Post chemical mechanical polishing, clean procedure, used for fabrication of a crown shaped capacitor structure

Claim 1

A method of fabricating a stacked capacitor structure, for a dynamic random access memory, (DRAM), device, on a semiconductor substrate, comprising the steps of: providing a transfer gate transistor, comprised of a gate structure, on an underlying gate insulator layer, with insulator spacers located on the sides of said gate structure, and with a source/drain region, located in an area of said semiconductor substrate, not covered by said gate structure, or by said insulator spacers; forming a storage node plug structure, in a storage node contact hole in a first insulator layer, with said storage node plug contacting a source region, of said transfer gate transistor, at the bottom of said storage node contact hole; forming an opening in a second insulator layer, exposing the top surface of said storage node plug structure; depositing a composite layer, comprised of an underlying first polysilicon layer, and an overlying hemispherical grain, (HSG), layer, on the sides of, and at the bottom of, said opening, in said second insulator layer, and on the top surface of said second insulator layer; forming a photoresist plug, in said opening, in said second insulator layer, with said photoresist plug completely covering a first portion of said composite layer, located in said opening, in said second insulator layer, while a second portion of said composite layer, remains exposed on the top surface of said second insulator layer; removing said second portion of said composite layer, from top surface of said second insulator layer, resulting in the formation of a crown shaped storage node structure, located in said opening, in said second insulator layer, comprised of said composite layer; performing a first wet clean procedure; removing said photoresist plug; performing a second wet clean procedure, resulting in a recess of said second insulator layer; forming a capacitor dielectric layer on the top surface of said crown shaped storage node structure; and forming a polysilicon top plate structure, on said capacitor dielectric layer, creating said stacked capacitor structure, comprised of overlying said polysilicon top plate, said capacitor dielectric layer, and underlying, said crown shaped storage node structure.

Claim 2

A method of fabricating a stacked capacitor structure, for a dynamic random access memory, (DRAM), device, on a semiconductor substrate, comprising the steps of: providing a transfer gate transistor, comprised of a gate structure, on an underlying gate insulator layer, with insulator spacers located on the sides of said gate structure, and with a source/drain region, located in an area of said semiconductor substrate, not covered by said gate structure, or by said insulator spacers; forming a storage node plug structure, in a storage node contact hole in a first insulator layer, with said storage node plug contacting a source region, of said transfer gate transistor, at the bottom of said storage node contact hole; forming an opening in a second insulator layer, exposing the top surface of said storage node plug structure; depositing a composite layer, comprised of an underlying first polysilicon layer, and an overlying hemispherical grain, (HSG), layer, on the sides of, and at the bottom of, said opening, in said second insulator layer, and on the top surface of said second insulator layer; forming a photoresist plug, in said opening, in said second insulator layer, with said photoresist plug completely covering a first portion of said composite layer, located in said opening, in said second insulator layer, while a second portion of said composite layer, remains exposed on the top surface of said second insulator layer; removing said second portion of said composite layer, from top surface of said second insulator layer, resulting in the formation of a crown shaped storage node structure, located in said opening, in said second insulator layer, comprised of said composite layer; performing a first wet clean procedure; removing said photoresist plug; performing a second wet clean procedure, resulting in a recess of said second insulator layer; forming a capacitor dielectric layer on the top surface of said crown shaped storage node structure; and forming a polysilicon top plate structure, on said capacitor dielectric layer, creating said stacked capacitor structure, comprised of overlying said polysilicon top plate, said capacitor dielectric layer, and underlying, said crown shaped storage node structure.

