US5989965A
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Nitride overhang structures for the silicidation of transistor electrodes with shallow junction
Assignee: Sharp Corp
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Filing: 1998-02-13
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Granted: 1999-11-23
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Expires: 2018-02-13
Abstract
Abstract A method of forming a temporary overhang structure to shield the source/drain edges near the gate electrode from the deposition of silicidation metal is provided. The growth of silicide on the source/drain regions remains controlled, without the presence of silicidation metal on the gate electrode sidewalls near the source/drain edges. The resulting silicide layer does not have edge growths interfering with the source/drain junction areas. The overhang structure is formed by covering the gate electrode with two insulators having differing etch selectivities. The top insulator is anisotropically etched so that only the top insulator covering the gate electrode vertical sidewalls remains. The exposed bottom insulator is isotropically etched to form a gap between the top insulator and the source/drain region surfaces. When silicidation metal is deposited, the gap prevents the deposition of metal between the gate electrode and the source/drain region surfaces. A transistor, with an overhang structure, fabricated by the above-mentioned procedure is also provided.
Inventors
- 👤 Jer-shen Maa
- 👤 Sheng Teng Hsu
- 👤 Chien-Hsiung Peng
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:57
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/0223; H10D30/0227; H10D30/0212; H10D64/00; H10D64/01; H10D64/011; H10D64/0111; H10D64/0112; H10D64/013; H10D64/01302; H10D64/01304; H10D64/01306; H10D64/01308; H10D64/0131; H10D64/021
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
198 words
In a MOS transistor, a method for forming shallow source/drain junctions with low leakage currents, comprising the steps of: a) forming source/drain regions, having a horizontal top surface and edges around the perimeter of the top surface bounded by field oxide regions in a silicon well, and forming a gate electrode with vertical sidewalls adjacent the top surface; b) selectively forming nitride structures on the field region adjoining the source/drain top surfaces and the vertical sidewalls of the gate electrode, creating a gap between nitride structures and the edges of the top surfaces, whereby the perimeter of the top surfaces is located in the gap; c) depositing metal overlying the top surfaces, gate electrode, and field oxide in a thin enough layer so as to form gaps between the nitride structures and the source/drain top surfaces, isolating the metal overlying the top surfaces from the metal overlying the field oxide and the gate electrode; and d) annealing the metal at a first temperature and first time duration, forming a layer of low resistance silicide compound having a predetermined nominal silicide layer thickness and a predetermined silicide thickness tolerance, whereby silicide is evenly formed on the source/drain top surfaces.
Claim 2
Dependent Claim
198 words
In a MOS transistor, a method for forming shallow source/drain junctions with low leakage currents, comprising the steps of: a) forming source/drain regions, having a horizontal top surface and edges around the perimeter of the top surface bounded by field oxide regions in a silicon well, and forming a gate electrode with vertical sidewalls adjacent the top surface; b) selectively forming nitride structures on the field region adjoining the source/drain top surfaces and the vertical sidewalls of the gate electrode, creating a gap between nitride structures and the edges of the top surfaces, whereby the perimeter of the top surfaces is located in the gap; c) depositing metal overlying the top surfaces, gate electrode, and field oxide in a thin enough layer so as to form gaps between the nitride structures and the source/drain top surfaces, isolating the metal overlying the top surfaces from the metal overlying the field oxide and the gate electrode; and d) annealing the metal at a first temperature and first time duration, forming a layer of low resistance silicide compound having a predetermined nominal silicide layer thickness and a predetermined silicide thickness tolerance, whereby silicide is evenly formed on the source/drain top surfaces.
Claim 3
Dependent Claim
77 words
A method as in claim 1 in which Step b) includes forming a nitride overhang structures having a first predetermined horizontal gap width and a first predetermined vertical gap depth between the nitride overlying the vertical sidewalls and field oxide, and the source/drain top surfaces; and in which Step c) includes forming a second gap having a second predetermined gap width between the metal overlying the vertical sidewalls and field oxide, and the source drain top surfaces.
