US5948928A
Expired / Lapsed
US
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Mono, di- and trifluoroacetate substituted silanes
Assignee: Advanced Technology Materials Inc
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Filing: 1996-12-05
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Granted: 1999-09-07
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Expires: 2016-12-05
Abstract
Abstract Silane compounds are described having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 1, 2 or 3; b is 1 or 2; c is 0, 1 or 2; and wherein a+b+c equals 4. Methods of making and using these silane compounds in integrated circuit fabrication processes also are described.
Inventors
- 👤 Frederick H. Siegele
- 👤 Scott L. Battle
- 👤 Joel J. Kampa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 23:42
CPC Classifications
C; C07; C07F; C07F7/00; C07F7/02; C07F7/025
Claims Analysis
Total Claims: 38
Claim 1
Independent Claim
77 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 1,2 or 3; b is 1 or 2; c is 0, 1 or 2; and wherein a+b+c equals 4 with the proviso that when a is 3 at least one R 1 is other than ethyl.
Claim 2
Dependent Claim
77 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 1,2 or 3; b is 1 or 2; c is 0, 1 or 2; and wherein a+b+c equals 4 with the proviso that when a is 3 at least one R 1 is other than ethyl.
Claim 3
Dependent Claim
19 words
A compound of claim 1 wherein R 1 is methyl, ethyl, vinyl, propyl, butyl, pentyl, hexyl, cyclohexyl or phenyl.
Claim 4
Dependent Claim
14 words
A compound of claim 1 wherein R 1 is methyl, ethyl, vinyl or propyl.
Claim 5
Dependent Claim
10 words
A compound of claim 1 wherein R 1 is ethyl.
Claim 6
Dependent Claim
49 words
A compound having the formula: Si(OR.sup.1).sub.2 (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 2; b is 1; and c is 1.
Claim 7
Dependent Claim
49 words
A compound having the formula: Si(OR.sup.1).sub.2 (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 2; b is 1; and c is 1.
Claim 8
Dependent Claim
14 words
A compound of claim 5 wherein R 1 is methyl, ethyl, vinyl or propyl.
Claim 9
Dependent Claim
10 words
A compound of claim 1 wherein R 1 is ethyl.
Claim 10
Dependent Claim
335 words
A compound selected from the group consisting of Si(OMe) 3 (O 2 CCF 3 ), Si(OMe) 3 (O 2 CCHF 2 ), Si(OMe) 3 (O 2 CCH 2 F), Si(OMe) 2 (O 2 CCF 3 ) 2 , Si(OMe) 2 (O 2 CCHF 2 ) 2 , Si(OMe) 2 (O 2 CCH 2 F) 2 , Si(OMe)(O 2 CCF 3 ) 2 F, Si(OMe)(O 2 CCHF 2 ) 2 F, Si(OMe)(O 2 CCH 2 F) 2 F, Si(OMe) 2 (O 2 CCF 3 )F, Si(OMe) 2 (O 2 CCHF 2 )F, Si(OMe) 2 (O 2 CCH 2 F)F, Si(OMe)(O 2 CCF 3 )F 2 , Si(OMe)(O 2 CCHF 2 )F 2 , Si(OMe)(O 2 CCH 2 F)F 2 , Si(OEt) 3 (O 2 CCHF 2 ), Si(OEt) 3 (O 2 CCH 2 F), Si(OEt) 2 (O 2 CCF 3 ) 2 , Si(OEt) 2 (O 2 CCHF 2 ) 2 , Si(OEt) 2 (O 2 CCH 2 F) 2 , Si(OEt) 2 (O 2 CCF 3 )F, Si(OEt) 2 (O 2 CCHF 2 )F, Si(OEt) 2 (O 2 CCH 2 F)F, Si(OEt)(O 2 CCF 3 ) 2 F, Si(OEt)(O 2 CCHF 2 ) 2 F, Si(OEt)(O 2 CCH 2 F) 2 F, Si(OEt)(O 2 CCF 3 )F 2 , Si(OEt)(O 2 CCHF 2 )F 2 , Si(OEt)(O 2 CCH 2 F)F 2 , Si(OPr) 3 (O 2 CCF 3 ), Si(OPr) 3 (O 2 CCHF 2 ), Si(OPr) 3 (O 2 CCH 2 F), Si(OPr) 2 (O 2 CCF 3 ) 2 , Si(OPr) 2 (O 2 CCHF 2 ) 2 , Si(OPr) 2 (O 2 CCH 2 F) 2 , Si(OPr) 2 (O 2 CCF 3 )F, Si(OPr) 2 (O 2 CCHF 2 )F, Si(OPr) 2 (O 2 CCH 2 F)F, Si(OPr)(O 2 CCF 3 ) 2 F, Si(OPr)(O 2 CCHF 2 ) 2 F, Si(OPr)(O 2 CCH 2 F) 2 F, Si(OPr)(O 2 CCF 3 )F 2 , Si(OPr)(O 2 CCHF 2 )F 2 , and Si(OPr)(O 2 CCH 2 F)F 2 .
