Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
179 words
A three-level infrared bolometer, the bolometer comprising: an active matrix level, the active matrix level including a substrate and at least a pair of connecting terminals, wherein the pair of connecting terminals are formed on top of the substrate; a support level provided with at least a pair of bridges, each of the bridges including an conduction line, one end of the conduction line being electrically connected to the respective connecting terminal; an absorption level, the absorption level including an absorber, a bolometer element surrounded by the absorber, a thin film on top of the absorber, and an infrared absorber coating formed on top of the thin film, the infrared absorber coating having multipores therein and a rough top surface; and at least a pair of posts, each of the posts being placed between the absorption level and the support level and including an electrical conduit surrounded by an insulating material, each end of the bolometer element of the absorption level being electrically connected to the respective connecting terminal through the respective electrical conduit and the respective conduction line.
Claim 2
Dependent Claim
179 words
A three-level infrared bolometer, the bolometer comprising: an active matrix level, the active matrix level including a substrate and at least a pair of connecting terminals, wherein the pair of connecting terminals are formed on top of the substrate; a support level provided with at least a pair of bridges, each of the bridges including an conduction line, one end of the conduction line being electrically connected to the respective connecting terminal; an absorption level, the absorption level including an absorber, a bolometer element surrounded by the absorber, a thin film on top of the absorber, and an infrared absorber coating formed on top of the thin film, the infrared absorber coating having multipores therein and a rough top surface; and at least a pair of posts, each of the posts being placed between the absorption level and the support level and including an electrical conduit surrounded by an insulating material, each end of the bolometer element of the absorption level being electrically connected to the respective connecting terminal through the respective electrical conduit and the respective conduction line.
Claim 3
Dependent Claim
28 words
The bolometer of claim 1, wherein the thin film is made of titanium and the infrared absorber coating is made of silicon oxy-nitride (SiO X N Y ).
Claim 4
Dependent Claim
45 words
The bolometer of claim 1, wherein each of the bridges is provided with an anchor portion, a leg portion and an elevated portion, the anchor portion including a via hole through which one end of the conduction line is electrically connected to the connecting terminal.
Claim 5
Dependent Claim
16 words
The bolometer of claim 1, wherein the conduction line is positioned on top of the bridges.
Claim 6
Dependent Claim
39 words
The bolometer of claim 1, wherein top end of the electrical conduit is electrically connected to one end of the bolometer element and bottom end of the electrical conduit is electrically connected to other end of the conduction line.
Claim 7
Dependent Claim
22 words
The bolometer of claim 1, wherein the conduction line, the electrical conduit and the bolometer element are made of the same metal.
Claim 8
Dependent Claim
20 words
The bolometer of claim 6, wherein the conduction line, the electrical conduit and the bolometer element are made of titanium.