US5956597A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method for producing SOI & non-SOI circuits on a single wafer
Assignee: Google LLC
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Filing: 1997-09-15
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Granted: 1999-09-21
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Expires: 2017-09-15
Abstract
Abstract According to a preferred embodiment of the present invention, a stress-reducing region formed on a wafer allows standard bulk CMOS (non-SOI) devices and SOI devices to be reliably fabricated on the same wafer. The high-stress interface that typically exists between the SOI device regions and the non-SOI device regions is transferred to a region where the high-stress will be reduced and relaxed. Typically, this means that the high-stress interface will be fabricated so as to lie over a region of the wafer similar to Shallow Trench Isolation (STI) regions. In addition, by using another preferred embodiment of the present invention, a coplanar wafer surface can be maintained for a wafer which includes both bulk CMOS devices and SOI devices. This is accomplished by etching the silicon wafer in the SOI device regions prior to the oxygen implantation so that the surface of the area between the stress interface regions is lower than the overall surface of the remainder of the wafer. Then, when the SiO 2 region is formed for the SOI devices, the expansion of the SOI region will bring the surface of the SOI device area up to the overall surface of the wafer. A short Chemical Mechanical Polish (CMP) step may also be included to ensure uniformity of the wafer's surface.
Inventors
- 👤 Toshiharu Furukawa
- 👤 Mark C. Hakey
- 👤 Steven J. Holmes
- 👤 David V. Horak
- 👤 Paul A. Rabidoux
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 15:47
CPC Classifications
H; H10; H10D; H10D84/00; H10D84/80; H10D84/82; H10D84/83; H10D84/85; H10D84/856; H10D86/00; H10D86/01; H10D86/201; H10P; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10P90/1908; H10W; H10W10/00; H10W10/10; H10W10/181
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
119 words
A method for fabricating both SOI and non-SOI devices on a single wafer, the method comprising the steps of: identifying a first stress interface region in a wafer substrate; identifying a second stress interface region in the wafer substrate; depositing a layer of etch-stop material over the substrate and the first and second stress interface regions; forming an ion-implant mask on the etch-stop material, wherein the ion-implant mask does not cover the etch-stop material located between the first and second stress interface regions; forming a buried implant region between the first and second stress interface regions; removing the ion-implant mask material and the etch-stop material; and annealing the wafer to transform the buried implant region into an isolation region.
Claim 2
Independent Claim
119 words
A method for fabricating both SOI and non-SOI devices on a single wafer, the method comprising the steps of: identifying a first stress interface region in a wafer substrate; identifying a second stress interface region in the wafer substrate; depositing a layer of etch-stop material over the substrate and the first and second stress interface regions; forming an ion-implant mask on the etch-stop material, wherein the ion-implant mask does not cover the etch-stop material located between the first and second stress interface regions; forming a buried implant region between the first and second stress interface regions; removing the ion-implant mask material and the etch-stop material; and annealing the wafer to transform the buried implant region into an isolation region.
Claim 3
Dependent Claim
23 words
The method of claim 1, further comprising the step of fabricating at least one SOI device in an area over the isolation region.
Claim 4
Dependent Claim
23 words
The method of claim 2, further comprising the step of fabricating at least one non-SOI device outside the area over the isolation region.
Claim 5
Dependent Claim
37 words
The method of claim 1, further comprising the steps of: fabricating at least one SOI device in an area over the isolation region; and fabricating at least one non-SOI device outside the area over the isolation region.
Claim 6
Dependent Claim
18 words
The method of claim 1, further comprising the step of polishing the wafer surface using a CMP process.
Claim 7
Dependent Claim
38 words
The method of claim 1, wherein the steps of identifying a first stress interface region and a second stress interface region in the wafer substrate comprises the step of identifying two different locations on a single wafer feature.
Claim 8
Independent Claim
149 words
A method for fabricating both SOI and non-SOI devices on a single wafer, the method comprising the steps of: identifying a first stress interface region in a wafer substrate; identifying a second stress interface region in the wafer substrate; depositing a layer of etch-stop material over the substrate and the first and second stress interface regions; forming an ion-implant mask on the etch-stop material, wherein the ion-implant mask does not cover the etch-stop material located between the first and second stress interface regions; forming a buried implant region between the first and second stress interface regions; removing the ion-implant mask material and the etch-stop material; and annealing the wafer to transform the implant region into an isolation region; fabricating SOI devices in an area over the isolation region; fabricating non-SOI devices outside the area over the isolation region; and polishing the surface of the wafer using a CMP process.
Claim 9
Independent Claim
149 words
A method for fabricating both SOI and non-SOI devices on a single wafer, the method comprising the steps of: identifying a first stress interface region in a wafer substrate; identifying a second stress interface region in the wafer substrate; depositing a layer of etch-stop material over the substrate and the first and second stress interface regions; forming an ion-implant mask on the etch-stop material, wherein the ion-implant mask does not cover the etch-stop material located between the first and second stress interface regions; forming a buried implant region between the first and second stress interface regions; removing the ion-implant mask material and the etch-stop material; and annealing the wafer to transform the implant region into an isolation region; fabricating SOI devices in an area over the isolation region; fabricating non-SOI devices outside the area over the isolation region; and polishing the surface of the wafer using a CMP process.
