US5951775A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Apparatus for full wafer deposition
Assignee: Applied Materials Inc
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Filing: 1995-06-02
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Granted: 1999-09-14
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Expires: 2015-06-02
Abstract
Abstract A readily removable deposition shield for processing chambers such as chemical vapor deposition (CVD), ion implantation, or physical vapor deposition (PVD) or sputtering chambers, is disclosed. The deposition shield includes a shield of cylindrical configuration (or other configuration conformed to the internal shape of the substrate and the chamber) which is mounted to the chamber for easy removal, such as by screws, and defines a space along the periphery of the substrate support. A shield ring is inserted into the peripheral space and is thus mounted in removable fashion and is automatically centered about the substrate. The shield ring overlaps the cylindrical shield and the substrate support. Collectively, these components prevent deposition on the chamber and hardware outside the processing region. Also, the cylindrical shield and the shield ring may be removed as a unit. Locating means such as pins may be mounted or formed in the support about the periphery of the substrate for centering the substrate. Also, a peripheral groove may be formed in the substrate support peripheral to the substrate, for preventing material deposited on the support peripheral to the substrate from sticking to the substrate. The substrate is supported on spacers mounted on the substrate support; the resulting gap between the substrate and the support also prevents the material deposited on the support from bonding to the substrate. The result of the various features is an effective shield which allows long intervals before the shield must be removed for cleaning or replacement and which is easy to remove when necessary. In addition, the entire upper surface of the substrate is available for processing.
Inventors
- 👤 Avi Tepman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:28
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4585; C23C14/00; C23C14/22; C23C14/50; C23C14/56; C23C14/564; C23C16/4401
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
136 words
A deposition chamber shield arrangement for limiting the deposition of deposition materials on internal chamber components during the processing of a substrate in the deposition chamber, comprising: a shield member extending circumferentially around the substrate to prevent deposition on the deposition chamber regions shielded by said shield member during processing of the substrate in the deposition chamber; and a shield ring extending from the shield member terminating adjacent the edge of the substrate, said shield ring contacting an edge region of a substrate support member located adjacent to the periphery of the substrate to prevent the passage of deposition materials past the edge of the substrate support member; wherein the substrate support member further comprises a channel extending along the periphery of the substrate and a plurality of pins mounted at spaced locations along the channel.
Claim 2
Dependent Claim
136 words
A deposition chamber shield arrangement for limiting the deposition of deposition materials on internal chamber components during the processing of a substrate in the deposition chamber, comprising: a shield member extending circumferentially around the substrate to prevent deposition on the deposition chamber regions shielded by said shield member during processing of the substrate in the deposition chamber; and a shield ring extending from the shield member terminating adjacent the edge of the substrate, said shield ring contacting an edge region of a substrate support member located adjacent to the periphery of the substrate to prevent the passage of deposition materials past the edge of the substrate support member; wherein the substrate support member further comprises a channel extending along the periphery of the substrate and a plurality of pins mounted at spaced locations along the channel.
Claim 3
Dependent Claim
49 words
The shield arrangement of claim 1, wherein the substrate is positioned in the deposition chamber by the substrate support member, and said substrate support member is positionable in the deposition chamber to position the substrate adjacent said shield ring during the formation of a deposition layer on the substrate.
Claim 4
Dependent Claim
36 words
The shield arrangement of claim 2, wherein at least a portion of said support member extends between the edge of the substrate and the shield ring during the formation of a deposition layer on the substrate.
Claim 5
Dependent Claim
22 words
The shield arrangement of claim 2, wherein said shield ring includes a roof portion extending over a portion of said support member.
Claim 6
Dependent Claim
24 words
The shield arrangement of claim 2, wherein said shield member includes a flange thereon, and said shield ring is releasably received on said flange.
Claim 7
Dependent Claim
31 words
The shield arrangement of claim 2, wherein said shield ring includes an alignment member thereon engageable with said support member to align said shield ring with respect to said support member.
Claim 8
Dependent Claim
36 words
The shield arrangement of claim 6, wherein said support member includes a substrate alignment member to position the substrate in a desired position on said support member as the substrate is received on said support member.
