US6026209A
Expired / Lapsed
US
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Hybrid optical waveguide and manufacturing method thereof
Assignee: Samsung Electronics Co Ltd
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Filing: 1998-08-26
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Granted: 2000-02-15
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Expires: 2018-08-26
Abstract
Abstract A hybrid optical waveguide having linear and curved sections through which optical signals pass, includes: a planar substrate layer; a lower cladding layer formed of a material having optical transparency in a predetermined range of optical communication wavelengths, on the planar substrate layer; a core layer formed on the lower cladding layer where the optical waveguide is formed, the waveguide constituted of the linear section formed of a first optical polymer having a higher refractive index than the lower cladding layer and the curved section formed of a second optical polymer having a higher refractive index than the first optical polymer; and an upper cladding layer formed of a material having a lower refractive index than the first and the second optical polymers, surrounding the waveguide core layer. The optical waveguide having the linear and curved sections has reduced traveling losses and optical fiber coupling losses, and minimizes the size of the waveguide cross-section.
Inventors
- 👤 Tae-Hyung Rhee
- 👤 Hyung-jae Lee
- 👤 Byong-gwon You
- 👤 Eun-ji Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:34
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/12004; G02B6/122; G02B6/125; G02B2006/12083; G02B2006/12119
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
146 words
A hybrid optical waveguide having a linear section and a curved section through which an optical signal of a predetermined wavelength pass, comprising: a planar substrate layer; a lower cladding layer formed on the planar substrate layer of a material having optical transparency in a predetermined range of optical communication wavelengths; a core layer formed on the lower cladding layer where the optical waveguide is formed, the waveguide constituted of the linear section formed of a first optical polymer having a higher refractive index than the lower cladding layer and the curved section formed of a second optical polymer having a higher refractive index than the first optical polymer; and an upper cladding layer formed on the lower cladding layer so as to surround the waveguide core layer, the upper cladding layer formed of a material having a lower refractive index than the first optical polymer.
Claim 2
Dependent Claim
146 words
A hybrid optical waveguide having a linear section and a curved section through which an optical signal of a predetermined wavelength pass, comprising: a planar substrate layer; a lower cladding layer formed on the planar substrate layer of a material having optical transparency in a predetermined range of optical communication wavelengths; a core layer formed on the lower cladding layer where the optical waveguide is formed, the waveguide constituted of the linear section formed of a first optical polymer having a higher refractive index than the lower cladding layer and the curved section formed of a second optical polymer having a higher refractive index than the first optical polymer; and an upper cladding layer formed on the lower cladding layer so as to surround the waveguide core layer, the upper cladding layer formed of a material having a lower refractive index than the first optical polymer.
Claim 3
Dependent Claim
29 words
The hybrid optical waveguide as claimed in claim 1, the planar substrate layer comprising a wafer of one of either silicon or glass having a high degree of flatness.
Claim 4
Independent Claim
253 words
A method of manufacturing a hybrid optical waveguide constituted of a linear section and a curved section through which an optical signal of a predetermined wavelength passes, comprising the steps of: forming a lower cladding layer of a material having optical transparency in a predetermined range of optical communication wavelengths, on the planar substrate; forming a core layer of a first optical polymer on the lower cladding layer, the core layer having a higher refractive index than the material forming the lower cladding layer; forming a core masking pattern on the core layer excluding a portion on which the curved section of the optical waveguide is to be formed; etching a portion of the first optical polymer on which the core masking pattern is not formed; depositing a second optical polymer having a higher refractive index than the first optical polymer; etching the deposited residual second optical polymer to leave the second optical polymer in only the core layer on which the first optical polymer has been etched; removing the core masking pattern; forming a waveguide masking pattern on the core layer, the linear section waveguide positioned on the first optical polymer core layer and the curved section waveguide being positioned on the second optical polymer core layer; etching the first optical polymer without the masking pattern and the second optical polymer; and forming an upper cladding on the core layer so as to surround the hybrid optical waveguide, the upper cladding layer having a lower refractive index than the first optical polymer.
Claim 5
Independent Claim
253 words
A method of manufacturing a hybrid optical waveguide constituted of a linear section and a curved section through which an optical signal of a predetermined wavelength passes, comprising the steps of: forming a lower cladding layer of a material having optical transparency in a predetermined range of optical communication wavelengths, on the planar substrate; forming a core layer of a first optical polymer on the lower cladding layer, the core layer having a higher refractive index than the material forming the lower cladding layer; forming a core masking pattern on the core layer excluding a portion on which the curved section of the optical waveguide is to be formed; etching a portion of the first optical polymer on which the core masking pattern is not formed; depositing a second optical polymer having a higher refractive index than the first optical polymer; etching the deposited residual second optical polymer to leave the second optical polymer in only the core layer on which the first optical polymer has been etched; removing the core masking pattern; forming a waveguide masking pattern on the core layer, the linear section waveguide positioned on the first optical polymer core layer and the curved section waveguide being positioned on the second optical polymer core layer; etching the first optical polymer without the masking pattern and the second optical polymer; and forming an upper cladding on the core layer so as to surround the hybrid optical waveguide, the upper cladding layer having a lower refractive index than the first optical polymer.
Claim 6
Dependent Claim
51 words
The method of manufacturing a hybrid optical waveguide as claimed in claim 3, the step of forming the first optical polymer as the core layer comprising the substeps of: spin coating the first optical polymer on the lower cladding layer; baking; and smoothing the surface of the first baked optical polymer.
Claim 7
Dependent Claim
34 words
The method of manufacturing a hybrid optical waveguide as claimed in claim 3, the core masking pattern and the waveguide masking pattern being formed by either a dry/wet etching or a lifting off method.
Claim 8
Dependent Claim
22 words
The method of manufacturing a hybrid optical waveguide as claimed in claim 3, the second optical polymer being deposited by spin coating.
Claim 9
Dependent Claim
32 words
The method of manufacturing a hybrid optical waveguide as claimed in claim 3, the waveguide masking pattern having different widths depending on the refractive indices of the first and second optical polymers.
Claim 10
Dependent Claim
48 words
The method of manufacturing a hybrid optical waveguide as claimed in claim 2, the etching according to the waveguide pattern being effected by controlling the etch depth in accordance with the cross-section size of the second optical polymer depending on the refractive index of the second optical polymer.
References Cited (Backward Citations)
GB2219871A
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JPH03188402A
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JPH0667042A
Cited
JPH08184720A
Cited
US5949945A
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US5949944A
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JPH11138253A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-02-14 | 2003-08-16 | 2004-02-15 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-02-14 | 2007-08-16 | 2008-02-15 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-02-14 | 2011-08-16 | 2012-02-15 | $7700.00 | Window Closed / Lapsed |