Patent US5914150A successfully refreshed from Google Patents.
US5914150A
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US
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Formation of polycarbonate film with apertures determined by etching charged-particle tracks
Assignee: Canon Inc
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Filing: 1997-02-28
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Granted: 1999-06-22
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Expires: 2017-02-28
Abstract
Abstract A technique for creating openings in a polycarbonate film entails providing a liquid chemical formulation that contains polycarbonate material, a liquid that dissolves the polycarbonate, and possibly one or more other constituents. The liquid is typically capable of dissolving the polycarbonate to a concentration of at least 1% at 20 DEG C. and 1 atmosphere. Examples of the liquid include pyridine, a ring-substituted pyridine derivative, pyrrole, a ring-substituted pyrrole derivative, pyrrolidine, a pyrrolidine derivative, chlorobenzene, and cyclohexanone. A liquid film (36A) of the chemical formulation is formed over a substructure (30) and processed to remove the liquid, thereby converting the liquid film into a solid polycarbonate track layer (38). Charged particles (70) are passed through the track layer to form charged-particle tracks (72) at least partway through the layer. Apertures (74) are created through the track layer by a process that entails etching along the tracks. The aperture-containing polycarbonate track layer is typically employed in fabricating a gated electron-emitting device.
Inventors
- 👤 Jack D. Porter
- 👤 Scott J. Crane
- 👤 Stephanie J. Oberg
- 👤 Anthony W. Johnson
- 👤 Christopher J. Spindt
- 👤 John M. MaCaulay
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 18:36
CPC Classifications
C; C08; C08J; C08J3/00; C08J3/02; C08J3/09; C08J3/091; C08J3/096; C08J5/00; C08J5/18; H; H01; H01J; H01J9/00; H01J9/02; H01J9/022; H01J9/025; C08J2369/00; H01J2329/00
Claims Analysis
Total Claims: 41
Claim 1
Independent Claim
130 words
A method comprising the steps of: providing a liquid chemical formulation that comprises: polycarbonate material; and a liquid (a) capable of dissolving the polycarbonate material to a concentration of at least 1% by mass of the formulation at 20° C. and 1 atmosphere and (b) having a boiling point of at least 80° C. at 1 atmosphere; forming a liquid layer of the formulation over a substructure; processing the liquid layer to largely remove the liquid and convert the liquid layer into a solid track layer; causing charged particles to pass into the track layer to form a multiplicity of charged-particle tracks at least partway therethrough; and creating corresponding apertures at least partway through the track layer by a procedure that entails etching the track layer along the charged-particle tracks.
Claim 2
Independent Claim
130 words
A method comprising the steps of: providing a liquid chemical formulation that comprises: polycarbonate material; and a liquid (a) capable of dissolving the polycarbonate material to a concentration of at least 1% by mass of the formulation at 20° C. and 1 atmosphere and (b) having a boiling point of at least 80° C. at 1 atmosphere; forming a liquid layer of the formulation over a substructure; processing the liquid layer to largely remove the liquid and convert the liquid layer into a solid track layer; causing charged particles to pass into the track layer to form a multiplicity of charged-particle tracks at least partway therethrough; and creating corresponding apertures at least partway through the track layer by a procedure that entails etching the track layer along the charged-particle tracks.
Claim 3
Dependent Claim
13 words
A method as in claim 1 wherein the liquid consists largely of pyridine.
Claim 4
Dependent Claim
19 words
A method as in claim 1 wherein the polycarbonate material has a glass transition of at least 65° C.
Claim 5
Dependent Claim
36 words
A method as in claim 1 wherein the boiling point of the liquid is no more than (T g +15° C.) at 0.001 atmosphere, where T g is the glass transition temperature of the polycarbonate material.
Claim 6
Dependent Claim
31 words
A method as in claim 1 wherein the protonated form of the liquid in aqueous solution has an acid dissociation constant greater than 10 -8 at 20° C. and 1 atmosphere.
Claim 7
Dependent Claim
25 words
A method as in claim 1 wherein the formulation has a kinematic viscosity of no more than 100 centistokes at 20° C. and 1 atmosphere.
Claim 8
Dependent Claim
15 words
A method as in claim 1 wherein the apertures extend generally parallel to one another.
Claim 9
Dependent Claim
15 words
A method as in claim 1 wherein the apertures pass substantially through the track layer.
Claim 10
Dependent Claim
22 words
A method as in claim 8 wherein the forming step comprises spin coating at least part of the formulation over the substructure.
Claim 11
Dependent Claim
15 words
A method as in claim 8 wherein the processing step comprises drying the liquid layer.
Claim 12
Dependent Claim
35 words
A method as in claim 8 wherein the processing step includes converting the polycarbonate material from a glass-like microstructure having some short-range molecular ordering to a microstructure having largely no short-range or long-range molecular ordering.
Claim 13
Dependent Claim
36 words
A method as in claim 8 wherein the substructure comprises an electrically non-insulating layer, the method further including the step of etching the non-insulating layer through the apertures to form corresponding openings in the non-insulating layer.
Claim 14
Dependent Claim
24 words
A method as in claim 12 further including the step of defining electron-emissive elements respectively centered approximately on the openings in the non-insulating layer.
