Projection exposure apparatus

Claim 2

A projection exposure apparatus comprising: a light source for emitting light; an aperture member having a plurality of openings, each opening having a respective area, for shaping light emitted from said light source and a respective light shielding member with a pattern of opaque dots uniformly distributed within the corresponding opening to vary the area of the respective openings transmitting light; a light condensing lens for irradiating a reticle with light transmitted through one of the openings of said aperture member; and a projection lens for condensing light transmitted through the reticle onto a wafer.

Claim 3

The projection exposure apparatus according to claim 1 comprising a fly-eye lens for dividing light emitted from said light source into a plurality of light beams.

Claim 4

A projection exposure apparatus comprising: a light source for emitting light; coherency adjustment means having a plurality of openings for shaping light emitted from said light source, the openings including respective light shielding patterns of opaque dots distributed uniformly over the corresponding opening; a light condensing lens for irradiating a reticle with light transmitted through one of the openings of said coherency adjustment means; and a projection lens for condensing light transmitted through the reticle onto a wafer.

Claim 5

A projection exposure apparatus comprising: a light source for emitting light; coherency adjustment means having a plurality of openings for shaping light emitted from said light source, the openings including respective light shielding patterns of opaque dots distributed uniformly over the corresponding opening; a light condensing lens for irradiating a reticle with light transmitted through one of the openings of said coherency adjustment means; and a projection lens for condensing light transmitted through the reticle onto a wafer.

Claim 6

The projection exposure apparatus according to claim 3 wherein said coherency adjustment means includes two light shielding patterns respectively comprising different numbers of opaque dots.

Claim 7

The projection exposure apparatus according to claim 3 wherein said coherency adjustment means includes two light shielding patterns respectively comprising different sizes of opaque dots.

Claim 8

The projection exposure apparatus according to claim 3 comprising a fly-eye lens for dividing light emitted from said light source into a plurality of light beams.

Claim 9

A projection exposure apparatus comprising: a light source for continuously emitting light; a reticle including a pattern having light transmissive regions; an optical system for projecting the pattern of the reticle onto a surface of a wafer with light continuously emitted by the light source and including a light source surface disposed between the light source and the reticle and having an aperture; and coherency adjusting means for controlling light distribution within the aperture in the light source surface of the optical system including a light shielding pattern in the aperture comprising a mesh of wires wherein one of the wires passes through a center of the aperture to modulate the coherency of the optical system.

Claim 10

A projection exposure apparatus comprising: a light source for continuously emitting light; a reticle including a pattern having light transmissive regions; an optical system for projecting the pattern of the reticle onto a surface of a wafer with light continuously emitted by the light source and including a light source surface disposed between the light source and the reticle and having an aperture; and coherency adjusting means for controlling light distribution within the aperture in the light source surface of the optical system including a light shielding pattern in the aperture comprising a mesh of wires wherein one of the wires passes through a center of the aperture to modulate the coherency of the optical system.

Claim 11

The projection exposure apparatus according to claim 7 wherein said coherency adjusting means includes a plurality of light shielding patterns respectively comprising wires of different sizes arranged in respective meshes.

Claim 12

The projection exposure apparatus according to claim 7 wherein said coherency adjusting means includes a plurality of light shielding patterns respectively comprising different quantities of wires in respective meshes.

Claim 13

A projection exposure apparatus comprising: a light source for continuously emitting light; a reticle including a pattern having light transmissive regions; an optical system for projecting the pattern of the reticle onto a surface of a wafer with light continuously emitted by the light source and including a light source surface disposed between the light source and the reticle and having an aperture; and coherency adjusting means for controlling light distribution within the aperture in the light source surface of the optical system including a light shielding pattern comprising a plurality of opaque dots to modulate the coherency of the optical system.

Claim 14

A projection exposure apparatus comprising: a light source for continuously emitting light; a reticle including a pattern having light transmissive regions; an optical system for projecting the pattern of the reticle onto a surface of a wafer with light continuously emitted by the light source and including a light source surface disposed between the light source and the reticle and having an aperture; and coherency adjusting means for controlling light distribution within the aperture in the light source surface of the optical system including a light shielding pattern comprising a plurality of opaque dots to modulate the coherency of the optical system.

Claim 15

The projection exposure apparatus according to claim 10 wherein said coherency adjusting means includes a plurality of light shielding patterns respectively comprising opaque dots of different sizes in respective patterns.

Claim 16

The projection exposure apparatus according to claim 10 wherein said coherency adjusting means includes a plurality of light shielding patterns respectively comprising opaque dots of different quantities in respective patterns.

Claim 17

A projection exposure apparatus comprising: a light source for continuously emitting light; a reticle including a pattern having light transmissive regions; an optical system for projecting the pattern of the reticle onto a surface of a wafer with light continuously emitted by the light source and including a light source surface disposed between the light source and the reticle and having an aperture; and coherency adjusting means for controlling light distribution within the aperture in the light source surface of the optical system including a light shielding pattern comprising a plurality of light transmission windows for transmitting light to modulate the coherency of the optical system.

Claim 18

A projection exposure apparatus comprising: a light source for continuously emitting light; a reticle including a pattern having light transmissive regions; an optical system for projecting the pattern of the reticle onto a surface of a wafer with light continuously emitted by the light source and including a light source surface disposed between the light source and the reticle and having an aperture; and coherency adjusting means for controlling light distribution within the aperture in the light source surface of the optical system including a light shielding pattern comprising a plurality of light transmission windows for transmitting light to modulate the coherency of the optical system.

Claim 19

The projection exposure apparatus according to claim 13 wherein said coherency adjusting means includes a plurality of light shielding patterns respectively comprising a plurality of spaced apart light transmitting windows of different sizes arranged in respective patterns.

Claim 20

The projection exposure apparatus according to claim 13 wherein said coherency adjusting means includes a plurality of light shielding patterns respectively comprising a plurality of spaced apart transmitting windows of different quantities arranged in respective patterns.