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Patent US6002507A successfully refreshed from Google Patents.
US6002507A
Expired / Lapsed
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Method and apparatus for an integrated laser beam scanner
Assignee: Xerox Corp
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Filing: 1998-12-01
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Granted: 1999-12-14
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Expires: 2018-12-01
Abstract
Abstract A solid state laser beam scanning system having a single crystal silicon deflection and scanning mirror integrated with a laser diode. By combining the techniques of deep reactive ion etching of silicon with solder bump bonding techniques, completed and tested laser diodes are integrated with silicon substrates supporting micro-electro-mechanical systems layers.
Inventors
- 👤 Philip D. Floyd
- 👤 Decai Sun
- 👤 Joel A. Kubby
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 04:18
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/10; G02B26/0816; G02B26/0833; G02B26/0841; G02B26/085
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
100 words
An integrated laser beam scanning structure comprising: a wafer having a recess on a side; a layer having a first region and a second region, said layer being attached to said side of said wafer having said recess; a deflecting mirror fashioned from said first region of said layer; a torsional mirror fashioned from said second region of said layer, said torsional mirror having a first side; and a semiconductor light emitter mounted in said recess whereby a light beam emitted from said semiconductor light emitter is deflected by said deflecting mirror onto said first side of said torsional mirror.
Claim 2
Dependent Claim
100 words
An integrated laser beam scanning structure comprising: a wafer having a recess on a side; a layer having a first region and a second region, said layer being attached to said side of said wafer having said recess; a deflecting mirror fashioned from said first region of said layer; a torsional mirror fashioned from said second region of said layer, said torsional mirror having a first side; and a semiconductor light emitter mounted in said recess whereby a light beam emitted from said semiconductor light emitter is deflected by said deflecting mirror onto said first side of said torsional mirror.
Claim 3
Dependent Claim
14 words
The structure of claim 1 wherein said wafer is a silicon on oxide wafer.
Claim 4
Dependent Claim
14 words
The structure of claim 1 wherein said layer is a single crystal silicon layer.
Claim 5
Dependent Claim
18 words
The structure of claim 1 wherein said semiconductor light emitter is mounted in said recess using solder bumps.
Claim 6
Dependent Claim
14 words
The structure of claim 1 wherein said semiconductor light emitter is a VCSEL chip.
Claim 7
Dependent Claim
13 words
The structure of claim 1 wherein said recess is deep reactive ion etched.
Claim 8
Dependent Claim
16 words
The structure of claim 1 wherein said torsional mirror is actuated by a pair of electrodes.
Claim 9
Dependent Claim
20 words
The structure of claim 1 wherein a ferromagnetic thin film is attached to said first side of said torsional mirror.
Claim 10
Dependent Claim
16 words
The structure of claim 8 wherein said torsional mirror is actuated by a thin film coil.
Claim 11
Dependent Claim
20 words
The structure of claim 1 wherein a thin film coil is attached to said first side of said torsional mirror.
Claim 12
Independent Claim
105 words
A method for making an integrated laser beam scanner comprising the steps of: providing a wafer having a recess on a side; attaching a layer having a first region and a second region to said side of said wafer having said recess; fashioning a deflecting mirror from said first region of said layer; fashioning a torsional mirror from said second region of said layer, said torsional mirror having a first side; and mounting a semiconductor light emitter in said recess such that a light beam emitted from said semiconductor light emitter is deflected by said deflecting mirror onto said first side of said torsional mirror.
Claim 13
Independent Claim
105 words
A method for making an integrated laser beam scanner comprising the steps of: providing a wafer having a recess on a side; attaching a layer having a first region and a second region to said side of said wafer having said recess; fashioning a deflecting mirror from said first region of said layer; fashioning a torsional mirror from said second region of said layer, said torsional mirror having a first side; and mounting a semiconductor light emitter in said recess such that a light beam emitted from said semiconductor light emitter is deflected by said deflecting mirror onto said first side of said torsional mirror.
Claim 14
Dependent Claim
14 words
The method of claim 11 wherein said wafer is a silicon on oxide wafer.
Claim 15
Dependent Claim
14 words
The method of claim 11 wherein said layer is a single crystalline silicon layer.
Claim 16
Dependent Claim
18 words
The method of claim 11 wherein said semiconductor light emitter is mounted in said recess using solder bumps.
Claim 17
Dependent Claim
14 words
The method of claim 11 wherein said semiconductor light emftter is a VCSEL chip.
Claim 18
Dependent Claim
13 words
The method of claim 11 wherein said recess is deep reactive ion etched.
Claim 19
Dependent Claim
16 words
The method of claim 11 wherein said torsional mirror is actuated by a pair of electrodes.
Claim 20
Dependent Claim
21 words
The method of claim 11 wherein said torsional mirror is actuated by a thin film coil and an external magnetic field.
Claim 21
Dependent Claim
20 words
The method of claim 11 wherein a ferromagnetic thin film is attached to said first side of said torsional mirror.
Claim 22
Dependent Claim
20 words
The method of claim 11 wherein a thin film coil is attached to said first side of said torsional mirror.
References Cited (Backward Citations)
US5629790A
Cited
US5742419A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-12-13 | 2003-06-14 | 2003-12-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-12-13 | 2007-06-14 | 2007-12-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-12-13 | 2011-06-14 | 2011-12-14 | $7700.00 | Window Closed / Lapsed |