US5949944A
Expired / Lapsed
US
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Apparatus and method for dissipating charge from lithium niobate devices
Assignee: Avago Technologies International Sales Pte Ltd
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Filing: 1997-10-02
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Granted: 1999-09-07
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Expires: 2017-10-02
Abstract
Abstract Embodiments of the invention include an apparatus and method for stabilizing the operation of lithium niobate devices such as modulators due to charge accumulation caused by, e.g., pyroelectric and piezoelectride effects. The apparatus comprises a substrate having a waveguide formed therein, a buffer layer formed on the substrate, a Si 2 Ti x N 8/3+x charge dissipation layer (CDL) formed on the buffer layer and a set of electrodes formed on the charge dissipation layer. According to embodiments of the invention, the Si 2 Ti x N 8/3+x charge dissipation layer has a resistivity of approximately 15-150 kΩcm. Alternatively, the apparatus includes a second charge dissipation layer formed on the opposing surface of the substrate. The charge dissipation layer according to embodiments of the invention is advantageous in that it provides a suitable resistivity and is a composition that is easily reproducible using conventional formation techniques such as sputtering.
Inventors
- 👤 William James Minford
- 👤 Ofer Sneh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 19:15
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/03; G02F1/035; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/13; G02B6/132; G02F2203/00; G02F2203/21
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
89 words
An optical device, comprising: a substrate having a waveguide formed therein; a first charge dissipation layer (CDL) formed on at least a portion of a first side of said substrate; and a plurality of electrodes formed on at least a portion of at least one of said charge dissipation layers, wherein at least a portion of at least one of said charge dissipation layers is made of Si 2 Ti x N 8/3+x and wherein said charge dissipation layers dissipate charge accumulated on the dielectric surfaces of said device.
Claim 2
Dependent Claim
89 words
An optical device, comprising: a substrate having a waveguide formed therein; a first charge dissipation layer (CDL) formed on at least a portion of a first side of said substrate; and a plurality of electrodes formed on at least a portion of at least one of said charge dissipation layers, wherein at least a portion of at least one of said charge dissipation layers is made of Si 2 Ti x N 8/3+x and wherein said charge dissipation layers dissipate charge accumulated on the dielectric surfaces of said device.
Claim 3
Dependent Claim
21 words
The device as recited in claim 1, wherein resistivity of said charge dissipation layer is greater than approximately 10 4 Ωcm.
Claim 4
Dependent Claim
27 words
The device as recited in claim 1, wherein the resistivity of said charge dissipation layer is within the range from approximately 15,000 Ωcm to approximately 150,000 Ωcm.
Claim 5
Dependent Claim
29 words
The device as recited in claim 1, wherein the thickness of said charge dissipation layer is within the range from approximately 800 angstroms (Å) to approximately 2000 angstroms (Å).
Claim 6
Dependent Claim
18 words
The device as recited in claim 1, wherein at least a portion of said substrate is lithium niobate.
Claim 7
Dependent Claim
28 words
The device as recited in claim 1, further comprising a second charge dissipation layer (CDL) formed on at least a portion of an opposing, second side of substrate.
Claim 8
Dependent Claim
36 words
The device as recited in claim 1, further comprising a buffer layer formed between at least a portion of said first side of said substrate and at least a portion of said first charge dissipation layer.
Claim 9
Dependent Claim
22 words
The device as recited in claim 7, wherein at least a portion of said buffer layer is silicon dioxide (SiO 2 ).
Claim 10
Dependent Claim
28 words
The device as recited in claim 7, wherein the thickness of said buffer layer is within the range from approximately 3500 angstroms (Å) to approximately 1.5 microns (μm).
Claim 11
Dependent Claim
123 words
A lithium niobate device, comprising: a substrate having a waveguide formed therein, at least a portion of said substrate being made of lithium niobate; a buffer layer formed on at least a portion of a first side of said substrate; a charge dissipation layer (CDL) formed on at least a portion of said buffer layer; and a plurality of electrodes formed on at least a portion of said CDL, at least one of said electrodes formed on said CDL at a location over said waveguide, wherein said charge dissipation layer is made of Si 2 Ti x N 8/3+x and wherein said charge dissipation layer dissipates charge accumulated within said device by at least one of a pyroelectric effect and a piezoelectric effect.
Claim 12
Dependent Claim
123 words
A lithium niobate device, comprising: a substrate having a waveguide formed therein, at least a portion of said substrate being made of lithium niobate; a buffer layer formed on at least a portion of a first side of said substrate; a charge dissipation layer (CDL) formed on at least a portion of said buffer layer; and a plurality of electrodes formed on at least a portion of said CDL, at least one of said electrodes formed on said CDL at a location over said waveguide, wherein said charge dissipation layer is made of Si 2 Ti x N 8/3+x and wherein said charge dissipation layer dissipates charge accumulated within said device by at least one of a pyroelectric effect and a piezoelectric effect.
Claim 13
Dependent Claim
21 words
The device as recited in claim 10, wherein resistivity of said charge dissipation layer is greater than approximately 10 4 Ωcm.
Claim 14
Dependent Claim
27 words
The device as recited in claim 10, wherein the resistivity of said charge dissipation layer is within the range from approximately 15,000 Ωcm to approximately 150,000 Ωcm.
Claim 15
Dependent Claim
29 words
The device as recited in claim 10, wherein the thickness of said charge dissipation layer is within the range from approximately 800 angstroms (Å) to approximately 2000 angstroms (Å).
Claim 16
Dependent Claim
22 words
The device as recited in claim 10, wherein at least a portion of said buffer layer is silicon dioxide (SiO 2 ).
Claim 17
Dependent Claim
28 words
The device as recited in claim 10, wherein the thickness of said buffer layer is within the range from approximately 3500 angstroms (Å) to approximately 1.5 microns (μm).
Claim 18
Dependent Claim
29 words
The device as recited in claim 10, further comprising a second charge dissipation layer (CDL) formed on at least a portion of an opposing, second side of said substrate.
Claim 19
Independent Claim
91 words
A method for stabilizing operation of a lithium niobate device due to accumulated charge, said lithium niobate device including a substrate having a first surface and an opposing, second surface, a waveguide formed in said substrate, and a buffer layer formed on said first surface of said substrate, said method comprising the steps of: forming a charge dissipation layer on said buffer layer, wherein at least a portion of said charge dissipation layer is made of Si 2 Ti x N 8/3+x ; and forming electrodes on said charge dissipation layer.
Claim 20
Independent Claim
91 words
A method for stabilizing operation of a lithium niobate device due to accumulated charge, said lithium niobate device including a substrate having a first surface and an opposing, second surface, a waveguide formed in said substrate, and a buffer layer formed on said first surface of said substrate, said method comprising the steps of: forming a charge dissipation layer on said buffer layer, wherein at least a portion of said charge dissipation layer is made of Si 2 Ti x N 8/3+x ; and forming electrodes on said charge dissipation layer.
Claim 21
Dependent Claim
16 words
The method as recited in claim 17, wherein said charge dissipation layer is formed by sputtering.
Claim 22
Dependent Claim
25 words
The method as recited in claim 17, further comprising the step of forming a second charge dissipation layer on the bottom surface of said substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-06 | 2003-03-08 | 2003-09-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-06 | 2007-03-08 | 2007-09-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-06 | 2011-03-08 | 2011-09-07 | $7700.00 | Window Closed / Lapsed |