US5970429A
Expired / Lapsed
US
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Method and apparatus for measuring electrical noise in devices
Assignee: Avago Technologies International Sales Pte Ltd
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Filing: 1997-08-08
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Granted: 1999-10-19
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Expires: 2017-08-08
Abstract
Abstract A method and apparatus for measuring electrical noise in devices is disclosed that comprises two distinct measurement phases. In one phase, the differential output resistance, r ab , between a first terminal, a, and a second terminal, b, of the device under test is measured. In the second phase, a voltage, V L (t), is measured across a load resistance, R L , that is in series with the first terminal, a, of the device under test. Then the output voltage noise spectral density, S VL , is determined based on a fourier transform of the voltage, V L (t); and the output current noise spectral density, S ia , is determined based on the output voltage noise spectral density, S VL , the load resistance, R L , and the differential output resistance, r ab .
Inventors
- 👤 Samuel Suresh Martin
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 14:40
CPC Classifications
G; G01; G01R; G01R29/00; G01R29/26
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
134 words
A method of measuring an output current noise spectral density, S ia , in a device that has at least a first terminal, a, and a second terminal, b, said method comprising the steps of: measuring a differential output resistance, r ab , between said first terminal, a, and said second terminal, b, of said device; measuring a voltage, V L (t), across a load resistance, R L , that is in series with said first terminal; determining an output voltage noise spectral density, S VL , based on a fourier transform of said voltage, V L (t); and determining said output current noise spectral density, S ia , based on said output voltage noise spectral density, S VL , said load resistance, R L , and said differential output resistance, r ab .
Claim 2
Independent Claim
134 words
A method of measuring an output current noise spectral density, S ia , in a device that has at least a first terminal, a, and a second terminal, b, said method comprising the steps of: measuring a differential output resistance, r ab , between said first terminal, a, and said second terminal, b, of said device; measuring a voltage, V L (t), across a load resistance, R L , that is in series with said first terminal; determining an output voltage noise spectral density, S VL , based on a fourier transform of said voltage, V L (t); and determining said output current noise spectral density, S ia , based on said output voltage noise spectral density, S VL , said load resistance, R L , and said differential output resistance, r ab .
Claim 3
Dependent Claim
19 words
The method of claim 1 wherein said output current noise spectral density, S ia , is based on ##EQU5##
Claim 4
Dependent Claim
50 words
The method of claim 1 wherein said device has a first series resistance, R a , associated with said first terminal, a, and a second series resistance, R b , associated with said second terminal, b, and wherein said output current noise spectral density, S ia , is based on
Claim 5
Independent Claim
141 words
An apparatus for measuring an output current noise spectral density, S ia , in a device that has at least a first terminal, a, and a second terminal, b, said apparatus comprising: an A/D converter for measuring a differential output resistance, r ab , between said first terminal, a, and said second terminal, b, of said device, and for measuring a voltage, V L (t), across a load resistance, R L , that is in series with said first terminal; and a processor for determining an output voltage noise spectral density, S VL , based on a fourier transform of said voltage, V L (t), and determining said output current noise spectral density, S ia , based on said output voltage noise spectral density, S VL , said load resistance, R L , and said differential output resistance, r ab .
Claim 6
Independent Claim
141 words
An apparatus for measuring an output current noise spectral density, S ia , in a device that has at least a first terminal, a, and a second terminal, b, said apparatus comprising: an A/D converter for measuring a differential output resistance, r ab , between said first terminal, a, and said second terminal, b, of said device, and for measuring a voltage, V L (t), across a load resistance, R L , that is in series with said first terminal; and a processor for determining an output voltage noise spectral density, S VL , based on a fourier transform of said voltage, V L (t), and determining said output current noise spectral density, S ia , based on said output voltage noise spectral density, S VL , said load resistance, R L , and said differential output resistance, r ab .
