US6021150A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Laser having baffled enclosure
Assignee: Cymer Inc
•
Filing: 1998-03-12
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Granted: 2000-02-01
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Expires: 2018-03-12
Abstract
Abstract Disclosed is a laser useful in, e.g., photolithography or medical surgery. In one embodiment, the laser comprises a discharge chamber and heat-generating electronics that are enclosed in a baffled enclosure that requires less cooling air to reliably cool the components in the enclosure than previous unbaffled enclosures. A method of reducing the amount of conditioned air is also provided. In a further embodiment, the laser has a heat-exchange system that acts quickly in response to changes in laser gas temperature by adjusting a flow-proportioning valve regulating water flow through a heat exchanger, thereby providing a continuously variable rate of heat exchange through the heat exchanger to maintain the lasing gas temperature constant. Methods of providing a laser beam and of improving the uniformity of a laser beam are disclosed, as are photolithography methods utilizing a laser and method of this invention.
Inventors
- 👤 William N. Partio
- 👤 Donald G. Larson
- 👤 Igor V. Fomenkov
- 👤 Anthony J. de Ruyter
- 👤 Palash P. Das
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 08:45
CPC Classifications
H; H01; H01S; H01S3/00; H01S3/02; H01S3/03; H01S3/036; H01S3/04; H01S3/041; F; F28; F28D; F28D21/00; F28D2021/0019; F28D2021/0077; H01S3/14; H01S3/22; H01S3/223; H01S3/225
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
166 words
A laser system located in an air filtered and conditioned room and having laser equipment comprising an enclosure, a discharge chamber containing a lasing gas, a heat exchange system to add heat to or remove heat from the discharge chamber, an AC power system, and a high-voltage power supply, said laser system comprising a baffled enclosure housing at lease a portion of the laser equipment, and wherein the location and number of baffles in the enclosure are sufficient to reduce the amount of air required to cool the enclosed laser equipment compared to the amount of air required by a referent laser system, wherein the reference laser system has the same enclosed laser equipment and enclosure but the enclosure is not baffled; said laser system further comprising a discharge duct for discharging outside said air filtered and conditioned room said air required to cool the enclosed laser equipment, said system permitting a substantial reduction in filtered conditioned air discharged from said air filtered and conditioned room.
Claim 2
Dependent Claim
166 words
A laser system located in an air filtered and conditioned room and having laser equipment comprising an enclosure, a discharge chamber containing a lasing gas, a heat exchange system to add heat to or remove heat from the discharge chamber, an AC power system, and a high-voltage power supply, said laser system comprising a baffled enclosure housing at lease a portion of the laser equipment, and wherein the location and number of baffles in the enclosure are sufficient to reduce the amount of air required to cool the enclosed laser equipment compared to the amount of air required by a referent laser system, wherein the reference laser system has the same enclosed laser equipment and enclosure but the enclosure is not baffled; said laser system further comprising a discharge duct for discharging outside said air filtered and conditioned room said air required to cool the enclosed laser equipment, said system permitting a substantial reduction in filtered conditioned air discharged from said air filtered and conditioned room.
Claim 3
Dependent Claim
37 words
The laser system of claim 1 wherein the location and number of baffles in the enclosure are sufficient to cause at least a portion of the air to travel serially through substantially all of the enclosed volume.
Claim 4
Dependent Claim
15 words
The laser system of claim 1 wherein the laser system is an excimer laser system.
Claim 5
Dependent Claim
41 words
The laser system of claim 1 wherein a baffle in the enclosure comprises a divider having at least one opening in the divider that allows air to pass from one side of the divider to the other side of the divider.
Claim 6
Dependent Claim
30 words
The laser system of claim 1 wherein the enclosed volume is divided into at least three portions, and the air entering one portion exits the portion at its opposite end.
Claim 7
Dependent Claim
17 words
The laser system of claim 1 wherein the enclosure has no more than one air inlet duct.
Claim 8
Dependent Claim
17 words
The laser system of claim 1 wherein the enclosure has no more than one air exhaust duct.
Claim 9
Independent Claim
134 words
A method for reducing the amount of conditioned air used to cool components of a laser in an enclosure located in an air filtered and conditioned room and having an enclosed volume comprising providing a cool air inlet duct and a warm air exhaust duct in the enclosure for exhausting air outside the room; providing a sufficient driving force to move air into the cool air inlet duct, through the enclosure, and out the warm air exhaust duct; and placing a number of baffles in locations within the enclosure sufficient to reduce the amount of air required to cool the enclosed volume when compared to the amount of air required to cool the enclosed volume of an identical laser having an unbaffled enclosure; wherein filtered and conditioned air exhausted from the room is reduced.
Claim 10
Independent Claim
134 words
A method for reducing the amount of conditioned air used to cool components of a laser in an enclosure located in an air filtered and conditioned room and having an enclosed volume comprising providing a cool air inlet duct and a warm air exhaust duct in the enclosure for exhausting air outside the room; providing a sufficient driving force to move air into the cool air inlet duct, through the enclosure, and out the warm air exhaust duct; and placing a number of baffles in locations within the enclosure sufficient to reduce the amount of air required to cool the enclosed volume when compared to the amount of air required to cool the enclosed volume of an identical laser having an unbaffled enclosure; wherein filtered and conditioned air exhausted from the room is reduced.
Claim 11
Dependent Claim
43 words
The method of claim 8 wherein the number and location of baffles in the enclosure is sufficient to cause at least a portion of the air moving through the enclosure to travel serially through substantially all of the enclosed volume of the enclosure.
Claim 12
Dependent Claim
20 words
The method of claim 8 wherein the pressure of the enclosed volume is less than the pressure outside the enclosure.
Claim 13
Dependent Claim
22 words
The method of claim 8 wherein substantially all of the air moving within the enclosure is supplied through one air inlet duct.
Claim 14
Dependent Claim
21 words
The method of claim 8 wherein substantially all of the air moving within the enclosure exhausts through one air exhaust duct.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2003-01-31 | 2003-08-02 | 2004-02-01 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2007-01-31 | 2007-08-02 | 2008-02-01 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2011-01-31 | 2011-08-02 | 2012-02-01 | $7700.00 | Window Closed / Lapsed |