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US5959880A Expired / Lapsed US ⏱️ 0.0 years remaining

Low aspect ratio magnetoresistive tunneling junction

Assignee: Everspin Technologies Inc
•
Filing: 1997-12-18
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Granted: 1999-09-28
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Expires: 2017-12-18
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Abstract

Abstract A low aspect ratio magnetoresistive tunneling junction memory cell includes two layers of magnetoresistive material separated by electrically insulating material so as to form a magnetoresistive tunneling junction. An exchange interaction layer is sandwiched between one layer of the junction and a third layer of magnetoresistive material so as to pin the magnetic vector of one layer of the junction anti-parallel to a magnetic vector in the third layer so that magnetostatic interaction between the junction layers is canceled and the magnetic vector of the one layer is free to move in either of the two directions parallel to the polarization axis. Antiferromagnetic material is positioned adjacent the third layer so as to fix the magnetic vector in the third layer uni-directionally parallel to the polarization axis.

Inventors

  • 👤 Jing Shi
  • 👤 Theodore Zhu
  • 👤 Saied N. Tehrani
  • 👤 Eugene Chen
  • 👤 Mark Durlam

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-02 22:43
CPC Classifications
G; G11; G11C; G11C11/00; G11C11/56; G11C11/5607; G11C11/02; G11C11/16; G11C11/165; G11C11/1675; G11C2211/00; G11C2211/56; G11C2211/561; G11C2211/5615

