US5944580A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sensing device and method of leveling a semiconductor wafer
Assignee: SK Hynix Inc
•
Filing: 1997-07-08
•
Granted: 1999-08-31
•
Expires: 2017-07-08
Abstract
Abstract An improved sensing device and method for leveling a semiconductor wafer in a chemical mechanical polishing apparatus, which easily detects the change of pressure from a semiconductor wafer contacting with the polishing surface. The present invention includes a polishing platen having a polishing pad on the upper leveled surface thereof, and fixed to a rotatable platen driving shaft. A carrier is rotatably provided on the upper surface of the polishing platen and holding the semiconductor wafer such that the lower surface of the semiconductor wafer is uniformly contacted with the polishing pad. A pressure detecting sensor senses the pressure applied from the semiconductor wafer on the polishing pad and outputs a corresponding signal.
Inventors
- 👤 Yong-Kwon Kim
- 👤 Jun-Yong Kim
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 23:02
CPC Classifications
H; H10; H10P; H10P52/00; H10P90/00; H10P90/12; H10P90/129; B; B24; B24B; B24B37/00; B24B37/04; B24B49/00; B24B49/16
Claims Analysis
Total Claims: 33
Claim 1
Independent Claim
104 words
A sensing device for a chemical mechanical polishing (CMP) apparatus, comprising: a polishing platen having a polishing pad on an upper level surface thereof, and fixed to a rotatable platen driving shaft; a holding means rotatably provided on the upper surface of the polishing platen for holding a semiconductor wafer such that a lower surface of the semiconductor wafer contacts with the polishing pad; and a sensing means for sensing pressure applied by the semiconductor wafer on the polishing pad and outputting a corresponding signal indicative of whether surfaces of said semiconductor wafer and said polishing pad are leveled with respect to one another.
Claim 2
Dependent Claim
104 words
A sensing device for a chemical mechanical polishing (CMP) apparatus, comprising: a polishing platen having a polishing pad on an upper level surface thereof, and fixed to a rotatable platen driving shaft; a holding means rotatably provided on the upper surface of the polishing platen for holding a semiconductor wafer such that a lower surface of the semiconductor wafer contacts with the polishing pad; and a sensing means for sensing pressure applied by the semiconductor wafer on the polishing pad and outputting a corresponding signal indicative of whether surfaces of said semiconductor wafer and said polishing pad are leveled with respect to one another.
Claim 3
Dependent Claim
53 words
The leveling sensing device of claim 1, wherein said sensing means includes a plurality of recesses formed in a concentric circle in the upper leveled surface of the polishing platen, and in each of the plurality of recesses is provided a pressure detecting sensor is provided in each of said plurality of recesses.
Claim 4
Dependent Claim
25 words
The leveling sensing device of claim 2, wherein a center of the semiconductor wafer is positioned over the pressure detecting sensor of the polishing platen.
Claim 5
Dependent Claim
53 words
The leveling sensing device of claim 1, wherein said holding means includes a carrier head for holding the semiconductor wafer and having a lower surface; and said sensing means includes a plurality of recesses formed on the lower surface of said carrier head with a pressure detecting sensor being disposed in each recess.
Claim 6
Dependent Claim
36 words
The leveling sensing device of claim 4, wherein the recesses are formed at a center of the lower surface of the carrier head and positioned in a concentric circle from the center of the carrier head.
Claim 7
Dependent Claim
81 words
A leveling sensing method for a CMP apparatus for a semiconductor wafer, comprising: contacting a semiconductor wafer held by a holding unit on an upper horizontal surface of a polishing platen, which is covered by a polishing pad; supplying a slurry on the polishing platen and simultaneously rotating the polishing platen and the holding unit; and sensing a change of the pressure applied from the semiconductor wafer on the polishing pad and outputting a signal in accordance with the sensed pressure.
