US5966622A
Expired / Lapsed
US
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Process for bonding crystalline substrates with different crystal lattices
Assignee: Seoul Semiconductor Co Ltd
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Filing: 1997-10-08
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Granted: 1999-10-12
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Expires: 2017-10-08
Abstract
Abstract A process for device fabrication is disclosed in which two substrates having different crystal lattices are bound together. In the process a layer of material that has a crystal lattice similar to the crystal lattices of the first substrate is formed on the surface of the second substrate. The thickness of the layer is about 1 nm to about 2 nm. The layer of material is then bound to the surface of the first substrate.
Inventors
- 👤 Barry Franklin Levine
- 👤 Christopher James Pinzone
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 14:29
CPC Classifications
H; H10; H10F; H10F71/00; H10P; H10P95/00; H10P10/00; H10P10/12; H10P10/128; Y; Y10; Y10S; Y10S438/00; Y10S438/977
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
153 words
A process for fabricating a device comprising: selecting a first, single crystal substrate having a first crystal lattice and a second single crystal substrate having a second crystal lattice different from the first crystal lattice wherein the second substrate comprises a bulk substrate that has at least one single crystal device layer formed thereover; forming a layer of material on one of the first substrate or the single crystal device layer of the second substrate that has the crystal lattice of the other of the first substrate or the single crystal device layer of the second substrate, wherein the layer of material has a thickness of about 1 nm to about 2 nm; bonding the layer of material to the other of the first substrate or the single crystal device layer of the second substrate; and removing bulk of the second substrate, leaving the device layer bonded to the first single crystal substrate.
Claim 2
Dependent Claim
153 words
A process for fabricating a device comprising: selecting a first, single crystal substrate having a first crystal lattice and a second single crystal substrate having a second crystal lattice different from the first crystal lattice wherein the second substrate comprises a bulk substrate that has at least one single crystal device layer formed thereover; forming a layer of material on one of the first substrate or the single crystal device layer of the second substrate that has the crystal lattice of the other of the first substrate or the single crystal device layer of the second substrate, wherein the layer of material has a thickness of about 1 nm to about 2 nm; bonding the layer of material to the other of the first substrate or the single crystal device layer of the second substrate; and removing bulk of the second substrate, leaving the device layer bonded to the first single crystal substrate.
Claim 3
Dependent Claim
36 words
The process of claim 1 wherein the first, single crystal substrate is a silicon substrate and the second, single crystal substrate is a III-V single crystal substrate with at least one III-V device layer formed thereover.
Claim 4
Dependent Claim
35 words
The process of claim 2 wherein the III-V substrate is an indium phosphide substrate and the at least one III-V device layer is selected from the group consisting of indium gallium arsenide and indium phosphide.
Claim 5
Dependent Claim
16 words
The process of claim 2 wherein the layer of material is a layer of III-V material.
Claim 6
Dependent Claim
18 words
The process of claim 4 wherein the layer of III-V material is grown eptiaxially on the silicon substrate.
Claim 7
Dependent Claim
70 words
The process of claim 1 wherein the layer of material is bound to the other of the first substrate or the single crystal device layer of the second substrate by pressing the layer of material to the surface of the other of the first substrate or the single crystal device layer of the second substrate that has a crystal lattice that matches the crystal lattice of the layer of material.
Claim 8
Dependent Claim
52 words
The process of claim 6 wherein the layer of material is pressed to the surface of the other of the first substrate or the single crystal device layer of the second substrate at a temperature in the range of about 450° C. to about 700° C. in a substantially non-oxygen containing atmosphere.
Claim 9
Dependent Claim
34 words
The process of claim 1 wherein the bulk of the second substrate is removed from the at least one device layer before the at least one device layer is bound to the first substrate.
Claim 10
Dependent Claim
33 words
The process of claim 1 wherein an etch stop layer is formed on the bulk of the second substrate and the at least one device layer is formed over the etch stop layer.
Claim 11
Dependent Claim
30 words
The process of claim 9 wherein the etch stop layer is selected from the group consisting of a layer of indium gallium arsenide and a layer of indium aluminum arsenide.
Claim 12
Dependent Claim
94 words
The process of claim 8 further comprising: forming a diffusion barrier layer over the at least one device layer; forming a layer of gold over the diffusion barrier layer; and bonding a silicon substrate to the gold layer before removing the bulk of the second substrate from the at least one single crystalline device layer of the second substrate after which the layer of material is formed on either the first substrate or the at least one single crystalline device layer and the first substrate is bonded to the at least one device layer.
Claim 13
Dependent Claim
23 words
The process of claim 11 wherein the surface of the silicon substrate that is bound to the gold layer has a non-planar configuration.
Claim 14
Dependent Claim
39 words
The process of claim 6 wherein the two surfaces are pressed together with a force sufficient for the surfaces to be held together by Van der Waals' forces and the bulk of the second substrate is removed by etching.
Claim 15
Dependent Claim
52 words
The process of claim 13 wherein the first, single crystal substrate is a silicon substrate and the second, single crystal substrate is a III-V single crystal substrate with at least two III-V layers formed thereon, one of which stops the etch of the III-V substrate from proceeding to the second III-V layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-10-11 | 2003-04-12 | 2003-10-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-10-11 | 2007-04-12 | 2007-10-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-10-11 | 2011-04-12 | 2011-10-12 | $7700.00 | Window Closed / Lapsed |