Claim 10
Independent Claim
124 words
A method for fabricating a single wafer with a co-planar wafer surface with both SOI and non-SOI devices on the wafer, the method comprising the steps of: identifying a first stress interface region in a wafer substrate; identifying a second stress interface region in the wafer substrate; etching away a portion of the wafer substrate located between the first and second stress interface regions; depositing an etch-stop material over the wafer substrate; forming an ion-implant mask on the etch-stop material, wherein the mask does not cover the etch-stop material located between the first and second stress interface regions; forming a buried implant region between the first and second stress interface regions; and annealing the wafer to transform the implant layer into an isolation region.
Claim 11
Independent Claim
124 words
A method for fabricating a single wafer with a co-planar wafer surface with both SOI and non-SOI devices on the wafer, the method comprising the steps of: identifying a first stress interface region in a wafer substrate; identifying a second stress interface region in the wafer substrate; etching away a portion of the wafer substrate located between the first and second stress interface regions; depositing an etch-stop material over the wafer substrate; forming an ion-implant mask on the etch-stop material, wherein the mask does not cover the etch-stop material located between the first and second stress interface regions; forming a buried implant region between the first and second stress interface regions; and annealing the wafer to transform the implant layer into an isolation region.
Claim 12
Dependent Claim
18 words
The method of claim 8, further comprising the step of polishing the wafer surface using a CMP process.
Claim 13
Dependent Claim
23 words
The method of claim 8, further comprising the step of fabricating at least one SOI device in an area over the isolation region.
Claim 14
Dependent Claim
23 words
The method of claim 10, further comprising the step of fabricating at least one non-SOI device outside the area over the isolation region.
Claim 15
Dependent Claim
37 words
The method of claim 8, further comprising the steps of: fabricating at least one SOI device in an area over the isolation region; and fabricating at least one non-SOI device outside the area over the isolation region.
Claim 16
Dependent Claim
38 words
The method of claim 8, wherein the steps of identifying a first stress interface region and a second stress interface region in the wafer substrate comprises the step of identifying two different locations on a single wafer feature.
Claim 17
Independent Claim
168 words
A method for fabricating a single wafer with a co-planar wafer surface with both SOI and non-SOI devices on the wafer, the method comprising the steps of. forming a first stress interface region in a wafer substrate; forming a second stress interface region in the wafer substrate; masking an area of the wafer substrate outside the first and second stress interface regions; etching away a portion of the wafer substrate located between the first and second stress interface regions; depositing an etch-stop material over the wafer substrate; forming an ion-implant mask on the etch-stop material, wherein the mask does not cover the etch-stop material located between the first and second stress interface regions; forming a buried implant region between the first and second stress interface regions; annealing the wafer to transform the buried implant region into an isolation region; polishing the wafer surface using a CMP process; fabricating SOI devices in an area over the isolation region; and fabricating non-SOI devices outside the area over the isolation region.
Claim 18
Independent Claim
168 words
A method for fabricating a single wafer with a co-planar wafer surface with both SOI and non-SOI devices on the wafer, the method comprising the steps of. forming a first stress interface region in a wafer substrate; forming a second stress interface region in the wafer substrate; masking an area of the wafer substrate outside the first and second stress interface regions; etching away a portion of the wafer substrate located between the first and second stress interface regions; depositing an etch-stop material over the wafer substrate; forming an ion-implant mask on the etch-stop material, wherein the mask does not cover the etch-stop material located between the first and second stress interface regions; forming a buried implant region between the first and second stress interface regions; annealing the wafer to transform the buried implant region into an isolation region; polishing the wafer surface using a CMP process; fabricating SOI devices in an area over the isolation region; and fabricating non-SOI devices outside the area over the isolation region.
Claim 19
Dependent Claim
27 words
The method of claim 14, wherein the steps of forming a first stress interface and forming a second stress interface region are performed at the same time.
Claim 20
Dependent Claim
38 words
The method of claim 14, wherein the steps of forming a first stress interface and forming a second stress interface region comprise the steps of: creating a trench in the wafer; and filling the trench with an oxide.
Claim 21
Dependent Claim
36 words
The method of claim 14, wherein the steps of forming a first stress interface and forming a second stress interface region further comprise the step of combining boron with the oxide used to fill the trench.
Claim 22
Dependent Claim
36 words
The method of claim 14, wherein the steps of forming a first stress interface and forming a second stress interface region further comprise the step of combining phosphorous with the oxide used to fill the trench.
Claim 23
Dependent Claim
34 words
The method of claim 14, wherein the steps of forming a first stress interface region and a second stress interface region in the wafer substrate comprises the step of forming a single wafer feature.
Claim 24
Independent Claim
83 words
A method of making a dual wafer comprising the steps of: forming a pair of STI regions in a wafer substrate; depositing a layer of etch-stop over the substrate and the STI regions; forming a mask on the etch-stop terminating over the STI regions wherein there is substantially no mask on the etch-stop between the STI regions; implanting into the substrate between the STI regions including forming an implant layer; and annealing the wafer to transform the implant layer into an isolation layer.
Claim 25
Independent Claim
83 words
A method of making a dual wafer comprising the steps of: forming a pair of STI regions in a wafer substrate; depositing a layer of etch-stop over the substrate and the STI regions; forming a mask on the etch-stop terminating over the STI regions wherein there is substantially no mask on the etch-stop between the STI regions; implanting into the substrate between the STI regions including forming an implant layer; and annealing the wafer to transform the implant layer into an isolation layer.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-20 | 2003-03-22 | 2003-09-21 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-20 | 2007-03-22 | 2007-09-21 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-20 | 2011-03-22 | 2011-09-21 | $7700.00 | Window Closed / Lapsed |