US5916716A
Expired / Lapsed
US
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Emulation methodology for critical dimension control in E-Beam lithography
Assignee: International Business Machines Corp
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Filing: 1997-03-13
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Granted: 1999-06-29
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Expires: 2017-03-13
Abstract
Abstract Across chip line width variations and other repetitive deviations from the design pattern desired in E-Beam lithography are compensated for by examining each of the regions (i.e., frames, stripes, etc.) of a patterned substrate, determining the amount of deviation for each region, and using the determined regional deviation as a local bias when patterning subsequent substrates. Thus, the E-Beam lithography tool will utilize both global and local biases in order to produce new patterned substrates which lack the deviations found when local bias was not applied. In this way, the root cause of the deviation does not need to be determined. The local bias can be applied directly by modifying the E-Beam lithography system tool commands to provide for patterning wider or thinner lines or to provide for greater or lesser exposure time. Alternatively, the local bias can be applied by varying the emission current of the electron gun for different regions of the substrate.
Inventors
- 👤 Rainer Butsch
- 👤 Timothy R. Groves
- 👤 John G. Hartley
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:16
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; B; B82; B82Y; B82Y10/00; B82Y40/00; H01J2237/00; H01J2237/30; H01J2237/304; H01J2237/30433; H01J2237/3045; H01J2237/30455; H01J2237/30461; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
175 words
A method for controlling line width variations in electron beam lithography, comprising the steps of: patterning a test substrate in a plurality of regions using tool commands selected for a desired design pattern for each region, said patterning step producing a test pattern on said test substrate; determining horizontal and vertical line width variations of said test pattern for each region; comparing said horizontal and vertical line width variations and said desired design pattern on a region-by-region basis in said plurality of regions on said test substrate in order to determine a local bias for each region, said local bias being a deviation between all desired design patterns and line width variations in each region of said plurality of regions; and adjusting patterning processes based on said local bias in each region determined in said comparing step to include said local bias for each of said regions such that subsequent substrate patterns are adjusted in a manner which compensates for said deviations determined in said comparing step in each region of said plurality of regions.
Claim 2
Independent Claim
175 words
A method for controlling line width variations in electron beam lithography, comprising the steps of: patterning a test substrate in a plurality of regions using tool commands selected for a desired design pattern for each region, said patterning step producing a test pattern on said test substrate; determining horizontal and vertical line width variations of said test pattern for each region; comparing said horizontal and vertical line width variations and said desired design pattern on a region-by-region basis in said plurality of regions on said test substrate in order to determine a local bias for each region, said local bias being a deviation between all desired design patterns and line width variations in each region of said plurality of regions; and adjusting patterning processes based on said local bias in each region determined in said comparing step to include said local bias for each of said regions such that subsequent substrate patterns are adjusted in a manner which compensates for said deviations determined in said comparing step in each region of said plurality of regions.
Claim 3
Dependent Claim
54 words
The method of claim 1 wherein said patterning step includes a global bias based on patterning processes for said desired design pattern, and wherein said adjusting step includes said global bias such that each of said plurality of regions of said subsequent substrates is patterned considering both said global bias and said local bias.
Claim 4
Dependent Claim
55 words
The method of claim 1 further comprising averaging said horizontal and vertical line width deviations for each measured region and wherein said adjusting step uses said average deviation as said local bias for each of said plurality of regions in order to adjust said patterning processes to compensate for image size variation in each region.
Claim 5
Dependent Claim
52 words
The method of claim 1 wherein said assessing step provides both an average x deviation and an average y deviation for each of said plurality of regions, and wherein said adjusting step uses both said average x and average y deviation as a local bias for each of said plurality of regions.
Claim 6
Dependent Claim
43 words
The method of claim 1 wherein said adjusting step includes as said local bias the step of modifying said tool commands selected for said desired design pattern in a manner which alters line width dimensions in selected regions of said plurality of regions.
Claim 7
Dependent Claim
16 words
The method of claim 5 wherein said modifying step enlarges line width dimensions in selected regions.
Claim 8
Dependent Claim
16 words
The method of claim 5 wherein said modifying step reduces line width dimensions in selected regions.
Claim 9
Dependent Claim
42 words
The method of claim 1 wherein said adjusting step includes as said local bias the step of modifying said tool commands selected for said desired design pattern in a manner which alters exposure times for selected regions of said plurality of regions.
Claim 10
Dependent Claim
15 words
The method of claim 8 wherein said modifying step increases exposure times in selected regions.
Claim 11
Dependent Claim
15 words
The method of claim 8 wherein said modifying step decreases exposure times in selected regions.
Claim 12
Dependent Claim
28 words
The method of claim 1 wherein said adjusting step includes as said local bias the step of modifying current density for selected regions of said plurality of regions.
Claim 13
Dependent Claim
22 words
The method of claim 11 wherein said step of modifying current density includes the step of varying an electron grid bias voltage.
Claim 14
Dependent Claim
21 words
The method of claim 12 further comprising the step of adjusting a beam focus based on an electron grid bias voltage.
Claim 15
Dependent Claim
16 words
The method of claim 1 wherein said step of determining is accomplished using a metrology tool.
Claim 16
Dependent Claim
17 words
The method of claim 1 wherein said subsequent substrate is a wafer, X-ray mask or glass mask.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-06-28 | 2002-12-28 | 2003-06-29 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-06-28 | 2006-12-28 | 2007-06-29 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-06-28 | 2010-12-28 | 2011-06-29 | $7700.00 | Window Closed / Lapsed |