Claim 4
Dependent Claim
188 words
A method as in claim 2 comprising the following steps, after Step a), and before Step b), of: a 1 ) depositing a thin layer of oxide having a predetermined oxide layer thickness overlying the gate electrode, source/drain regions, and field oxide regions; a 2 ) depositing a nitride layer having a predetermined nitride layer thickness overlying the oxide layer deposited in Step a 1 ); a 3 ) forming a photoresist mask selectively overlying the field oxide regions, exposing the nitride layer overlying the source/drain top surfaces and gate electrode, whereby the field oxide is protected; a 4 ) anisotropically etching, in the vertical direction, the nitride layer, removing the nitride layer overlying the source/drain top surface and exposing the oxide layer deposited in Step a 1 ), but not etching the nitride overlying the vertical sidewalls of the gate electrode; a 5 ) etching to remove the photoresist overlying the field oxide region; and in which Step b) includes isotropically etching with an etchant having a higher oxide to nitride etch selectivity, removing the oxide layer overlying the source/drain regions, to form the nitride overhang structures.
Claim 5
Dependent Claim
70 words
A method as in claim 3 including the further step, following Step a), and preceding Step a 1 ), of: a 6 ) implanting the source/drain regions with dopant and annealing, forming source/drain junction areas with metallurgical edges at a predetermined junction depth, respectively, from the source/drain top surfaces, whereby the prevention of silicide formation at the source/drain edges maximizes the spacing between the silicide layer and the metallurgical edges.
Claim 6
Dependent Claim
25 words
A method as in claim 4 in which Step a 6 ) includes the junction depth being in the range between 300 and 2000 Å.
Claim 7
Dependent Claim
62 words
A method as in claim 3 including the further step, following Step d), of: e) implanting the source/drain regions with dopant and annealing, forming source/drain junction areas with metallurgical edges at a predetermined junction depth, respectively, from the source/drain top surfaces, whereby the prevention of silicide formation at the source/drain edges maximizes the spacing between the silicide layer and the metallurgical edges.
Claim 8
Dependent Claim
23 words
A method as in claim 6 in which Step e) includes forming the junction depth in the range between 300 and 2000 Å.
Claim 9
Dependent Claim
29 words
A method as in claim 1 in which Step c) includes a metal selected from the group consisting of Co, Ni, Ti, Mo, Ta, W, Cr, Pt, and Pd.
Claim 10
Dependent Claim
48 words
A method as in claim 8 in which Step c) includes using Co as the silicidation metal, and Step d) includes the first temperature being in the range between 550 and 800 degrees C., and the first time duration being in the range between 20 and 60 seconds.
Claim 11
Dependent Claim
43 words
A method as in claim 8 in which Step c) includes using Ni as the silicidation metal, and Step d) includes the first temperature being approximately 450 degrees C., and the first time duration being in the range between 20 and 30 seconds.
Claim 12
Dependent Claim
38 words
A method as in claim 2 in which Step b) includes the first gap depth being in the range between 100 and 350 Å, and the first gap width being in the range between 150 and 500 Å.
Claim 13
Dependent Claim
26 words
A method as in claim 1 in which Step c) includes the metal layer having a predetermined thickness in the range between 50 and 300 Å.
Claim 14
Dependent Claim
41 words
A method as in claim 1 in which Step d) includes the silicide layer nominal thickness being in the range between 100 and 500 Å, and the silicide thickness tolerance to be less than 50% of the nominal silicide layer thickness.
Claim 15
Dependent Claim
26 words
A method as in claim 3 in which Step a 1 ) includes the oxide layer thickness being in the range between 100 and 350 Å.
Claim 16
Dependent Claim
26 words
A method as in claim 3 in which Step a 2 ) includes the nitride layer thickness being in the range between 300 and 1000 Å.
Claim 17
Dependent Claim
24 words
A method as in claim 2 in which Step c) includes the second gap width being in the range between 20 and 100 Å.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-11-22 | 2003-05-24 | 2003-11-23 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-11-22 | 2007-05-24 | 2007-11-23 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-11-22 | 2011-05-24 | 2011-11-23 | $7700.00 | Window Closed / Lapsed |