Claim 11
Dependent Claim
335 words
A compound selected from the group consisting of Si(OMe) 3 (O 2 CCF 3 ), Si(OMe) 3 (O 2 CCHF 2 ), Si(OMe) 3 (O 2 CCH 2 F), Si(OMe) 2 (O 2 CCF 3 ) 2 , Si(OMe) 2 (O 2 CCHF 2 ) 2 , Si(OMe) 2 (O 2 CCH 2 F) 2 , Si(OMe)(O 2 CCF 3 ) 2 F, Si(OMe)(O 2 CCHF 2 ) 2 F, Si(OMe)(O 2 CCH 2 F) 2 F, Si(OMe) 2 (O 2 CCF 3 )F, Si(OMe) 2 (O 2 CCHF 2 )F, Si(OMe) 2 (O 2 CCH 2 F)F, Si(OMe)(O 2 CCF 3 )F 2 , Si(OMe)(O 2 CCHF 2 )F 2 , Si(OMe)(O 2 CCH 2 F)F 2 , Si(OEt) 3 (O 2 CCHF 2 ), Si(OEt) 3 (O 2 CCH 2 F), Si(OEt) 2 (O 2 CCF 3 ) 2 , Si(OEt) 2 (O 2 CCHF 2 ) 2 , Si(OEt) 2 (O 2 CCH 2 F) 2 , Si(OEt) 2 (O 2 CCF 3 )F, Si(OEt) 2 (O 2 CCHF 2 )F, Si(OEt) 2 (O 2 CCH 2 F)F, Si(OEt)(O 2 CCF 3 ) 2 F, Si(OEt)(O 2 CCHF 2 ) 2 F, Si(OEt)(O 2 CCH 2 F) 2 F, Si(OEt)(O 2 CCF 3 )F 2 , Si(OEt)(O 2 CCHF 2 )F 2 , Si(OEt)(O 2 CCH 2 F)F 2 , Si(OPr) 3 (O 2 CCF 3 ), Si(OPr) 3 (O 2 CCHF 2 ), Si(OPr) 3 (O 2 CCH 2 F), Si(OPr) 2 (O 2 CCF 3 ) 2 , Si(OPr) 2 (O 2 CCHF 2 ) 2 , Si(OPr) 2 (O 2 CCH 2 F) 2 , Si(OPr) 2 (O 2 CCF 3 )F, Si(OPr) 2 (O 2 CCHF 2 )F, Si(OPr) 2 (O 2 CCH 2 F)F, Si(OPr)(O 2 CCF 3 ) 2 F, Si(OPr)(O 2 CCHF 2 ) 2 F, Si(OPr)(O 2 CCH 2 F) 2 F, Si(OPr)(O 2 CCF 3 )F 2 , Si(OPr)(O 2 CCHF 2 )F 2 , and Si(OPr)(O 2 CCH 2 F)F 2 .
Claim 12
Dependent Claim
60 words
A compound selected from the group consisting of, Si(OEt) 2 (O 2 CCF 3 ) 2 , Si(OEt) 3 (O 2 CCH 2 F), Si(OEt) 3 (O 2 CCHF 2 ), Si(OEt) 2 (O 2 CCHF) 2 , Si(OEt) 2 (O 2 CCF 3 )F, Si(OEt) 2 (O 2 CCH 2 F)F and Si(OEt) 2 (O 2 CCHF 2 )F.
Claim 13
Dependent Claim
60 words
A compound selected from the group consisting of, Si(OEt) 2 (O 2 CCF 3 ) 2 , Si(OEt) 3 (O 2 CCH 2 F), Si(OEt) 3 (O 2 CCHF 2 ), Si(OEt) 2 (O 2 CCHF) 2 , Si(OEt) 2 (O 2 CCF 3 )F, Si(OEt) 2 (O 2 CCH 2 F)F and Si(OEt) 2 (O 2 CCHF 2 )F.
Claim 14
Dependent Claim
17 words
A compound of claim 1 wherein R 1 is ethyl and R 2 is --CF 3 .
Claim 15
Dependent Claim
13 words
A compound of claim 10 wherein a is 2 and b is 1.
Claim 16
Dependent Claim
13 words
A compound of claim 10 wherein a is 1 and b is 2.
