US5973379A
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Ferroelectric semiconductor device
Assignee: NXP USA Inc
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Filing: 1998-05-18
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Granted: 1999-10-26
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Expires: 2018-05-18
Abstract
Abstract A ferroelectric semiconductor device (10) and a method of manufacturing the ferroelectric semiconductor device (10). The ferroelectric semiconductor device (10) has a layer (15) of ferroelectric material disposed on a semiconductor substrate (11) and a gate structure (27) formed on the semiconductor substrate (11). A source region (23) and a drain region (24) are formed on the semiconductor substrate such that the source region (23) and the drain region (24) are laterally spaced apart from the gate structure (27).
Inventors
- 👤 William J. Ooms
- 👤 Jerald A. Hallmark
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-02 18:44
CPC Classifications
H; H10; H10D; H10D30/00; H10D30/01; H10D30/021; H10D30/027; H10D30/60; H10D30/701
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
92 words
A ferroelectric semiconductor device, comprising: a semiconductor material of a first conductivity type; a ferroelectric material over the semiconductor material, the ferroelectric material having first and second edges; a conductive material over the ferroelectric material; and first and second doped regions of a second conductivity type formed in the semiconductor material and located on opposing sides of the conductive material, where the first doped region is spaced apart from the first edge of the ferroelectric material and the second doped region is spaced apart from the second edge of the ferroelectric material.
Claim 2
Dependent Claim
92 words
A ferroelectric semiconductor device, comprising: a semiconductor material of a first conductivity type; a ferroelectric material over the semiconductor material, the ferroelectric material having first and second edges; a conductive material over the ferroelectric material; and first and second doped regions of a second conductivity type formed in the semiconductor material and located on opposing sides of the conductive material, where the first doped region is spaced apart from the first edge of the ferroelectric material and the second doped region is spaced apart from the second edge of the ferroelectric material.
Claim 3
Dependent Claim
14 words
The ferroelectric semiconductor device of claim 1, wherein the ferroelectric material is bismuth titanate.
Claim 4
Dependent Claim
13 words
The ferroelectric semiconductor device of claim 1, wherein the semiconductor material is silicon.
Claim 5
Dependent Claim
15 words
The ferroelectric semiconductor device of claim 1, wherein the ferroelectric material has ions located therein.
Claim 6
Dependent Claim
111 words
A ferroelectric semiconductor device, comprising: a semiconductor substrate having an insulating layer sandwiched between first and second layers of a semiconductor material; a ferroelectric material formed over the first layer of the semiconductor material, the ferroelectric material having first and second edges; a conductive material formed over the ferroelectric material; and first and second doped regions of a second conductivity type formed in the first layer of the semiconductor material and located on opposing sides of the ferroelectric material, where the first doped region is spaced apart from the first edge of the ferroelectric material and the second doped region is spaced apart from the second edge of the ferroelectric material.
Claim 7
Dependent Claim
111 words
A ferroelectric semiconductor device, comprising: a semiconductor substrate having an insulating layer sandwiched between first and second layers of a semiconductor material; a ferroelectric material formed over the first layer of the semiconductor material, the ferroelectric material having first and second edges; a conductive material formed over the ferroelectric material; and first and second doped regions of a second conductivity type formed in the first layer of the semiconductor material and located on opposing sides of the ferroelectric material, where the first doped region is spaced apart from the first edge of the ferroelectric material and the second doped region is spaced apart from the second edge of the ferroelectric material.
Claim 8
Dependent Claim
19 words
The ferroelectric semiconductor device of claim 5, wherein the first and second layers of the semiconductor material are silicon.
Claim 9
Dependent Claim
100 words
A ferroelectric semiconductor device, comprising: a semiconductor substrate having a first semiconductor material formed over a second semiconductor material; a ferroelectric material over the first semiconductor material, the ferroelectric material having first and second edges; a conductive material over the ferroelectric material; and a first contact spaced apart from the first edge of the ferroelectric material and providing contact to the first semiconductor material; and a second contact spaced apart from the second edge of the ferroelectric material and providing contact to the first semiconductor material, wherein the first and second contacts are on opposing sides of the ferroelectric material.
Claim 10
Dependent Claim
100 words
A ferroelectric semiconductor device, comprising: a semiconductor substrate having a first semiconductor material formed over a second semiconductor material; a ferroelectric material over the first semiconductor material, the ferroelectric material having first and second edges; a conductive material over the ferroelectric material; and a first contact spaced apart from the first edge of the ferroelectric material and providing contact to the first semiconductor material; and a second contact spaced apart from the second edge of the ferroelectric material and providing contact to the first semiconductor material, wherein the first and second contacts are on opposing sides of the ferroelectric material.
Claim 11
Dependent Claim
25 words
The ferroelectric semiconductor device of claim 7, wherein the first semiconductor material has an N-type conductivity and the second semiconductor material has a P-type conductivity.
Claim 12
Dependent Claim
25 words
The ferroelectric semiconductor device of claim 7, wherein the first semiconductor material has a P-type conductivity and the second semiconductor material has an N-type conductivity.
Claim 13
Dependent Claim
117 words
A ferroelectric semiconductor device, comprising: a semiconductor substrate having first, second, and third layers, wherein the second layer is a ferroelectric material; a ferroelectric layer formed over a portion of the third layer of the semiconductor substrate; a conductive material formed over the ferroelectric layer, the conductive material having first and second edges; and a source region formed in the third layer of the semiconductor substrate and spaced apart from the first edge of the conductive material; and a drain region formed in the third layer of the semiconductor substrate and spaced apart from the second edge of the conductive material, wherein the source region and the drain region are on opposing sides of the conductive material.
Claim 14
Dependent Claim
117 words
A ferroelectric semiconductor device, comprising: a semiconductor substrate having first, second, and third layers, wherein the second layer is a ferroelectric material; a ferroelectric layer formed over a portion of the third layer of the semiconductor substrate; a conductive material formed over the ferroelectric layer, the conductive material having first and second edges; and a source region formed in the third layer of the semiconductor substrate and spaced apart from the first edge of the conductive material; and a drain region formed in the third layer of the semiconductor substrate and spaced apart from the second edge of the conductive material, wherein the source region and the drain region are on opposing sides of the conductive material.
Claim 15
Dependent Claim
31 words
The ferroelectric semiconductor device of claim 10, further comprising first and second contacts, wherein the first contact is to the source region and the second contact is to the drain region.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-10-25 | 2003-04-26 | 2003-10-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-25 | 2007-04-26 | 2007-10-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-25 | 2011-04-26 | 2011-10-26 | $7700.00 | Window Closed / Lapsed |