Ampule with integral filter

Claim 2

A liquid chemical storage device for containing a quantity of a liquid chemical substance which is used as a reactant in a chemical process in a semiconductor manufacturing system having first and second coupling parts for mating with a liquid chemical storage device, said device comprising: a portable, closed container adapted to hold the quantity of substance and having a wall provided with an inlet opening and an outlet opening; an inlet valve carried by said container and fluidically coupled to said inlet opening, said inlet valve being closeable to block said inlet opening; an inlet coupling part carried by said container and fluidically coupled to said inlet valve and adapted to selectively mate with and separate from said system first coupling part; an outlet valve carried by said container and fluidically coupled to said outlet opening, said outlet valve being closeable to block said outlet opening; an outlet coupling part carried by said container and fluidically coupled to said outlet valve and adapted to selectively mate with and separate from said system second coupling part; and a filter interposed between the quantity of liquid and said outlet valve.

Claim 3

The device according to claim 1 wherein said filter is interposed between said outlet opening and said outlet valve.

Claim 4

The device according to claim 2 wherein said filter blocks flow of solid particles through said outlet valve.

Claim 5

The device according to claim 2 wherein said filter is permanently secured to said container.

Claim 6

The device according to claim 2 wherein said container, said valves and said filter constitute a replaceable unit.

Claim 7

The device according to claim 1 wherein said filter blocks flow of solid particles through said outlet valve.

Claim 8

The device according to claim 1 wherein said filter is permanently secured to said container.

Claim 9

The device according to claim 1 wherein said container, said valves and said filter constitute a replaceable unit.

Claim 10

Apparatus for performing a chemical process in a semiconductor manufacturing system having first and second coupling parts for mating with a liquid chemical storage device for containing a quantity of a liquid chemical substance which is used as a reactant in said chemical process, said apparatus comprising: a portable, closed container adapted to hold the quantity of substance having a wall provided with an inlet opening and an outlet opening; said container having an inlet valve carried by said container and fluidically coupled to said inlet opening, said inlet valve being closeable to block said inlet opening; an inlet coupling part carried by said container and fluidically coupled to said inlet valve and adapted to selectively mate with and separate from said system first coupling part; an outlet valve carried by said container and fluidically coupled to said outlet opening, said outlet valve being closeable to block said outlet opening; an outlet coupling part carried by said container and fluidically coupled to said outlet valve and adapted to selectively mate with and separate from said system second coupling part; and a filter interposed between the quantity of liquid and said outlet valve; and a processing chamber fluidically coupled to said system second coupler part; wherein said outlet coupling part is mated to said system second coupling part to provide a flow path between said outlet valve and said processing chamber.

Claim 11

Apparatus for performing a chemical process in a semiconductor manufacturing system having first and second coupling parts for mating with a liquid chemical storage device for containing a quantity of a liquid chemical substance which is used as a reactant in said chemical process, said apparatus comprising: a portable, closed container adapted to hold the quantity of substance having a wall provided with an inlet opening and an outlet opening; said container having an inlet valve carried by said container and fluidically coupled to said inlet opening, said inlet valve being closeable to block said inlet opening; an inlet coupling part carried by said container and fluidically coupled to said inlet valve and adapted to selectively mate with and separate from said system first coupling part; an outlet valve carried by said container and fluidically coupled to said outlet opening, said outlet valve being closeable to block said outlet opening; an outlet coupling part carried by said container and fluidically coupled to said outlet valve and adapted to selectively mate with and separate from said system second coupling part; and a filter interposed between the quantity of liquid and said outlet valve; and a processing chamber fluidically coupled to said system second coupler part; wherein said outlet coupling part is mated to said system second coupling part to provide a flow path between said outlet valve and said processing chamber.

Claim 12

The apparatus according to claim 9 wherein said filter is interposed between said outlet opening and said outlet valve.

Claim 13

The apparatus according to claim 9 wherein said filter blocks flow of solid particles through said outlet valve.

Claim 14

The apparatus according to claim 9 wherein said filter is permanently secured to said container.

Claim 15

The apparatus according to claim 9 wherein said container, said valves and said filter constitute a replaceable unit.

