US6004883A
Expired / Lapsed
US
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Dual damascene patterned conductor layer formation method without etch stop layer
Assignee: Taiwan Semiconductor Manufacturing Co TSMC Ltd
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Filing: 1998-10-23
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Granted: 1999-12-21
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Expires: 2018-10-23
Abstract
Abstract A method for forming a via through a dielectric layer within a microelectronics fabrication. There is first provided a substrate employed within a microelectronics fabrication. There is then formed upon the substrate a patterned first dielectric layer which defines a via accessing a contact region formed within the substrate. The patterned first dielectric layer is formed of a first dielectric material which is not susceptible to etching with an oxygen containing plasma. There is then formed upon the patterned first dielectric layer a blanket second dielectric layer which completely covers the patterned first dielectric layer and fills the via. The blanket second dielectric layer is formed of a second dielectric material which is susceptible to etching within the oxygen containing plasma. There is then formed upon the blanket second dielectric layer a blanket hard mask layer which is formed from a hard mask material which is not susceptible to etching within the oxygen containing plasma. There is then formed upon the blanket hard mask layer a patterned photoresist layer which leaves exposed a portion of the blanket hard mask layer greater that an areal dimension of the via and at least partially overlapping the areal dimension of the via. There is then etched while employing a first plasma etch method the blanket hard mask layer to form a patterned hard mask layer defining a first trench formed through the patterned hard mask layer while employing the patterned photoresist layer as a first etch mask layer. The first plasma etch method employs a first etchant gas composition appropriate to the hard mask material from which is formed the blanket hard mask layer. Finally, there is then etched while employing a second plasma etch method the blanket second dielectric layer to form a patterned second dielectric layer having an aperture formed therethrough. The aperture comprises: (1) a second trench corresponding with the first trench; and (2) at least a portion of the first via. The second plasma etch method employs the oxygen containing plasma.
Inventors
- 👤 Chen-Hua Douglas Yu
- 👤 Syun Ming Jang
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 22:35
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/071; H10W20/081; H10W20/084; H10W20/085; H10W20/0886
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
328 words
A method for forming a via through a dielectric layer within a microelectronics fabrication comprising: providing a substrate employed within a microelectronics fabrication, the substrate having a contact region formed therein; forming upon the substrate a patterned first dielectric layer, the patterned first dielectric layer defining a via accessing the contact region, the patterned first dielectric layer being formed of a first dielectric material which is not susceptible to etching with an oxygen containing plasma; forming upon the patterned first dielectric layer a blanket second dielectric layer, the blanket second dielectric layer completely covering the patterned first dielectric layer and filling the via, the blanket second dielectric layer being formed of a second dielectric material which is susceptible to etching within the oxygen containing plasma; forming upon the blanket second dielectric layer a blanket hard mask layer, the blanket hard mask layer being formed from a hard mask material which is not susceptible to etching within the oxygen containing plasma; forming upon the blanket hard mask layer a patterned photoresist layer, the patterned photoresist layer leaving exposed a portion of the blanket hard mask layer greater that an areal dimension of the via and at least partially overlapping the areal dimension of the via; etching while employing a first plasma etch method the blanket hard mask layer to form a patterned hard mask layer defining a first trench formed through the patterned hard mask layer while employing the patterned photoresist layer as a first etch mask layer, the first plasma etch method employing a first etchant gas composition to the hard mask material from which is formed the blanket hard mask layer; and etching while employing a second plasma etch method the blanket second dielectric layer to form a patterned second dielectric layer having an aperture formed therethrough, the aperture comprising: a second trench corresponding with the first trench; and at least a portion of the first via, the second plasma etch method employing the oxygen containing plasma.
Claim 2
Independent Claim
328 words
A method for forming a via through a dielectric layer within a microelectronics fabrication comprising: providing a substrate employed within a microelectronics fabrication, the substrate having a contact region formed therein; forming upon the substrate a patterned first dielectric layer, the patterned first dielectric layer defining a via accessing the contact region, the patterned first dielectric layer being formed of a first dielectric material which is not susceptible to etching with an oxygen containing plasma; forming upon the patterned first dielectric layer a blanket second dielectric layer, the blanket second dielectric layer completely covering the patterned first dielectric layer and filling the via, the blanket second dielectric layer being formed of a second dielectric material which is susceptible to etching within the oxygen containing plasma; forming upon the blanket second dielectric layer a blanket hard mask layer, the blanket hard mask layer being formed from a hard mask material which is not susceptible to etching within the oxygen containing plasma; forming upon the blanket hard mask layer a patterned photoresist layer, the patterned photoresist layer leaving exposed a portion of the blanket hard mask layer greater that an areal dimension of the via and at least partially overlapping the areal dimension of the via; etching while employing a first plasma etch method the blanket hard mask layer to form a patterned hard mask layer defining a first trench formed through the patterned hard mask layer while employing the patterned photoresist layer as a first etch mask layer, the first plasma etch method employing a first etchant gas composition to the hard mask material from which is formed the blanket hard mask layer; and etching while employing a second plasma etch method the blanket second dielectric layer to form a patterned second dielectric layer having an aperture formed therethrough, the aperture comprising: a second trench corresponding with the first trench; and at least a portion of the first via, the second plasma etch method employing the oxygen containing plasma.
Claim 3
Dependent Claim
35 words
The method of claim 1 wherein the microelectronics fabrication is selected from the group consisting of semiconductor integrated circuit microelectronics fabrications, solar cell microelectronics fabrications, ceramic substrate microelectronics fabrications and flat panel display microelectronics fabrications.