Claim 17
Independent Claim
134 words
A method of synthesizing a mono-, di- or trifluoroacetate substituted silane, comprising the step of: contacting a first compound with a second compound, wherein the first compound has a formula: Si(OR.sup.1).sub.a X.sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; X is hydrogen or a halogen other than fluorine; a is 1, 2, 3 or 4; b is 0 or 1; c is 0, 1 or 2; and wherein a+b+c equals 4; and the second compound has a formula selected from the group consisting of: R.sup.2 C(O)!.sub.2 O and R.sup.2 C(O)OM wherein: R 2 is --CH 2 F, --CHF 2 or --CF 3 ; and M is H or a metal ion selected from the group consisting of alkali and alkaline earth metals.
Claim 18
Independent Claim
134 words
A method of synthesizing a mono-, di- or trifluoroacetate substituted silane, comprising the step of: contacting a first compound with a second compound, wherein the first compound has a formula: Si(OR.sup.1).sub.a X.sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; X is hydrogen or a halogen other than fluorine; a is 1, 2, 3 or 4; b is 0 or 1; c is 0, 1 or 2; and wherein a+b+c equals 4; and the second compound has a formula selected from the group consisting of: R.sup.2 C(O)!.sub.2 O and R.sup.2 C(O)OM wherein: R 2 is --CH 2 F, --CHF 2 or --CF 3 ; and M is H or a metal ion selected from the group consisting of alkali and alkaline earth metals.
Claim 19
Dependent Claim
19 words
A method of claim 13 wherein R 1 is methyl, ethyl, vinyl, propyl, butyl, pentyl, hexyl, cyclohexyl or phenyl.
Claim 20
Dependent Claim
14 words
A method of claim 13 wherein R 1 is methyl, ethyl, vinyl or propyl.
Claim 21
Dependent Claim
10 words
A method of claim 13 wherein R 1 is ethyl.
Claim 22
Dependent Claim
12 words
A method of claim 16 wherein R 2 is --CF 3 .
Claim 23
Dependent Claim
9 words
A method of claim 16 wherein c is 0.
Claim 24
Dependent Claim
12 words
A method of claim 13 wherein the second compound is trifluoroacetic anhydride.
Claim 25
Dependent Claim
11 words
A method of claim 19 wherein the first compound is triethoxyfluorosilane.
Claim 26
Dependent Claim
11 words
A method of claim 19 wherein the first compound is tetraethylorthosilicate.
Claim 27
Dependent Claim
60 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 1, 2 or 3; b is 1 or 2; c is 1 or 2; and where a+b+c equals 4.
Claim 28
Dependent Claim
60 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 1, 2 or 3; b is 1 or 2; c is 1 or 2; and where a+b+c equals 4.
Claim 29
Dependent Claim
60 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 , or --CF 3 , a is 1, 2 or 3; b is 2; c is 0, 1 or 2; and wherein a+b+c equals 4.
Claim 30
Dependent Claim
60 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 , or --CF 3 , a is 1, 2 or 3; b is 2; c is 0, 1 or 2; and wherein a+b+c equals 4.
Claim 31
Dependent Claim
75 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.C wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 1, 2 or 3; b is 1 or 2; c is 0, 1 or 2; and wherein a+b+c equals 4 with the proviso that when b=2, R 2 is other than --CF 3 .
Claim 32
Dependent Claim
75 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.C wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 1, 2 or 3; b is 1 or 2; c is 0, 1 or 2; and wherein a+b+c equals 4 with the proviso that when b=2, R 2 is other than --CF 3 .
Claim 33
Dependent Claim
56 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 2; b is 1; c is 0, 1 or 2; and wherein a+b+c equals 4.
Claim 34
Dependent Claim
56 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 ; a is 2; b is 1; c is 0, 1 or 2; and wherein a+b+c equals 4.
Claim 35
Dependent Claim
56 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c ; wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated. R 2 is --CH 2 F, --CHF 2 or --CF 3 a is 1; b is 2; c is 0, 1 or 2; and wherein a+b+c equals 4.
Claim 36
Dependent Claim
56 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c ; wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated. R 2 is --CH 2 F, --CHF 2 or --CF 3 a is 1; b is 2; c is 0, 1 or 2; and wherein a+b+c equals 4.
Claim 37
Dependent Claim
59 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 a is 1 or 2; b is 1 or 2; c is 0, 1 or 2; and wherein a+b+c equals 4.
Claim 38
Dependent Claim
59 words
A compound having the formula: Si(OR.sup.1).sub.a (O.sub.2 CR.sup.2).sub.b F.sub.c wherein: R 1 is alkyl, alkenyl, alkynyl, aryl or benzylic and is optionally non-fluorinated, partially fluorinated or perfluorinated; R 2 is --CH 2 F, --CHF 2 or --CF 3 a is 1 or 2; b is 1 or 2; c is 0, 1 or 2; and wherein a+b+c equals 4.
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