US5388170A
Expired / Lapsed
US
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Electrooptic device structure and method for reducing thermal effects in optical waveguide modulators
Assignee: AT&T Inc
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Filing: 1993-11-22
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Granted: 1995-02-07
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Expires: 2013-11-22
Abstract
Abstract An interferometric modulator comprising a substrate of titanium-doped lithium niobate (Ti:LiNbO 3 ) having top and bottom surfaces and a waveguide formed in the top surface is disclosed. A conductive layer is formed on the bottom surface of the substrate and electrically coupled to a top-surface ground plane or simply to ground potential. The bottom surface conductive layer functions to thermally stabilize the modulator during operation.
Inventors
- 👤 Fred L. Heismann
- 👤 Steven K. Korotky
- 👤 John J. Veselka
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 21:32
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/03; G02F1/035; G02F1/21; G02F1/212; G02F1/225; G02F2202/00; G02F2202/20; G02F2203/00; G02F2203/21
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
68 words
An optical device comprising: a substrate having top and bottom surfaces; a conductive layer formed on said top surface; a waveguide formed in said top surface; a plurality of modulator electrodes formed over at least a portion of said waveguide on said top surface; and a conductive layer means formed on said bottom surface of said substrate for stabilizing operation of said optical device due to temperature changes.
Claim 2
Dependent Claim
68 words
An optical device comprising: a substrate having top and bottom surfaces; a conductive layer formed on said top surface; a waveguide formed in said top surface; a plurality of modulator electrodes formed over at least a portion of said waveguide on said top surface; and a conductive layer means formed on said bottom surface of said substrate for stabilizing operation of said optical device due to temperature changes.
Claim 3
Dependent Claim
26 words
The device according to claim 1, wherein said conductive layer means on said bottom surface is electrically coupled to said conductive layer on said top surface.
Claim 4
Dependent Claim
28 words
The device according to claim 1, wherein said conductive layer means on said bottom surface and said conductive layer on said bottom surface are connected to electrical ground.
Claim 5
Dependent Claim
14 words
The device according to claim 1, wherein the device is a Mach-Zehnder interferometric modulator.
Claim 6
Dependent Claim
13 words
The device according to claim 1, wherein said substrate comprises LiNbO 3 .
Claim 7
Dependent Claim
14 words
The device according to claim 5, wherein said substrate is z-cut LiNbO 3 .
Claim 8
Dependent Claim
12 words
The device according to claim 5, wherein said waveguide comprises Ti-doped regions.
Claim 9
Dependent Claim
23 words
The device according to claim 1, wherein an insulating layer is formed between said substrate and said conductive layer on said top surface.
Claim 10
Dependent Claim
14 words
The device according to claim 8, wherein said insulating layer is SiO 2 .
Claim 11
Dependent Claim
26 words
The device according to claim 1, wherein said conductive layer on said top surface and said conductive layer means on said bottom surface comprise a metal.
Claim 12
Dependent Claim
19 words
The device according to claim 1, wherein said conductive layer means on said bottom surface comprise a semiconductive material.
Claim 13
Dependent Claim
21 words
The device according to claim 1, wherein said conductive layer means on said bottom surface is connected to a voltage source.
Claim 14
Dependent Claim
29 words
The device according to claim 1, further comprising further conductive layers means on side surfaces of said substrate for stabilizing operation of said optical device due to temperature changes.
Claim 15
Dependent Claim
26 words
The device according to claim 13, wherein said conductive layers means on side surfaces are electrically coupled to said conductive layer means on said bottom surface.
Claim 16
Independent Claim
94 words
A method for stabilizing operation of an interferometer due to temperature dependence, the interferometer comprising a substrate having top and bottom surfaces, a conductive layer formed on said top surface, a waveguide formed in the top surface, and a plurality of modulator electrodes formed over at least a portion of the waveguide, comprising the steps of: forming a conductive layer on the bottom surface of the substrate; electrically coupling said conductive layer on the bottom surface to said conductive layer on said top surface; and electrically grounding said conductive layer on said bottom surface.
Claim 17
Independent Claim
94 words
A method for stabilizing operation of an interferometer due to temperature dependence, the interferometer comprising a substrate having top and bottom surfaces, a conductive layer formed on said top surface, a waveguide formed in the top surface, and a plurality of modulator electrodes formed over at least a portion of the waveguide, comprising the steps of: forming a conductive layer on the bottom surface of the substrate; electrically coupling said conductive layer on the bottom surface to said conductive layer on said top surface; and electrically grounding said conductive layer on said bottom surface.
References Cited (Backward Citations)
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