Claims Analysis

Total Claims: 18
Claim 1
Independent Claim 224 words
A low aspect ratio magnetoresistive tunneling junction memory cell comprising: first and second layers of magnetoresistive material stacked in parallel, overlying relationship and separated by electrically insulating material so as to form a magnetoresistive tunneling junction, the first layer including a fixed polarization axis and a magnetic vector directed in either of two directions parallel to the polarization axis, and the second layer including a fixed polarization axis parallel to the polarization axis of the first layer and a magnetic vector directed in a fixed direction parallel to the polarization axis; an exchange interaction layer positioned adjacent the second layer of magnetic material; a third layer of magnetoresistive material positioned adjacent the exchange interaction layer so as to situate the exchange interaction layer in parallel juxtaposition between the second and third layers, the third layer having a magnetic vector which is always pinned anti-parallel to the magnetic vector in the second layer by coupling of the exchange interaction layer, and magnetostatic interaction between the first and second layers is canceled and the magnetic vector of the first layer is free to move in either of the two directions parallel to the polarization axis; and antiferromagnetic material positioned adjacent the third layer so as to fix the magnetic vector in the third layer uni-directionally parallel to the polarization axes of the first and second layers.
Claim 2
Dependent Claim 224 words
A low aspect ratio magnetoresistive tunneling junction memory cell comprising: first and second layers of magnetoresistive material stacked in parallel, overlying relationship and separated by electrically insulating material so as to form a magnetoresistive tunneling junction, the first layer including a fixed polarization axis and a magnetic vector directed in either of two directions parallel to the polarization axis, and the second layer including a fixed polarization axis parallel to the polarization axis of the first layer and a magnetic vector directed in a fixed direction parallel to the polarization axis; an exchange interaction layer positioned adjacent the second layer of magnetic material; a third layer of magnetoresistive material positioned adjacent the exchange interaction layer so as to situate the exchange interaction layer in parallel juxtaposition between the second and third layers, the third layer having a magnetic vector which is always pinned anti-parallel to the magnetic vector in the second layer by coupling of the exchange interaction layer, and magnetostatic interaction between the first and second layers is canceled and the magnetic vector of the first layer is free to move in either of the two directions parallel to the polarization axis; and antiferromagnetic material positioned adjacent the third layer so as to fix the magnetic vector in the third layer uni-directionally parallel to the polarization axes of the first and second layers.
Claim 3
Dependent Claim 32 words
A low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 1 wherein the first and second layers each have a length/width ratio in a range of 1 to 5.
Claim 4
Dependent Claim 33 words
A low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 2 wherein the first and second layers each have a top plan that is one of circular, diamond-shaped, or elliptical.
Claim 5
Dependent Claim 25 words
A low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 1 wherein the antiferromagnetic material includes FeMn, NiMn, IrMn, or combinations thereof.
Claim 6
Dependent Claim 35 words
A low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 1 including in addition flux closure material positioned to enclose exposed edges of the second, the exchange interaction and the third layers.
Claim 7
Dependent Claim 211 words
A low aspect ratio magnetoresistive tunneling junction memory cell comprising: a substrate having a surface; a layer of antiferromagnetic material positioned on the surface of the substrate; a fixed polarization layer of magnetoresistive material positioned on the layer of magnetic material so that a polarization axis of the fixed polarization layer is fixed in a direction parallel to the surface of the substrate; an exchange interaction layer positioned on the fixed polarization layer of magnetoresistive material; and first and second layers of magnetoresistive material stacked in parallel, overlying relationship on the exchange interaction layer and separated by electrically insulating material so as to form a magnetoresistive tunneling junction, each of the first and second layers including a fixed polarization axis parallel to the polarization axis of the fixed polarization layer and a magnetic vector directed in either of two directions parallel to the polarization axis, and the magnetic vector of the second layer being pinned by the fixed polarization layer and the exchange interaction layer uni-directionally parallel to the polarization axes of the first and second layers, whereby magnetostatic interaction between the first and second layers is canceled and the magnetic vector of the first layer is free to move in either of the two directions parallel to the polarization axis.
Claim 8
Dependent Claim 211 words
A low aspect ratio magnetoresistive tunneling junction memory cell comprising: a substrate having a surface; a layer of antiferromagnetic material positioned on the surface of the substrate; a fixed polarization layer of magnetoresistive material positioned on the layer of magnetic material so that a polarization axis of the fixed polarization layer is fixed in a direction parallel to the surface of the substrate; an exchange interaction layer positioned on the fixed polarization layer of magnetoresistive material; and first and second layers of magnetoresistive material stacked in parallel, overlying relationship on the exchange interaction layer and separated by electrically insulating material so as to form a magnetoresistive tunneling junction, each of the first and second layers including a fixed polarization axis parallel to the polarization axis of the fixed polarization layer and a magnetic vector directed in either of two directions parallel to the polarization axis, and the magnetic vector of the second layer being pinned by the fixed polarization layer and the exchange interaction layer uni-directionally parallel to the polarization axes of the first and second layers, whereby magnetostatic interaction between the first and second layers is canceled and the magnetic vector of the first layer is free to move in either of the two directions parallel to the polarization axis.
Claim 9
Dependent Claim 32 words
A low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 6 wherein the first and second layers each have a length/width ratio in a range of 1 to 5.
Claim 10
Dependent Claim 33 words
A low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 7 wherein the first and second layers each have a top plan that is one of circular, diamond-shaped, or elliptical.
Claim 11
Dependent Claim 25 words
A low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 6 wherein the antiferromagnetic material includes FeMn, NiMn, IrMn, or combinations thereof.
Claim 12
Dependent Claim 36 words
A low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 6 including in if addition flux closure material positioned to enclose exposed edges of the second, the exchange interaction and the third layers.
Claim 13
Independent Claim 233 words
A method of fabricating a low aspect ratio magnetoresistive tunneling junction memory cell comprising the steps of: providing first and second layers of magnetoresistive material stacked in parallel, overlying relationship and separated by electrically insulating material so as to form a magnetoresistive tunneling junction, the first layer including a fixed polarization axis and a magnetic vector directed in either of two directions parallel to the polarization axis, and the second layer including a fixed polarization axis parallel to the polarization axis of the first layer and a magnetic vector directed in a fixed direction parallel to the polarization axis; positioning an exchange interaction layer adjacent the second layer of magnetic material; positioning a third layer of magnetoresistive material adjacent the exchange interaction layer so as to situate the exchange interaction layer in parallel juxtaposition between the second and third layers, the third layer having a magnetic vector which is always pinned anti-parallel to the magnetic vector in the second layer by coupling of the exchange interaction layer so that magnetostatic interaction between the first and second layers is canceled and the magnetic vector of the first layer is free to move in either of the two directions parallel to the polarization axis; and positioning antiferromagnetic material adjacent the third layer so as to fix the magnetic vector in the third layer uni-directionally parallel to the polarization axes of the first and second layers.
Claim 14
Independent Claim 233 words
A method of fabricating a low aspect ratio magnetoresistive tunneling junction memory cell comprising the steps of: providing first and second layers of magnetoresistive material stacked in parallel, overlying relationship and separated by electrically insulating material so as to form a magnetoresistive tunneling junction, the first layer including a fixed polarization axis and a magnetic vector directed in either of two directions parallel to the polarization axis, and the second layer including a fixed polarization axis parallel to the polarization axis of the first layer and a magnetic vector directed in a fixed direction parallel to the polarization axis; positioning an exchange interaction layer adjacent the second layer of magnetic material; positioning a third layer of magnetoresistive material adjacent the exchange interaction layer so as to situate the exchange interaction layer in parallel juxtaposition between the second and third layers, the third layer having a magnetic vector which is always pinned anti-parallel to the magnetic vector in the second layer by coupling of the exchange interaction layer so that magnetostatic interaction between the first and second layers is canceled and the magnetic vector of the first layer is free to move in either of the two directions parallel to the polarization axis; and positioning antiferromagnetic material adjacent the third layer so as to fix the magnetic vector in the third layer uni-directionally parallel to the polarization axes of the first and second layers.
Claim 15
Dependent Claim 40 words
A method of fabricating a low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 11 including the step of forming the first and second layers each with a length/width ratio in a range of 1 to 5.
Claim 16
Dependent Claim 41 words
A method of fabricating a low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 12 including the step of forming the first and second layers each with a top plan that is one of circular, diamond-shaped, or elliptical.
Claim 17
Dependent Claim 35 words
A method of fabricating a low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 11 wherein the step of positioning antiferromagnetic material includes positioning one of FeMn, NiMn, IrMn, or combinations thereof.
Claim 18
Dependent Claim 45 words
A method of fabricating a low aspect ratio magnetoresistive tunneling junction memory cell as claimed in claim 11 including in addition positioning flux closure material adjacent to enclose exposed edges of the second, the exchange interaction and the third layers to enclose the exposed edges.

References Cited (Backward Citations)

US5595830A Cited
US5793697A Cited
US5764567A Cited
US5801984A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-09-27 2003-03-29 2003-09-28 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-09-27 2007-03-29 2007-09-28 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-09-27 2011-03-29 2011-09-28 $7700.00 Window Closed / Lapsed

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