US5962065A
Expired / Lapsed
US
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Method of forming polysilicon having a desired surface roughness
Assignee: Micron Technology Inc
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Filing: 1997-09-03
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Granted: 1999-10-05
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Expires: 2017-09-03
Abstract
Abstract A method for reliably forming polysilicon of a desired surface roughness includes providing a layer of doped or undoped amorphous silicon on a substrate and heating said substrate while monitoring the emission of said substrate and comparing the monitored emission with an expected emission attributable to the heating regime employed. An increase in the monitored emission not attributable to the heating regime signals a transition of the layer of amorphous silicon to rough polysilicon. A decrease in the monitored emission not attributable to the heating regime signals a transition to smooth polysilicon. The increases and decreases in the monitored emission can be used to end the heating regime at the time at which the desired surface roughness of polysilicon is formed, or merely to passively monitor the process.
Inventors
- 👤 Ronald A. Weimer
- 👤 Avishai Kepten
- 👤 Michael Sendler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:21
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/23; H10P74/238; C; C23; C23C; C23C16/00; C23C16/22; C23C16/24; C23C16/56; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/38; H10P14/3802; H10P14/40; H10P14/416; Y; Y10; Y10S; Y10S438/00; Y10S438/964
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
57 words
A method for forming polysilicon having a desired surface roughness, said method comprising: depositing amorphous silicon upon a substrate; heating said substrate; monitoring an emission of said substrate while heating said substrate; and terminating said heating after a time determined in response to said emission; said emission being characteristic of the achievement of said desired surface roughness.
Claim 2
Independent Claim
57 words
A method for forming polysilicon having a desired surface roughness, said method comprising: depositing amorphous silicon upon a substrate; heating said substrate; monitoring an emission of said substrate while heating said substrate; and terminating said heating after a time determined in response to said emission; said emission being characteristic of the achievement of said desired surface roughness.
Claim 3
Dependent Claim
39 words
The method as defined in claim 1, wherein monitoring said emission of said substrate comprises using a single-color pyrometer to monitor said emission of said substrate within a wavelength range from about 10 -2 μm to about 100 μm.
Claim 4
Dependent Claim
38 words
The method as defined in claim 2, wherein monitoring said emission of said substrate comprises using a single-color pyrometer to monitor said emission of said substrate within a wavelength range from about 1 μm to about 10 μm.
Claim 5
Dependent Claim
33 words
The method as defined in claim 2, wherein said substrate is a silicon wafer having a backside and said single-color pyrometer monitors said emission of said wafer from said backside of said wafer.
Claim 6
Dependent Claim
13 words
The method as defined in claim 1 wherein heating said substrate comprises RTA.
Claim 7
Dependent Claim
28 words
The method as defined in claim 1, wherein terminating said heating after said time is conducted at formation of at least some rough polysilicon from said amorphous silicon.
Claim 8
Dependent Claim
25 words
The method as defined in claim 1, wherein terminating said heating after said time is conducted after formation of rough polysilicon from said amorphous silicon.
Claim 9
Dependent Claim
24 words
The method as defined in claim 1, wherein terminating said heating after said time is conducted at formation of at least some smooth polysilicon.
Claim 10
Dependent Claim
21 words
The method as defined in claim 1, wherein terminating said heating after said time is conducted after formation of smooth polysilicon.
Claim 11
Independent Claim
61 words
A method for forming polysilicon having a desired surface roughness, said method comprising: forming amorphous silicon upon a substrate; heating said amorphous silicon upon said substrate; monitoring an emission of said substrate while heating said amorphous silicon upon said substrate; and terminating said heating in response to said emission; said emission being characteristic of the achievement of said desired surface roughness.
Claim 12
Independent Claim
61 words
A method for forming polysilicon having a desired surface roughness, said method comprising: forming amorphous silicon upon a substrate; heating said amorphous silicon upon said substrate; monitoring an emission of said substrate while heating said amorphous silicon upon said substrate; and terminating said heating in response to said emission; said emission being characteristic of the achievement of said desired surface roughness.
Claim 13
Independent Claim
68 words
A method for detecting the conversion of amorphous silicon to polysilicon having a surface roughness, said method comprising: providing a layer of amorphous silicon on a substrate; heating said substrate; measuring an emission of said substrate while heating said substrate; and detecting a first level of said emission representative of conversion of at least a portion of said layer of amorphous silicon to polysilicon having said surface roughness.
Claim 14
Independent Claim
68 words
A method for detecting the conversion of amorphous silicon to polysilicon having a surface roughness, said method comprising: providing a layer of amorphous silicon on a substrate; heating said substrate; measuring an emission of said substrate while heating said substrate; and detecting a first level of said emission representative of conversion of at least a portion of said layer of amorphous silicon to polysilicon having said surface roughness.
Claim 15
Dependent Claim
42 words
The method as defined in claim 11, further including, after detecting said first level of said emission, detecting a second level of said emission representative of conversion of substantially all of said layer of amorphous silicon to polysilicon having said surface roughness.
Claim 16
Dependent Claim
33 words
The method as defined in claim 11, further including, after detecting said first level of said emission, detecting a progressive decrease in said emission representative of the onset of formation of smooth polysilicon.
Claim 17
Dependent Claim
37 words
The method as defined in claim 13, further including, after detecting said progressive decrease in said emission, detecting an end of said progressive decrease in said emission representative of substantial completion of said formation of smooth polysilicon.
Claim 18
Dependent Claim
13 words
The method as defined in claim 11, wherein heating said substrate comprises RTA.
Claim 19
Dependent Claim
42 words
The method as defined in claim 11, wherein measuring said emission of said substrate comprises using a single-color pyrometer to monitor said emission of said substrate, said emission being within a wavelength range from about 10 -2 μm to about 100 μm.
Claim 20
Dependent Claim
41 words
The method as defined in claim 16, wherein measuring said emission of said substrate comprises using a single-color pyrometer to monitor said emission of said substrate, said emission being within a wavelength range from about 1 μm to about 10 μm.
References Cited (Backward Citations)
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