Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
96 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle not greater than 33°, and wherein said light reflected does not pass through any optical elements between the flat deflecting device and the exposure surface.
Claim 2
Dependent Claim
96 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle not greater than 33°, and wherein said light reflected does not pass through any optical elements between the flat deflecting device and the exposure surface.
Claim 3
Dependent Claim
96 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle not greater than 17°, and wherein said light reflected does not pass through any optical elements between the flat deflecting device and the exposure surface.
Claim 4
Dependent Claim
96 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle not greater than 17°, and wherein said light reflected does not pass through any optical elements between the flat deflecting device and the exposure surface.
Claim 5
Dependent Claim
83 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an exposure plane exists between a beam waist position in which and image height is zero and a beam waist position in which the image height is maximal.
Claim 6
Dependent Claim
83 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an exposure plane exists between a beam waist position in which and image height is zero and a beam waist position in which the image height is maximal.
Claim 7
Dependent Claim
132 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle, and satisfies the expression: cos 2 θ+(2λL(1-cos θ)/(πω 0 2 )) 2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 8
Dependent Claim
132 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle, and satisfies the expression: cos 2 θ+(2λL(1-cos θ)/(πω 0 2 )) 2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 9
Dependent Claim
130 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle θ, and θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <2.25, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 10
Dependent Claim
130 words
A scanning exposure device having a light source, a flat deflecting device, comprising a rotary mirror having one or a plurality of mirrors, a focusing element, placed between the light source and the flat deflecting device, and an exposure surface, over which the flat deflecting device scans light reflected by the flat deflecting device; wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle θ, and θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <2.25, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 11
Dependent Claim
84 words
A scanning exposure device according to claim 3 wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle θ, and θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 12
Dependent Claim
25 words
A scanning exposure device according to claim 5 wherein the angle subtended by the scanning of the flat deflecting device is not greater than 17°.
Claim 13
Dependent Claim
82 words
A scanning exposure device according to claim 3 wherein an angle subtended by the scanning of the flat deflecting device is a scanning swing angle, and satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <2.25 where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 14
Dependent Claim
25 words
A scanning exposure device according to claim 8 wherein the angle subtended by the scanning of the flat deflecting device is not greater than 33°.
Claim 15
Dependent Claim
46 words
A scanning exposure device according to claim 1 further comprising: a plurality of focusing elements between a plurality of light sources and the flat deflecting device, and a plurality of light beams having different wavelengths are transmitted upon said deflecting device at different angles of incidence.
Claim 16
Dependent Claim
93 words
A scanning exposure device according to claim 10 wherein the angle subtended by the scanning of the flat deflecting device, for each of said plurality of light beams, is a scanning swing angle θ, and each θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <2.25, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 17
Dependent Claim
99 words
A scanning exposure device according to claim 10 wherein the angle subtended by the scanning of the flat deflecting device, for each of said plurality of light beams, is a scanning swing angle θ, and each θ is not greater than 17° and satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 18
Dependent Claim
28 words
A scanning exposure device according to claim 10 wherein a difference in a maximum and minimum wavelengths of said plurality of light beams is more than 100 nm.
Claim 19
Dependent Claim
84 words
A scanning exposure device according to claim 10 wherein the angle of incidence to the deflecting device, of each of said plurality of light beams and the angle formed between two of said plurality of light beams are determined so that said plurality of light beams are swept for scanning by means of each of the planes of the flat deflecting device, sequentially on the same exposure plane and each of the light beams is sequentially modulated by a single modulation means during exposure.
Claim 20
Dependent Claim
54 words
A scanning exposure device according to claim 10 wherein optical members having power only in the direction of sensitive material transportation are disposed for said plurality of light beams on a side of the light source relative to the deflecting device and on a side of the exposure surface relative to the deflecting device.
Claim 21
Dependent Claim
45 words
A scanning exposure device according to claim 2 further comprising a plurality of focusing elements between a plurality of light sources and the flat deflecting device, and a plurality of light beams having different incidence angles and different wavelengths are transmitted upon said deflecting device.
Claim 22
Dependent Claim
93 words
A scanning exposure device according to claim 16 wherein the angle subtended by the scanning of the flat deflecting device, for each of said plurality of light beams, is a scanning swing angle θ, and each θ satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.
Claim 23
Dependent Claim
82 words
A scanning exposure device according to claim 17 wherein the angle of incidence to the deflecting device, of each of said plurality of light beams and the angle formed between two of said plurality of light beams are determined so that said plurality of light beams are swept for scanning by each of the planes of the flat deflecting device, sequentially on the same exposure plane and each of the light beams is sequentially modulated by a single modulation means during exposure.
Claim 24
Dependent Claim
41 words
A scanning exposure device according to claim 3 further comprising: a plurality of focusing elements between a plurality of light sources and a plurality of light beams having different wavelengths are transmitted upon said deflecting device at different angles of incidence.
Claim 25
Dependent Claim
99 words
A scanning exposure device according to claim 19 wherein the angle subtended by the scanning of the flat deflecting device, for each of said plurality of light beams, is a scanning swing angle θ, and each θ is not greater than 17° and satisfies the expression: cos .sup.2 θ+(2λL(1-cos θ)/(πω.sub.0.sup.2)).sup.2 <1.44, where λ is the wavelength of the light beam, ω 0 is a minimum beam diameter within the exposure surface, L is the distance from the point of the deflecting device from which the light beam is reflected, to the center of the scanning of the exposure surface.