectric, said dielectric film being formed prior to formation of either said first or said second electrode.
Claim 6
Independent Claim
166 words
A method of forming a microelectronic device on a semiconductor substrate, said method comprising the steps of: providing a substrate; forming an insulating layer overlying said substrate; anisotropically etching a pattern in said insulating layer to create at least one substantially vertical sidewall extending at least partially through said insulating layer; forming a dielectric film on said sidewall, said film having an inner surface in contact with said sidewall and a substantially vertical outer surface; then forming a first conductive electrode directly upon said outer surface of said dielectric film; removing at least a portion of said insulating layer contacting said inner surface of said dielectric film to at least partially expose said inner surface; and then forming a second conductive electrode electrically contacting said inner surface to form with said first and second conductive electrodes and said dielectric film a capacitive structure having two electrodes and an intervening dielectric, said dielectric film being formed prior to formation of either said first or said second electrode.
Claim 7
Dependent Claim
32 words
The method of claim 3, wherein said insulating layer comprises at least a bottom sublayer and a top sublayer, and wherein said bottom sublayer is substantially unaffected by said anisotropically etching step.
Claim 8
Dependent Claim
30 words
The method of claim 3, wherein said bottom sublayer comprises silica and said top sublayer comprises a material selected from the group consisting of silicon nitride and doped silicon dioxide.
Claim 9
Dependent Claim
27 words
The method of claim 3, wherein said forming a first conductive electrode step also completes an electrical connection between said first conductive electrode and said semiconductor substrate.
Claim 10
Dependent Claim
27 words
The method of claim 3, wherein said forming a second conductive electrode step also completes an electrical connection between said second conductive electrode and said semiconductor substrate.
Claim 11
Dependent Claim
23 words
The method of claim 3, wherein said anisotropically etching a pattern step forms an aperture defined by at least one of said sidewalls.
Claim 12
Dependent Claim
10 words
The method of claim 8, wherein said aperture is cylindrical.
Claim 13
Dependent Claim
32 words
The method of claim 8, further comprising, after said forming a dielectric film step, extending said aperture through said insulating layer to said semiconductor substrate using said aperture as an etch mask.
Claim 14
Dependent Claim
29 words
The method of claim 10, further comprising, after said extending said aperture step, ion implanting a dopant in said semiconductor substrate using said aperture as a self-aligned implant mask.
Claim 15
Dependent Claim
36 words
The method of claim 10, wherein said forming a first conductive electrode step comprises depositing a noble metal layer upon said outer surface of said dielectric film and filling said aperture with a conductive contact material.
Claim 16
Dependent Claim
23 words
The method of claim 3, wherein said anisotropically etching a pattern step forms a post defined by at least one of said sidewalls.
Claim 17
Dependent Claim
10 words
The method of claim 3, wherein said post is cylindrical.
Claim 18
Dependent Claim
38 words
The method of claim 3, wherein said forming a dielectric film step comprises the steps of substantially conformally depositing a dielectric film and anisotropically etching said dielectric film, whereby the dielectric film is removed except on said sidewalls.
Claim 19
Dependent Claim
14 words
The method of claim 3, wherein said dielectric film comprises a perovskite-phase dielectric material.
Claim 20
Dependent Claim
14 words
The method of claim 16, wherein said perovskite-phase dielectric material is barium strontium titanate.
References Cited (Backward Citations)
US5276343A
Cited
US5498889A
Cited
US5561308A
Cited
US5828094A
Cited
US5581436A
Cited
US5633781A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-03-07 | 2003-09-06 | 2004-03-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-03-07 | 2007-09-06 | 2008-03-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-03-07 | 2011-09-06 | 2012-03-07 | $7700.00 | Window Closed / Lapsed |