US5973771A — Pupil imaging reticle for photo steppers

Claim 1

Independent Claim 104 words

A device for measurement of pupil plane illumination comprising: a pupil imaging reticle, wherein said pupil imaging reticle comprises a plurality of holes, wherein each hole has about a same predetermined size and shape, wherein said holes are spaced on said reticle a predetermined distance, said distance being sufficient for providing adequate sampling density such that an invariance of a pupil plane illumination pattern across an entire exposure field of the pupil plane illumination can be determined and that an irregularity within the pupil plane illumination pattern can be determined, yet far enough apart to ensure interference does not occur on said exposure field.

Claim 2

Independent Claim 104 words

A device for measurement of pupil plane illumination comprising: a pupil imaging reticle, wherein said pupil imaging reticle comprises a plurality of holes, wherein each hole has about a same predetermined size and shape, wherein said holes are spaced on said reticle a predetermined distance, said distance being sufficient for providing adequate sampling density such that an invariance of a pupil plane illumination pattern across an entire exposure field of the pupil plane illumination can be determined and that an irregularity within the pupil plane illumination pattern can be determined, yet far enough apart to ensure interference does not occur on said exposure field.

Claim 3

Dependent Claim 69 words

The device of claim 1, wherein said exposure field is located at a predetermined defocus distance from a focal plane within said device wherein an optimum hole size is dependent on the defocus distance and on a wavelength of said pupil plane illumination, and wherein said dependence is determined by substantially equating a diffractive blurring of the pupil plane illumination to a geometrical blurring of the pupil plane illumination.

Claim 4

Dependent Claim 22 words

The device of claim 1, wherein said holes are circular in shape and have a predetermined diameter of between about 1-5 microns.

Claim 5

Dependent Claim 17 words

The device of claim 1, wherein said predetermined distance of said holes is between about 100-200 microns.

Claim 6

Independent Claim 127 words

A method for measurement of pupil plane illumination comprising: providing a pupil imaging reticle having a plurality of holes, wherein each hole has about a same predetermined size and shape; providing a lithographic lens having a pupil and an illuminator of the lithographic lens; providing a wafer having a photoresist thereon; illuminating said wafer through said pupil imaging reticle, defocused from a focal plane of the lithographic lens, to form and record an illumination pattern on said photoresist, wherein said illumination pattern is formed without removing the wafer from the system; and inspecting the illumination pattern of the lithographic lens as recorded on the photoresist to determine if the illumination pattern is invariant across the entire wafer and if an irregularity is present in the illumination pattern.

Claim 7

Independent Claim 127 words

A method for measurement of pupil plane illumination comprising: providing a pupil imaging reticle having a plurality of holes, wherein each hole has about a same predetermined size and shape; providing a lithographic lens having a pupil and an illuminator of the lithographic lens; providing a wafer having a photoresist thereon; illuminating said wafer through said pupil imaging reticle, defocused from a focal plane of the lithographic lens, to form and record an illumination pattern on said photoresist, wherein said illumination pattern is formed without removing the wafer from the system; and inspecting the illumination pattern of the lithographic lens as recorded on the photoresist to determine if the illumination pattern is invariant across the entire wafer and if an irregularity is present in the illumination pattern.

Claim 8

Dependent Claim 72 words

The method of claim 5, further comprising the step of: predetermining a hole diameter based on the amount of lens defocus and on a wavelength of said illumination, wherein an optimum hole diameter is determined by substantially equating a diffractive blurring of the illumination pattern to a geometrical blurring of the illumination pattern; and forming the plurality of holes having about the same size and shape in accordance with said predetermined diameter.

Claim 9

Dependent Claim 54 words

The method of claim 5, wherein said illumination pattern includes pupil images, and further comprising the step of predetermining a spacing between said holes such that adequate sampling density of the illumination pattern is provided while keeping the pupil images spaced far enough apart such that no interference is present between the pupil images.

Claim 10

Independent Claim 129 words

A method for measuring the pupil plane illumination comprising: providing a reticle having a plurality of holes, wherein each hole has about a same predetermined size and shape; providing a stepper including a lithographic lens having a pupil and an illuminator of the lithographic lens; illuminating a substrate having a photoresist thereon through said reticle, wherein the pupil plane illumination is defocused from the focal plane of the lithographic lens, to form a pupil illumination pattern comprising a series of pupil illumination images on the photoresist of an exposure field on said substrate, and wherein the stepper is not disturbed, and inspecting the pupil illumination pattern to determine if the illumination pattern is invariant across the entire exposure field and if an irregularity is present in the illumination pattern.