Claim 7
Dependent Claim
19 words
The apparatus of claim 4 wherein said output current noise spectral density, S ia , is based on ##EQU6##
Claim 8
Dependent Claim
50 words
The apparatus of claim 4 wherein said device has a first series resistance, R a , associated with said first terminal, a, and a second series resistance, R b , associated with said second terminal, b, and wherein said output current noise spectral density, S ia , is based on
Claim 9
Independent Claim
185 words
A method of quality control for semiconductor wafers by measuring an output current noise spectral density, S ia , in a device that has at least a first terminal, a, and a second terminal, b, said method comprising the steps of: fabricating a first semiconductor wafer containing said device in accordance with a first process; measuring a differential output resistance, r ab , between said first terminal, a, and said second terminal, b, of said device; measuring a voltage, V L (t), across a load resistance, R L , that is in series with said first terminal; determining an output voltage noise spectral density, S VL , based on a fourier transform of said voltage, V L (t); determining said output current noise spectral density, S ia , based on said output voltage noise spectral density, S VL , said load resistance, R L , and said differential output resistance, r ab ; modifying said first process based on said output current noise spectral density, S ia , to create a second process; and fabricating said second semiconductor wafer in accordance with said second process.
Claim 10
Independent Claim
185 words
A method of quality control for semiconductor wafers by measuring an output current noise spectral density, S ia , in a device that has at least a first terminal, a, and a second terminal, b, said method comprising the steps of: fabricating a first semiconductor wafer containing said device in accordance with a first process; measuring a differential output resistance, r ab , between said first terminal, a, and said second terminal, b, of said device; measuring a voltage, V L (t), across a load resistance, R L , that is in series with said first terminal; determining an output voltage noise spectral density, S VL , based on a fourier transform of said voltage, V L (t); determining said output current noise spectral density, S ia , based on said output voltage noise spectral density, S VL , said load resistance, R L , and said differential output resistance, r ab ; modifying said first process based on said output current noise spectral density, S ia , to create a second process; and fabricating said second semiconductor wafer in accordance with said second process.
Claim 11
Dependent Claim
19 words
The method of claim 7 wherein said output current noise spectral density, S ia , is based on ##EQU7##
Claim 12
Dependent Claim
50 words
The method of claim 7 wherein said device has a first series resistance, R a , associated with said first terminal, a, and a second series resistance, R b , associated with said second terminal, b, and wherein said output current noise spectral density, S ia , is based on
Claim 13
Independent Claim
139 words
An apparatus that measures an output current noise spectral density, S ia , in a device that has at least a first terminal, a, and a second terminal, b, said apparatus comprising: means for measuring a differential output resistance, r ab , between said first terminal, a, and said second terminal, b, of said device; means for measuring a voltage, V L (t), across a load resistance, R L , that is in series with said first terminal; means for determining an output voltage noise spectral density, S VL , based on a fourier transform of said voltage, V L (t); and means for determining said output current noise spectral density, S ia , based on said output voltage noise spectral density, S VL , said load resistance, R L , and said differential output resistance, r ab .
Claim 14
Independent Claim
139 words
An apparatus that measures an output current noise spectral density, S ia , in a device that has at least a first terminal, a, and a second terminal, b, said apparatus comprising: means for measuring a differential output resistance, r ab , between said first terminal, a, and said second terminal, b, of said device; means for measuring a voltage, V L (t), across a load resistance, R L , that is in series with said first terminal; means for determining an output voltage noise spectral density, S VL , based on a fourier transform of said voltage, V L (t); and means for determining said output current noise spectral density, S ia , based on said output voltage noise spectral density, S VL , said load resistance, R L , and said differential output resistance, r ab .
Claim 15
Dependent Claim
19 words
The apparatus of claim 10 wherein said output current noise spectral density, S ia , is based on ##EQU8##
Claim 16
Dependent Claim
50 words
The apparatus of claim 10 wherein said device has a first series resistance, R a , associated with said first terminal, a, and a second series resistance, R b , associated with said second terminal, b, and wherein said output current noise spectral density, S ia , is based on
References Cited (Backward Citations)
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