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US5929979A Expired / Lapsed US ⏱️ 0.0 years remaining

Scanning exposure device

Assignee: Fujifilm Holdings Corp
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Filing: 1997-11-25
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Granted: 1999-07-27
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Expires: 2017-11-25
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Abstract

Abstract Scanning exposure for three pigments by three optical beams is carried out during a single main scanning. An angle of incidence and an angle between respective light beams are determined so as to prevent overlapping of scanning exposure. As a result, a single modulator can be used in modulating light beams. With respect to maximum swing angle of light beam by a flat mirror of a deflecting device, a image can be recorded (scanning exposure) on a sensitive material by a swing angle of about +E,fra 1/5+EE by allocating swing width with respect to the center. Thus, a deviation of position of a focusing point and change in speed can be suppressed so that focusing, concentration and the like can be included within an allowable range.

Inventors

  • 👤 Yoshiharu Okino
  • 👤 Atsushi Uejima

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 15:33
CPC Classifications
G; G02; G02B; G02B26/00; G02B26/08; G02B26/10; G02B26/12; G02B26/123; H; H04; H04N; H04N1/00; H04N1/04; H04N1/113; H04N1/1135; H04N1/46; H04N1/50; H04N1/502; H04N1/12; H04N1/121

Claims Analysis

Total Claims: 25
Claim 1
Independent Claim 96 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle not greater than 33°, and wherein said light reflected does not pass through any optical elements between the flat deflecting device and the exposure surface.
Claim 2
Dependent Claim 96 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle not greater than 33°, and wherein said light reflected does not pass through any optical elements between the flat deflecting device and the exposure surface.
Claim 3
Dependent Claim 96 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle not greater than 17°, and wherein said light reflected does not pass through any optical elements between the flat deflecting device and the exposure surface.
Claim 4
Dependent Claim 96 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle not greater than 17°, and wherein said light reflected does not pass through any optical elements between the flat deflecting device and the exposure surface.
Claim 5
Dependent Claim 83 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an exposure plane exists between a beam waist position in which and image height is zero and a beam waist position in which the image height is maximal.
Claim 6
Dependent Claim 83 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an exposure plane exists between a beam waist position in which and image height is zero and a beam waist position in which the image height is maximal.
Claim 7
Dependent Claim 132 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle, and satisfies the expression: cos 2 θ+(2λL(1-cos θ)/(πω 0 2 )) 2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 8
Dependent Claim 132 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle, and satisfies the expression: cos 2 θ+(2λL(1-cos θ)/(πω 0 2 )) 2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 9
Dependent Claim 130 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle θ, and θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <2.25, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 10
Dependent Claim 130 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle θ, and θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <2.25, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 11
Dependent Claim 84 words
A scanning exposure device according to claim 3 wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle θ, and θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 12
Dependent Claim 25 words
A scanning exposure device according to claim 5 wherein the angle subtended by the scanning of the flat deflecting device is not greater than 17°.
Claim 13
Dependent Claim 82 words
A scanning exposure device according to claim 3 wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle, and satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <2.25 where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 14
Dependent Claim 25 words
A scanning exposure device according to claim 8 wherein the angle subtended by the scanning of the flat deflecting device is not greater than 33°.
Claim 15
Dependent Claim 46 words
A scanning exposure device according to claim 1 further comprising: a plurality of focusing elements between a plurality of light sources and the flat deflecting device, and a plurality of light beams having different wavelengths are transmitted upon said deflecting device at different angles of incidence.
Claim 16
Dependent Claim 93 words
A scanning exposure device according to claim 10 wherein the angle subtended by the scanning of the flat deflecting device, for each of said plurality of light beams, is a scanning swing angle θ, and each θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <2.25, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 17
Dependent Claim 99 words
A scanning exposure device according to claim 10 wherein the angle subtended by the scanning of the flat deflecting device, for each of said plurality of light beams, is a scanning swing angle θ, and each θ is not greater than 17° and satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 18
Dependent Claim 28 words
A scanning exposure device according to claim 10 wherein a difference in a maximum and minimum wavelengths of said plurality of light beams is more than 100 nm.
Claim 19
Dependent Claim 84 words
A scanning exposure device according to claim 10 wherein the angle of incidence to the deflecting device, of each of said plurality of light beams and the angle formed between two of said plurality of light beams are determined so that said plurality of light beams are swept for scanning by means of each of the planes of the flat deflecting device, sequentially on the same exposure plane and each of the light beams is sequentially modulated by a single modulation means during exposure.
Claim 20
Dependent Claim 54 words
A scanning exposure device according to claim 10 wherein optical members having power only in the direction of sensitive material transportation are disposed for said plurality of light beams on a side of the light source relative to the deflecting device and on a side of the exposure surface relative to the deflecting device.
Claim 21
Dependent Claim 45 words
A scanning exposure device according to claim 2 further comprising a plurality of focusing elements between a plurality of light sources and the flat deflecting device, and a plurality of light beams having different incidence angles and different wavelengths are transmitted upon said deflecting device.
Claim 22
Dependent Claim 93 words
A scanning exposure device according to claim 16 wherein the angle subtended by the scanning of the flat deflecting device, for each of said plurality of light beams, is a scanning swing angle θ, and each θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 23
Dependent Claim 82 words
A scanning exposure device according to claim 17 wherein the angle of incidence to the deflecting device, of each of said plurality of light beams and the angle formed between two of said plurality of light beams are determined so that said plurality of light beams are swept for scanning by each of the planes of the flat deflecting device, sequentially on the same exposure plane and each of the light beams is sequentially modulated by a single modulation means during exposure.
Claim 24
Dependent Claim 41 words
A scanning exposure device according to claim 3 further comprising: a plurality of focusing elements between a plurality of light sources and a plurality of light beams having different wavelengths are transmitted upon said deflecting device at different angles of incidence.
Claim 25
Dependent Claim 99 words
A scanning exposure device according to claim 19 wherein the angle subtended by the scanning of the flat deflecting device, for each of said plurality of light beams, is a scanning swing angle θ, and each θ is not greater than 17° and satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.

References Cited (Backward Citations)

US5557446A Cited
US5573894A Cited
US5734489A Cited
US5781325A Cited
US5793515A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 2002-07-26 2003-01-25 2003-07-27 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 2006-07-26 2007-01-25 2007-07-27 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2010-07-26 2011-01-25 2011-07-27 $7700.00 Window Closed / Lapsed

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