Claim 11

Independent Claim 129 words

A method for measuring the pupil plane illumination comprising: providing a reticle having a plurality of holes, wherein each hole has about a same predetermined size and shape; providing a stepper including a lithographic lens having a pupil and an illuminator of the lithographic lens; illuminating a substrate having a photoresist thereon through said reticle, wherein the pupil plane illumination is defocused from the focal plane of the lithographic lens, to form a pupil illumination pattern comprising a series of pupil illumination images on the photoresist of an exposure field on said substrate, and wherein the stepper is not disturbed, and inspecting the pupil illumination pattern to determine if the illumination pattern is invariant across the entire exposure field and if an irregularity is present in the illumination pattern.

Claim 12

Dependent Claim 58 words

The method of claim 8, further comprising the step of: predetermining a size of each hole based on an amount of lens defocus and on a wavelength of said pupil illumination, wherein an optimum hole size is determined by substantially equating a diffractive blurring of the pupil illumination pattern to a geometrical blurring of the pupil illumination pattern.

Claim 13

Dependent Claim 49 words

The method of claim 8, further comprising the step of predetermining a spacing between said holes such that adequate sampling density is provided on the pupil illumination pattern while keeping the pupil illumination images spaced far enough apart such that no interference is present between the pupil illumination images.

Claim 14

Dependent Claim 11 words

The method of claim 8, wherein the substrate is a wafer.

Claim 15

Dependent Claim 31 words

The method of claim 8, wherein the illuminating step further comprises moving a stepper interval to form illumination patterns on the photoresist using a different exposure dose at each stepper interval.

Claim 16

Dependent Claim 27 words

The method of claim 8, further comprising the step of setting a photoresist exposure dosage as a function of the size and resolution of the images desired.

Claim 17

Dependent Claim 36 words

The method of claim 8, further comprising the step of predetermining an amount of photoresist exposure based on an amount of defocus distance, wherein the amount of exposure varies as the square of the defocus distance.

Claim 18

Dependent Claim 145 words

A photo lithographic lens system, comprising: a lithographic lens having a pupil and an illuminator upon the lithographic lens; a pupil imaging reticle positioned at a first focal plane, said reticle having a plurality of holes therein, wherein each hole has about a same size and shape, and wherein the holes are spaced a predetermined distance apart; a substrate having a photoresist thereon; and wherein said substrate can be illuminated through said pupil imaging reticle, defocused from a focal plane of the lithographic lens by a predetermined defocus distance, to form a pupil illumination pattern that is recorded on the photoresist, wherein the pupil illumination pattern is formed without removing the substrate from the system, and wherein the pupil illumination pattern can be inspected to determine whether the pupil illumination pattern varies across the photoresist and whether an irregularity is present in the illumination pattern.

Claim 19

Dependent Claim 145 words

A photo lithographic lens system, comprising: a lithographic lens having a pupil and an illuminator upon the lithographic lens; a pupil imaging reticle positioned at a first focal plane, said reticle having a plurality of holes therein, wherein each hole has about a same size and shape, and wherein the holes are spaced a predetermined distance apart; a substrate having a photoresist thereon; and wherein said substrate can be illuminated through said pupil imaging reticle, defocused from a focal plane of the lithographic lens by a predetermined defocus distance, to form a pupil illumination pattern that is recorded on the photoresist, wherein the pupil illumination pattern is formed without removing the substrate from the system, and wherein the pupil illumination pattern can be inspected to determine whether the pupil illumination pattern varies across the photoresist and whether an irregularity is present in the illumination pattern.

Claim 20

Dependent Claim 54 words

The system of claim 15, wherein the pupil illumination pattern includes pupil images, and wherein the holes are positioned on the reticle in a manner that provides adequate sampling density of the pupil illumination pattern, such that the pupil images are spaced far enough apart that no interference is present between the pupil images.

Claim 21

Dependent Claim 53 words

The system of claim 15, wherein a size of each hole is predetermined based on the defocus distance and on a wavelength of said illumination, and wherein an optimum hole size is determined by substantially equating a diffractive blurring of the pupil illumination pattern to a geometrical blurring of the pupil illumination pattern.

Claim 22

Dependent Claim 37 words

The system of claim 17, wherein the optimum hole size is proportional to about the square root of the defocus distance, and wherein the optimum hole size is proportional to about the square root of the wavelength.

Annuity Stage	Window Opens	Payment Deadline	Surcharge Period Until	Estimated Fee	Status
3.5 Years (Year 4)	2002-10-25	2003-04-26	2003-10-26	$2000.00	Window Closed / Lapsed
7.5 Years (Year 8)	2006-10-25	2007-04-26	2007-10-26	$3760.00	Window Closed / Lapsed
11.5 Years (Year 12)	2010-10-25	2011-04-26	2011-10-26	$7700.00	Window Closed / Lapsed

Pupil imaging reticle for photo steppers

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