Claim 8
Dependent Claim
81 words
A leveling sensing method for a CMP apparatus for a semiconductor wafer, comprising: contacting a semiconductor wafer held by a holding unit on an upper horizontal surface of a polishing platen, which is covered by a polishing pad; supplying a slurry on the polishing platen and simultaneously rotating the polishing platen and the holding unit; and sensing a change of the pressure applied from the semiconductor wafer on the polishing pad and outputting a signal in accordance with the sensed pressure.
Claim 9
Independent Claim
93 words
A device for detecting a pressure applied by a semiconductor on a polishing pad and a semiconductor wafer in a polishing apparatus used for planarizing the surface of the semiconductor wafer, comprising: a polishing platen, the polishing pad being placed on said polishing platen; a plurality of recesses formed in a surface of said polishing platen facing the polishing pad; and a plurality of sensors, corresponding sensors being placed in corresponding recesses and each sensor generating a signal indicative of the pressure between contacting surfaces of the semiconductor wafer and the polishing pad.
Claim 10
Independent Claim
93 words
A device for detecting a pressure applied by a semiconductor on a polishing pad and a semiconductor wafer in a polishing apparatus used for planarizing the surface of the semiconductor wafer, comprising: a polishing platen, the polishing pad being placed on said polishing platen; a plurality of recesses formed in a surface of said polishing platen facing the polishing pad; and a plurality of sensors, corresponding sensors being placed in corresponding recesses and each sensor generating a signal indicative of the pressure between contacting surfaces of the semiconductor wafer and the polishing pad.
Claim 11
Dependent Claim
33 words
The device of claim 7, wherein the signal indicative of the pressure indicates whether surfaces of the semiconductor wafer and polishing pad are leveled with respect to each other in a prescribed alignment.
Claim 12
Dependent Claim
13 words
The device of claim 8, wherein the prescribed alignment is a horizontal alignment.
Claim 13
Dependent Claim
20 words
The device of claim 8, wherein said plurality of recesses are placed in a circular arrangement in said polishing platen.
Claim 14
Dependent Claim
24 words
The device of claim 10, wherein each recess is aligned with a central axis of the semiconductor wafer as the polishing platen is rotated.
Claim 15
Dependent Claim
22 words
The device of claim 11, wherein a central axis of each recess is aligned with the central axis of the semiconductor wafer.
Claim 16
Independent Claim
123 words
A device for detecting a pressure applied by a semiconductor on a polishing pad and a semiconductor wafer in a polishing apparatus used for planarizing the surface of the semiconductor wafer, comprising: a carrier for retaining the semiconductor wafer; a plurality of recesses in a surface of said carrier, which faces a surface of the semiconductor wafer being retained by said carrier; and a plurality of sensors, corresponding sensors being placed in corresponding recesses and each sensor generating a signal indicative of the pressure between contacting surfaces of the semiconductor wafer and the polishing pad, wherein the signal indicative of the pressure indicates whether surfaces of the semiconductor wafer and polishing pad are leveled with respect to each other in a prescribed alignment.
Claim 17
Independent Claim
123 words
A device for detecting a pressure applied by a semiconductor on a polishing pad and a semiconductor wafer in a polishing apparatus used for planarizing the surface of the semiconductor wafer, comprising: a carrier for retaining the semiconductor wafer; a plurality of recesses in a surface of said carrier, which faces a surface of the semiconductor wafer being retained by said carrier; and a plurality of sensors, corresponding sensors being placed in corresponding recesses and each sensor generating a signal indicative of the pressure between contacting surfaces of the semiconductor wafer and the polishing pad, wherein the signal indicative of the pressure indicates whether surfaces of the semiconductor wafer and polishing pad are leveled with respect to each other in a prescribed alignment.
Claim 18
Dependent Claim
13 words
The device of claim 13, wherein the prescribed alignment is a horizontal alignment.
Claim 19
Dependent Claim
19 words
The device of claim 13, wherein said plurality of recesses are placed in a circular arrangement in said carrier.
Claim 20
Dependent Claim
29 words
The device of claim 10, wherein said plurality of recesses includes a recess located in a central location from said recesses placed in a circular arrangement of said carrier.
