Magnetic filter for ion source

Claim 2

A magnetic filter (90) for an ion source (26) comprising a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, the housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, the plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, the first axis being substantially orthogonal to a second axis (68) which lies within the planar wall; said magnetic filter comprising: a plurality of elongated magnets (90a-90n) disposed within the plasma confinement chamber (76) for separating the plasma confinement chamber into a primary region (86) and a secondary region (88), said plurality of elongated magnets being oriented neither parallel to nor orthogonal to said second axis (68) but instead oriented at an acute angle θ as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to the generally planar wall (50).

Claim 3

The magnetic filter (90) of claim 1, wherein each of said plurality of elongated aperture openings (64) comprises a plurality of linearly arranged smaller circular openings.

Claim 4

The magnetic filter (90) of claim 1, wherein said elongated magnets (90a-90n) are positioned within elongated tubes (94) which are filled with a cooling fluid (96).

Claim 5

The magnetic filter (90) of claim 3, wherein said cooling fluid (96) is water.

Claim 6

The magnetic filter (90) of claim 1, wherein said acute angle θ is approximately 25°.

Claim 7

An ion source (26), comprising: a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, said housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, said plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, said first axis being substantially orthogonal to a second axis (68) which lies within said planar wall; and a magnetic filter (90) disposed within said plasma confinement chamber for separating said plasma confinement chamber (76) into a primary region (86) and a secondary region (88), said magnetic filter comprising a plurality of elongated magnets (90a-90n) oriented neither parallel to nor orthogonal to said second axis (68) but instead oriented at an acute angle θ as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to said generally planar wall (50).

Claim 8

An ion source (26), comprising: a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, said housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, said plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, said first axis being substantially orthogonal to a second axis (68) which lies within said planar wall; and a magnetic filter (90) disposed within said plasma confinement chamber for separating said plasma confinement chamber (76) into a primary region (86) and a secondary region (88), said magnetic filter comprising a plurality of elongated magnets (90a-90n) oriented neither parallel to nor orthogonal to said second axis (68) but instead oriented at an acute angle θ as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to said generally planar wall (50).

Claim 9

The ion source (26) of claim 6, wherein the ion source outputs a ribbon ion beam.

Claim 10

The ion source (26) of claim 7, wherein a width of the ion beam output by the ion source is made adjustable by selecting the number and width of apertures (64).

Claim 11

The ion source (26) of claim 8, wherein each of said elongated apertures (64) has an aspect ratio of at least 50:1.

Claim 12

The ion source (26) of claim 6, wherein said elongated magnets (90a-90n) are positioned within elongated tubes (94) which are filled with a cooling fluid (96).

Claim 13

The ion source (26) of claim 6, wherein said plasma confinement chamber (76) is provided with a plurality of elongated bar magnets (72) positioned adjacent the exterior surfaces thereof, for urging plasma contained therein toward the center thereof.

Claim 14

The ion source (26) of claim 6, wherein said acute angle θ is approximately 25°.

Claim 15

The ion source (26) of claim 6, wherein said plasma confinement chamber (76) has an interior surface which is lined with graphite.

Claim 16

The ion source (26) of claim 6, wherein the source material ionized within the ion source housing is phosphine (PH 3 ) gas diluted with hydrogen (H), wherein the plasma comprises PH n + ions, P + ions, and H n + ions, and wherein the magnetic filter (90) generally confines a higher proportion of PH n + ions and P + ions in the secondary region (88) of the plasma confinement chamber than in the primary region (86).

Claim 17

A magnetic filter (90) for an ion source (26) comprising a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, the housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, the plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, the first axis being substantially orthogonal to a second axis (68) which lies within the planar wall; said magnetic filter comprising: a plurality of elongated magnets (90a-90n) disposed within the plasma confinement chamber (76) for separating the plasma confinement chamber into a primary region (86) and a secondary region (88), each of said plurality of magnets being oriented at an angle θ as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to the generally planar wall (50); wherein said plurality of elongated apertures (64) equals N apertures, adjacent apertures of said plurality of elongated apertures are each separated by a distance D, and adjacent magnets of said plurality of elongated magnets (90a-90n) are each separated by distance L as measured parallel to said first axis (66), said angle θ being generally defined by the equation: L/D=N×(tan θ).

Claim 18

A magnetic filter (90) for an ion source (26) comprising a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, the housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, the plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, the first axis being substantially orthogonal to a second axis (68) which lies within the planar wall; said magnetic filter comprising: a plurality of elongated magnets (90a-90n) disposed within the plasma confinement chamber (76) for separating the plasma confinement chamber into a primary region (86) and a secondary region (88), each of said plurality of magnets being oriented at an angle θ as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to the generally planar wall (50); wherein said plurality of elongated apertures (64) equals N apertures, adjacent apertures of said plurality of elongated apertures are each separated by a distance D, and adjacent magnets of said plurality of elongated magnets (90a-90n) are each separated by distance L as measured parallel to said first axis (66), said angle θ being generally defined by the equation: L/D=N×(tan θ).

Claim 19

The magnetic filter (90) of claim 15, wherein L/D is approximately 1.4, N=3, and θ=25°.

Claim 20

An ion source (26), comprising: a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, said housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, said plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, said first axis being substantially orthogonal to a second axis (68) which lies within said planar wall; and a magnetic filter (90) disposed within said plasma confinement chamber for separating said plasma confinement chamber (76) into a primary region (86) and a secondary region (88), said magnetic filter comprising a plurality of elongated magnets (90a-90n) each oriented at an angle θ as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to said generally planar wall (50); wherein said plurality of elongated apertures (64) equals N apertures, adjacent apertures of said plurality of elongated apertures are each separated by a distance D, and adjacent magnets of said plurality of elongated magnets (90a-90n) are each separated by distance L as measured parallel to said first axis (66), said angle θ being generally defined by the equation: L/D=N×(tan θ).

Claim 21

An ion source (26), comprising: a housing defining a plasma confinement chamber (76) in which a plasma including ions is generated by ionizing a source material, said housing including a generally planar wall (50) in which are formed a plurality of elongated apertures (64) through which an ion beam (84) may be extracted from the plasma, said plurality of elongated openings oriented substantially parallel to each other and to a first axis (66) which lies within said planar wall, said first axis being substantially orthogonal to a second axis (68) which lies within said planar wall; and a magnetic filter (90) disposed within said plasma confinement chamber for separating said plasma confinement chamber (76) into a primary region (86) and a secondary region (88), said magnetic filter comprising a plurality of elongated magnets (90a-90n) each oriented at an angle θ as measured from said second axis (68) and lying parallel to each other and within a plane which is generally parallel to said generally planar wall (50); wherein said plurality of elongated apertures (64) equals N apertures, adjacent apertures of said plurality of elongated apertures are each separated by a distance D, and adjacent magnets of said plurality of elongated magnets (90a-90n) are each separated by distance L as measured parallel to said first axis (66), said angle θ being generally defined by the equation: L/D=N×(tan θ).

Claim 22

The ion source (26) of claim 17, wherein L/D is approximately 1.4, N=3, and θ=25°.