Claim 10

A method of forming a crown shaped, stacked capacitor structure, for a DRAM device, on a semiconductor substrate, featuring a series of wet clean procedures, performed to a crown shaped, storage node structure, prior to the formation of an overlying capacitor dielectric layer, comprising the steps of: providing a transfer gate transistor comprised of a gate structure, on an underlying gate insulator layer, with insulator spacers on the sides of said gate structure, and with a source/drain region, in an area of said semiconductor substrate, not covered by said gate structure; depositing a first insulator layer; planarizing said first insulator layer; forming a storage node contact hole, in said first insulator layer, exposing a portion of the top surface of a source region component, of said source/drain region; forming a polysilicon storage node structure, in said storage node contact hole; depositing a second insulator layer; forming a capacitor opening, in said second insulator layer, exposing the top surface of said polysilicon storage node structure; depositing a first polysilicon layer, on the top surface of said second insulator layer, and on all the exposed surfaces, the sides of, as well as the bottom of, said capacitor opening; forming an HSG silicon layer on underlying first polysilicon layer; forming a photoresist plug in said capacitor opening, completely covering the regions of said HSG silicon layer, located in said capacitor opening; performing a chemical mechanical polishing, (CMP), procedure, to remove regions of said HSG silicon layer, and regions of said first polysilicon layer, from the top surface of said second insulator layer, and creating an HSG silicon/polysilicon, crown shaped storage node structure, in said capacitor opening; performing a post--CMP, wet clean procedure, in a solution of ammonium hydroxide and hydrogen peroxide; removing said photoresist plug; performing a dilute hydrofluoric acid, (DHF), procedure, recessing said second insulator layer; performing a pre-capacitor dielectric formation, wet clean procedure, in a solution comprised of sulfuric acid and hydrogen peroxide; forming said capacitor dielectric layer on the top surface of said HSG silicon/polysilicon, crown shaped storage node structure; depositing a second polysilicon layer; and patterning of said second polysilicon layer to create a polysilicon upper plate structure, for said crown shaped capacitor structure, comprised of: overlying, said polysilicon upper plate structure; said capacitor dielectric layer; and underlying, said HSG silicon/polysilicon, crown shaped storage node structure.

Claim 11

A method of forming a crown shaped, stacked capacitor structure, for a DRAM device, on a semiconductor substrate, featuring a series of wet clean procedures, performed to a crown shaped, storage node structure, prior to the formation of an overlying capacitor dielectric layer, comprising the steps of: providing a transfer gate transistor comprised of a gate structure, on an underlying gate insulator layer, with insulator spacers on the sides of said gate structure, and with a source/drain region, in an area of said semiconductor substrate, not covered by said gate structure; depositing a first insulator layer; planarizing said first insulator layer; forming a storage node contact hole, in said first insulator layer, exposing a portion of the top surface of a source region component, of said source/drain region; forming a polysilicon storage node structure, in said storage node contact hole; depositing a second insulator layer; forming a capacitor opening, in said second insulator layer, exposing the top surface of said polysilicon storage node structure; depositing a first polysilicon layer, on the top surface of said second insulator layer, and on all the exposed surfaces, the sides of, as well as the bottom of, said capacitor opening; forming an HSG silicon layer on underlying first polysilicon layer; forming a photoresist plug in said capacitor opening, completely covering the regions of said HSG silicon layer, located in said capacitor opening; performing a chemical mechanical polishing, (CMP), procedure, to remove regions of said HSG silicon layer, and regions of said first polysilicon layer, from the top surface of said second insulator layer, and creating an HSG silicon/polysilicon, crown shaped storage node structure, in said capacitor opening; performing a post--CMP, wet clean procedure, in a solution of ammonium hydroxide and hydrogen peroxide; removing said photoresist plug; performing a dilute hydrofluoric acid, (DHF), procedure, recessing said second insulator layer; performing a pre-capacitor dielectric formation, wet clean procedure, in a solution comprised of sulfuric acid and hydrogen peroxide; forming said capacitor dielectric layer on the top surface of said HSG silicon/polysilicon, crown shaped storage node structure; depositing a second polysilicon layer; and patterning of said second polysilicon layer to create a polysilicon upper plate structure, for said crown shaped capacitor structure, comprised of: overlying, said polysilicon upper plate structure; said capacitor dielectric layer; and underlying, said HSG silicon/polysilicon, crown shaped storage node structure.