Claim 21
Independent Claim
115 words
An apparatus for planarizing a first surface of a semiconductor wafer, comprising: a polishing platen; a polishing pad on a said polishing platen; means for applying slurry onto the polishing pad; means for holding the semiconductor wafer such that the first surface is in contact with the polishing pad during planarization; and means for sensing pressure between the first surface of the semiconductor wafer and a second surface of the polishing pad in contact with the first surface and outputting a signal indicative of whether the first and second surfaces are leveled with respect to each other, wherein said sensing means is located in at least one of said polishing platen and said holding means.
Claim 22
Independent Claim
115 words
An apparatus for planarizing a first surface of a semiconductor wafer, comprising: a polishing platen; a polishing pad on a said polishing platen; means for applying slurry onto the polishing pad; means for holding the semiconductor wafer such that the first surface is in contact with the polishing pad during planarization; and means for sensing pressure between the first surface of the semiconductor wafer and a second surface of the polishing pad in contact with the first surface and outputting a signal indicative of whether the first and second surfaces are leveled with respect to each other, wherein said sensing means is located in at least one of said polishing platen and said holding means.
Claim 23
Dependent Claim
19 words
The apparatus of claim 17, further comprising a first shaft for driving said polishing platen in a rotational direction.
Claim 24
Dependent Claim
18 words
The apparatus of claim 17, wherein said holding means includes a carrier head to retain the semiconductor wafer.
Claim 25
Dependent Claim
57 words
The apparatus of claim 19, wherein said holding means further comprises a motor; a second shaft coupling the motor to said carrier head; a support shaft coupled to the second shaft; and a third shaft coupled to the support shaft for allowing movement of the carrier head in a direction perpendicular to the first and second surfaces.
Claim 26
Dependent Claim
63 words
The apparatus of claim 19, wherein said sensing means comprises: a plurality of recesses formed in surface of said carrier head which faces the semiconductor wafer; and a plurality of sensors, corresponding sensors being placed in corresponding recesses and each sensor generating a signal indicative of the pressure between the first and second surfaces of the semiconductor wafer and the polishing pad, respectively.
Claim 27
Dependent Claim
19 words
The apparatus of claim 21, wherein said plurality of recesses are placed in a circular arrangement in said carrier.
Claim 28
Dependent Claim
29 words
The apparatus of claim 22, wherein said plurality of recesses includes a recess located in a central location from said recesses placed in the circular arrangement of said carrier.
Claim 29
Dependent Claim
63 words
The apparatus of claim 19, wherein said sensing means comprises: a plurality of recess formed in a surface of said polishing platen facing the polishing pad; and a plurality of sensors, corresponding sensors being placed in corresponding recesses and each sensor generating a signal indicative of the pressure between the first and second surfaces of the semiconductor wafer and the polishing pad, respectively.
Claim 30
Dependent Claim
20 words
The apparatus of claim 24, wherein said plurality of recesses are placed in a circular arrangement in said polishing platen.
Claim 31
Dependent Claim
24 words
The apparatus of claim 25, wherein each recess is aligned with a central axis of the semiconductor wafer as the polishing platen is rotated.
Claim 32
Dependent Claim
22 words
The apparatus of claim 11, wherein a central axis of each recess is aligned with the central axis of the semiconductor wafer.
Claim 33
Dependent Claim
71 words
The apparatus of claim 17 further comprising: a pivoting mechanism that pivots said polishing platen in at least one of X, Y and Z direction; a motor that enables said pivoting mechanism to move said polishing platen in at least one of X, Y and Z direction; and a detector coupled to said pressure sensing means to detect a signal; and a microprocessor activating said motor based on the detected signal.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-08-30 | 2003-03-01 | 2003-08-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-08-30 | 2007-03-01 | 2007-08-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-08-30 | 2011-03-01 | 2011-08-31 | $7700.00 | Window Closed / Lapsed |