Claim 9
Dependent Claim
174 words
In combination: a chamber having a wall surrounding a processing region; a support for supporting a substrate at a given substrate support position; a wall-like shield surrounding the substrate support position; said shield further comprising a vertical flange adjacent the periphery of the substrate mounting position and spaced a given distance from the edge of the substrate support, and a shield ring including a downward extending flange received by the space between the shield flange and the substrate holder for removable positioning of the shield ring adjacent the periphery of the substrate, the shield ring overlapping the substrate support and the shield; and a spacer mounted on the substrate support to support the substrate with a gap between the substrate and the substrate support, wherein the substrate support further comprises a channel extending along the periphery of the substrate mounting position for allowing deposition on the support peripheral to the substrate without interfering with the positioning of the substrate on the support, and a plurality of pins mounted at spaced locations along the channel.
Claim 10
Dependent Claim
174 words
In combination: a chamber having a wall surrounding a processing region; a support for supporting a substrate at a given substrate support position; a wall-like shield surrounding the substrate support position; said shield further comprising a vertical flange adjacent the periphery of the substrate mounting position and spaced a given distance from the edge of the substrate support, and a shield ring including a downward extending flange received by the space between the shield flange and the substrate holder for removable positioning of the shield ring adjacent the periphery of the substrate, the shield ring overlapping the substrate support and the shield; and a spacer mounted on the substrate support to support the substrate with a gap between the substrate and the substrate support, wherein the substrate support further comprises a channel extending along the periphery of the substrate mounting position for allowing deposition on the support peripheral to the substrate without interfering with the positioning of the substrate on the support, and a plurality of pins mounted at spaced locations along the channel.
Claim 11
Independent Claim
100 words
An apparatus for positioning a substrate within a processing chamber, comprising: a substrate support member disposed within the chamber and positionable within the chamber to receive the substrate thereon and support the substrate in the chamber during processing of the substrate in the chamber; and a substrate positioning member disposed on the support member and positioned to locate the substrate in a desired location on the substrate support member as the substrate is received on the substrate support member, wherein said positioning member includes a plurality of guide pins that extend outwardly from an indentation in the substrate support member.
Claim 12
Independent Claim
100 words
An apparatus for positioning a substrate within a processing chamber, comprising: a substrate support member disposed within the chamber and positionable within the chamber to receive the substrate thereon and support the substrate in the chamber during processing of the substrate in the chamber; and a substrate positioning member disposed on the support member and positioned to locate the substrate in a desired location on the substrate support member as the substrate is received on the substrate support member, wherein said positioning member includes a plurality of guide pins that extend outwardly from an indentation in the substrate support member.
Claim 13
Dependent Claim
24 words
The apparatus of claim 9, wherein said positioning member includes a plurality of alignment bumps extending from the surface of the substrate support member.
Claim 14
Dependent Claim
13 words
The apparatus of claim 10, wherein said alignment bumps include a hemispherical profile.
Claim 15
Independent Claim
108 words
An apparatus for positioning a substrate in a processing chamber to form a deposition layer on a deposition receiving face of the substrate, wherein the substrate includes a perimeter extending circumferentially about the deposition receiving face of the substrate, comprising: a substrate support member disposed within the processing chamber and positionable within the processing chamber to receive the substrate thereon; said substrate support member including a channel in the substrate support member along the perimeter of the substrate when the substrate is received on said substrate support member, said channel terminating inwardly of the substrate edge and extending partially under the substrate at the perimeter of the substrate.
Claim 16
Independent Claim
108 words
An apparatus for positioning a substrate in a processing chamber to form a deposition layer on a deposition receiving face of the substrate, wherein the substrate includes a perimeter extending circumferentially about the deposition receiving face of the substrate, comprising: a substrate support member disposed within the processing chamber and positionable within the processing chamber to receive the substrate thereon; said substrate support member including a channel in the substrate support member along the perimeter of the substrate when the substrate is received on said substrate support member, said channel terminating inwardly of the substrate edge and extending partially under the substrate at the perimeter of the substrate.
Claim 17
Dependent Claim
20 words
The apparatus of claim 12, wherein said channel extends circumferentially in said support member adjacent the perimeter of the substrate.
Claim 18
Dependent Claim
23 words
The apparatus of claim 12, wherein said channel provides a space between the substrate perimeter and adjacent portions of said substrate support member.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-09-13 | 2003-03-15 | 2003-09-14 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-09-13 | 2007-03-15 | 2007-09-14 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-09-13 | 2011-03-15 | 2011-09-14 | $7700.00 | Window Closed / Lapsed |