US6028360A
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US
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Semiconductor integrated circuit device in which a conductive film is formed over a trap film which in turn is formed over a titanium film
Assignee: Longitude Semiconductor SARL
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Filing: 1998-06-29
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Granted: 2000-02-22
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Expires: 2018-06-29
Abstract
Abstract The semiconductor device is formed according to the following steps. A TiN film 71 and a W film 72 are deposited on a silicon oxide film 64 including the inside of a via-hole 66 by the CVD method and thereafter, the W film 72 and TiN film 71 on the silicon oxide film 64 are etched back to leave only the inside of the via-hole 66 and form a plug 73. Then, a TiN film 74, Al-alloy film 75, and Ti film 76 are deposited on the silicon oxide film 64 including the surface of the plug 73 by the sputtering method and thereafter, the Ti film 76, Al-alloy film 75, and TiN film 74 are patterned to form second-layer wirings 77 and 78.
Inventors
- 👤 Yoshitaka Nakamura
- 👤 Tsuyoshi Tamaru
- 👤 Naoki Fukuda
- 👤 Hidekazu Goto
- 👤 Isamu Asano
- 👤 Hideo Aoki
- 👤 Keizo Kawakita
- 👤 Satoru Yamada
- 👤 Katsuhiko Tanaka
- 👤 Hiroshi Sakuma
- 👤 Masayoshi Hirasawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 08:16
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/30; H10B12/31; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10D; H10D84/00; H10D84/01; H10D84/0123; H10D84/0126; H10D84/0144; H10D84/80; H10D84/82; H10D84/83; H10D84/834; H10W; H10W20/00; H10W20/40; H10W20/41; H10W20/42
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
73 words
A semiconductor integrated circuit device comprising: a substrate where a MISFET is formed, a storing capacitive part comprising a first electrode, a capacitor insulating film and a second electrode including a titanium nitride film containing a halogen element; a trap film formed over said titanium nitride film and containing an element having a bonding energy with the halogen element in excess of 111 kcal/mol; and a conductive film formed over said trap film.
Claim 2
Dependent Claim
73 words
A semiconductor integrated circuit device comprising: a substrate where a MISFET is formed, a storing capacitive part comprising a first electrode, a capacitor insulating film and a second electrode including a titanium nitride film containing a halogen element; a trap film formed over said titanium nitride film and containing an element having a bonding energy with the halogen element in excess of 111 kcal/mol; and a conductive film formed over said trap film.
Claim 3
Dependent Claim
21 words
A semiconductor integrated circuit device according to claim 1, wherein said trap film is formed to cover said titanium nitride film.
References Cited (Backward Citations)
US5420072A
Cited
US5654581A
Cited
JPH08204144A
Cited
JPH0945770A
Cited
JPH09219501A
Cited
US5801097A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-21 | 2003-08-23 | 2004-02-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-21 | 2007-08-23 | 2008-02-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-21 | 2011-08-23 | 2012-02-22 | $7700.00 | Window Closed / Lapsed |