Claim 4
Dependent Claim
36 words
The method of claim 1 wherein the patterned first dielectric layer is formed from a dielectric material selected from the group consisting of silicon oxide dielectric materials, silicon nitride dielectric materials and silicon oxynitride dielectric materials.
Claim 5
Dependent Claim
33 words
The method of claim 1 wherein the blanket second dielectric layer is formed from a dielectric material selected from the group consisting of organic polymer spin-on-polymer dielectric materials and amorphous carbon dielectric materials.
Claim 6
Dependent Claim
27 words
The method of claim 1 wherein there is not employed a hard mask layer interposed between the patterned first dielectric layer and the blanket second dielectric layer.
Claim 7
Dependent Claim
34 words
The method of claim 1 wherein the patterned photoresist layer is stripped from the microelectronics fabrication simultaneously with etching the blanket second dielectric layer to form the aperture through the patterned second dielectric layer.
Claim 8
Independent Claim
334 words
A method for forming a patterned conductor layer within a microelectronics fabrication comprising: providing a substrate employed within a microelectronics fabrication, the substrate having a contact region formed therein; forming upon the substrate a patterned first dielectric layer, the patterned first dielectric layer defining a via accessing the contact region, the patterned first dielectric layer being formed of a first dielectric material which is not susceptible to etching with an oxygen containing plasma; forming upon the patterned first dielectric layer a blanket second dielectric layer, the blanket second dielectric layer completely covering the patterned first dielectric layer and filling the via, the blanket second dielectric layer being formed of a second dielectric material which is susceptible to etching within the oxygen containing plasma; forming upon the blanket second dielectric layer a blanket hard mask layer, the blanket hard mask layer being formed from a hard mask material which is not susceptible to etching within the oxygen containing plasma; forming upon the blanket hard mask layer a patterned photoresist layer, the patterned photoresist layer leaving exposed a portion of the blanket hard mask layer greater that an areal dimension of the via and at least partially overlapping the areal dimension of the via; etching while employing a first plasma etch method, the blanket hard mask layer to form a patterned hard mask layer defining a first trench formed through the patterned hard mask layer while employing the patterned photoresist layer as a first etch mask layer, the first plasma etch method employing a first etchant gas composition to the hard mask material from which is formed the blanket hard mask layer; etching,while employing a second plasma etch method the blanket second dielectric layer to form a patterned second dielectric layer having an aperture formed therethrough, the aperture comprising: a second trench corresponding with the first trench; and at least a portion of the first via, the second plasma etch method employing the oxygen containing plasma; and forming into the aperture a patterned conductive stud layer.
Claim 9
Independent Claim
334 words
A method for forming a patterned conductor layer within a microelectronics fabrication comprising: providing a substrate employed within a microelectronics fabrication, the substrate having a contact region formed therein; forming upon the substrate a patterned first dielectric layer, the patterned first dielectric layer defining a via accessing the contact region, the patterned first dielectric layer being formed of a first dielectric material which is not susceptible to etching with an oxygen containing plasma; forming upon the patterned first dielectric layer a blanket second dielectric layer, the blanket second dielectric layer completely covering the patterned first dielectric layer and filling the via, the blanket second dielectric layer being formed of a second dielectric material which is susceptible to etching within the oxygen containing plasma; forming upon the blanket second dielectric layer a blanket hard mask layer, the blanket hard mask layer being formed from a hard mask material which is not susceptible to etching within the oxygen containing plasma; forming upon the blanket hard mask layer a patterned photoresist layer, the patterned photoresist layer leaving exposed a portion of the blanket hard mask layer greater that an areal dimension of the via and at least partially overlapping the areal dimension of the via; etching while employing a first plasma etch method, the blanket hard mask layer to form a patterned hard mask layer defining a first trench formed through the patterned hard mask layer while employing the patterned photoresist layer as a first etch mask layer, the first plasma etch method employing a first etchant gas composition to the hard mask material from which is formed the blanket hard mask layer; etching,while employing a second plasma etch method the blanket second dielectric layer to form a patterned second dielectric layer having an aperture formed therethrough, the aperture comprising: a second trench corresponding with the first trench; and at least a portion of the first via, the second plasma etch method employing the oxygen containing plasma; and forming into the aperture a patterned conductive stud layer.
Claim 10
Dependent Claim
35 words
The method of claim 7 wherein the microelectronics fabrication is selected from the group consisting of semiconductor integrated circuit microelectronics fabrications, solar cell microelectronics fabrications, ceramic substrate microelectronics fabrications and flat panel display microelectronics fabrications.
Claim 11
Dependent Claim
36 words
The method of claim 7 wherein the patterned first dielectric layer is formed from a dielectric material selected from the group consisting of silicon oxide dielectric materials, silicon nitride dielectric materials and silicon oxynitride dielectric materials.
Claim 12
Dependent Claim
33 words
The method of claim 7 wherein the blanket second dielectric layer is formed from a dielectric material selected from the group consisting of organic polymer spin-on-polymer dielectric materials and amorphous carbon dielectric materials.
Claim 13
Dependent Claim
27 words
The method of claim 7 wherein there is not employed a hard mask layer interposed between the patterned first dielectric layer and the blanket second dielectric layer.
Claim 14
Dependent Claim
34 words
The method of claim 7 wherein the patterned photoresist layer is stripped from the microelectronics fabrication simultaneously with etching the blanket second dielectric layer to form the aperture through the patterned second dielectric layer.
Claim 15
Dependent Claim
17 words
The method of claim 7 wherein the patterned conductive stud layer is formed employing a damascene method.
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