Claim 16

The apparatus according to claim 9 further comprising: source of a fill gas fluidically coupled to sad system first coupling part; wherein said inlet couplin part is mated to said system first coupler part to provide a flow path between said inlet valve and said source of fill gas.

Claim 17

In a method for performing a chemical process in a semiconductor manufacturing system having first and second coupling parts for mating with a liquid chemical storage device for containing a quantity of a liquid chemical substance which is used as a reactant in said chemical process, which method includes delivering the liquid chemical substance from said storage device to a processing chamber, the improvement comprising, after at least a portion of the liquid chemical substance has been delivered from said device; closing an inlet valve carried by a portable, closed container adapted to hold the quantity of substance, said inlet valve being fluidically coupled to an inlet opening in a wall of said container, wherein closing said inlet valve blocks said inlet opening of said container; closing an outlet valve carried by said container and fluidically coupled to an outlet opening in a wall of said container, wherein closing said outlet blocks said outlet opening of said container; disconnecting said container from said system by separating an inlet coupling part carried by said container from said system first coupling part, said container inlet coupling part being fluidically coupled to said inlet valve and adapted to selectively mate with and separate from said system first coupling part; and by separating an outlet coupling part carried by said container from said system second coupling part, said container outlet coupling part being fluidically coupled to said outlet valve and adapted to selectively mate with and separate from said system second coupling part wherein said container further has a filter interposed between the quantity of liquid substance and said outlet valve; and connecting a second portable, closed container filled with the liquid chemical substance and having inlet and outlet coupling parts to said system by mating said inlet and outlet coupling parts of said second container to said system first and second coupling parts, respectively.

Claim 18

In a method for performing a chemical process in a semiconductor manufacturing system having first and second coupling parts for mating with a liquid chemical storage device for containing a quantity of a liquid chemical substance which is used as a reactant in said chemical process, which method includes delivering the liquid chemical substance from said storage device to a processing chamber, the improvement comprising, after at least a portion of the liquid chemical substance has been delivered from said device; closing an inlet valve carried by a portable, closed container adapted to hold the quantity of substance, said inlet valve being fluidically coupled to an inlet opening in a wall of said container, wherein closing said inlet valve blocks said inlet opening of said container; closing an outlet valve carried by said container and fluidically coupled to an outlet opening in a wall of said container, wherein closing said outlet blocks said outlet opening of said container; disconnecting said container from said system by separating an inlet coupling part carried by said container from said system first coupling part, said container inlet coupling part being fluidically coupled to said inlet valve and adapted to selectively mate with and separate from said system first coupling part; and by separating an outlet coupling part carried by said container from said system second coupling part, said container outlet coupling part being fluidically coupled to said outlet valve and adapted to selectively mate with and separate from said system second coupling part wherein said container further has a filter interposed between the quantity of liquid substance and said outlet valve; and connecting a second portable, closed container filled with the liquid chemical substance and having inlet and outlet coupling parts to said system by mating said inlet and outlet coupling parts of said second container to said system first and second coupling parts, respectively.

Claim 19

The method according to claim 15 wherein said filter is interposed between said outlet opening and said outlet valve.

Claim 20

The method according to claim 16 wherein said filter blocks flow of solid particles through said outlet valve.

Claim 21

The method according to claim 16 wherein said filter is permanently secured to said container.

Claim 22

The method according to claim 16 wherein said container, said valves and said filter constitute a replaceable unit.

Claim 23

The method according to claim 15 wherein said filter blocks flow of solid particles through said outlet valve.

Claim 24

The method according to claim 15 wherein said filter is permanently secured to said container.

Claim 25

The method according to claim 15 wherein said container, said valves and said filter constitute a replaceable unit.

Claim 26

The method according to claim 15 wherein a source of a fill gas is fluidically coupled to said system first coupler part; and wherein said inlet coupling part is mated to said system first coupling part to provide a flow path between said inlet valve and said source of fill gas.

Claim 27

The method according to claim 15 wherein said container has a top and said outlet coupling part is displaced farther from said container top than said inlet coupling part.

Claim 28

The apparatus according to claim 9 wherein said container has a top and said outlet coupling part is displaced farther from said container top than said inlet coupling part.

Claim 29

The device according to claim 1 wherein said container has a top and said outlet coupling part is displaced farther from said container top than said inlet coupling part.