Claim 15
Dependent Claim
86 words
A method as in claim 13 wherein (a) the non-insulating layer comprises a gate layer, (b) an electrically insulating layer is provided below the gate layer, and (c) a lower electrically non-insulating emitter region is provided below the insulating layer, the defining step comprising: etching the insulating layer through the openings in the gate layer to form corresponding dielectric open spaces through the insulating layer down to the emitter region; and forming electron-emissive elements in the dielectric open spaces so as to contact the emitter region.
Claim 16
Dependent Claim
19 words
A method as in claim 14 wherein the gate layer serves as an etch mask during the etching step.
Claim 17
Dependent Claim
17 words
A method as in claim 14 wherein the electron-emissive elements are generally in the shape of filaments.
Claim 18
Dependent Claim
13 words
A method as in claim 14 wherein the electron-emissive elements are generally conical.
Claim 19
Dependent Claim
31 words
A method as in claim 1 wherein the liquid comprises at least one of pyridine, a ring-substituted pyridine derivative, pyrrole, a ring-substituted pyrrole derivative, pyrrolidine, a pyrrolidine derivative, chlorobenzene, and cyclohexanone.
Claim 20
Dependent Claim
21 words
A method as in claim 1 wherein the providing step includes drying the polycarbonate material and/or the liquid to remove water.
Claim 21
Dependent Claim
23 words
A method as in claim 1 wherein the providing step comprises combining the liquid and the polycarbonate material in a substantially water-free environment.
Claim 22
Dependent Claim
18 words
A method as in claim 1 wherein the providing step includes providing the liquid formulation with a surfactant.
Claim 23
Dependent Claim
22 words
A method as in claim 1 wherein the providing step includes providing the liquid formulation with an adhesive or an adhesion promoter.
Claim 24
Dependent Claim
15 words
A method as in claim 1 wherein the solid track layer consists largely of polycarbonate.
Claim 25
Independent Claim
115 words
A method comprising the steps of: providing a liquid chemical formulation that comprises (a) polycarbonate material and (b) a liquid comprising at least one of pyridine, a ring-substituted pyridine derivative, pyrrole, a ring-substituted pyrrole derivative, pyrrolidine, a pyrrolidine derivative, chlorobenzene, and cyclohexanone; forming a liquid layer of the formulation over a substructure; processing the liquid layer to largely remove the liquid and convert the liquid layer into a solid track layer; causing charged particles to pass into the track layer to form a multiplicity of charged-particle tracks at least partway therethrough; and creating corresponding apertures at least partway through the track layer by a procedure that entails etching the track layer along the charged-particle tracks.
Claim 26
Independent Claim
115 words
A method comprising the steps of: providing a liquid chemical formulation that comprises (a) polycarbonate material and (b) a liquid comprising at least one of pyridine, a ring-substituted pyridine derivative, pyrrole, a ring-substituted pyrrole derivative, pyrrolidine, a pyrrolidine derivative, chlorobenzene, and cyclohexanone; forming a liquid layer of the formulation over a substructure; processing the liquid layer to largely remove the liquid and convert the liquid layer into a solid track layer; causing charged particles to pass into the track layer to form a multiplicity of charged-particle tracks at least partway therethrough; and creating corresponding apertures at least partway through the track layer by a procedure that entails etching the track layer along the charged-particle tracks.
Claim 27
Dependent Claim
15 words
A method as in claim 19 wherein the apertures pass substantially through the track layer.
Claim 28
Dependent Claim
35 words
A method as in claim 25 wherein the processing step includes converting the polycarbonate material from a glass-like microstructure having some short-range molecular ordering to a microstructure having largely no short-range or long-range molecular ordering.
Claim 29
Dependent Claim
36 words
A method as in claim 25 wherein the substructure comprises an electrically non-insulating layer, the method further including the step of etching the non-insulating layer through the apertures to form corresponding openings in the non-insulating layer.
Claim 30
Dependent Claim
24 words
A method as in claim 27 further including the step of defining electron-emissive elements respectively centered approximately on the openings in the non-insulating layer.
Claim 31
Dependent Claim
86 words
A method as in claim 25 wherein (a) the non-insulating layer comprises a gate layer, (b) an electrically insulating layer is provided below the gate layer, and (c) a lower electrically non-insulating emitter region is provided below the insulating layer, the defining step comprising: etching the insulating layer through the openings in the gate layer to form corresponding dielectric open spaces through the insulating layer down to the emitter region; and forming electron-emissive elements in the dielectric open spaces so as to contact the emitter region.
Claim 32
Dependent Claim
47 words
A method as in claim 24 wherein both pyridine and the pyridine derivative are representable as: ##STR12## where: N is nitrogen; C is carbon; and each of R 1 , R 2 , R 3 , R 4 , and R 5 is a monovalent covalent substituent.
Claim 33
Dependent Claim
51 words
A method as in claim 24 wherein both pyrrole and the pyrrole derivative are representable as: ##STR13## where: N is a nitrogen atom; C is a carbon atom; and each of R 1 , R 2 , R 3 , R 4 , and R 5 is a monovalent covalent substituent.
Claim 34
Dependent Claim
160 words
A method as in claim 24 wherein both pyrrolidine and the pyrrolidine derivative are generally representable as: ##STR14## where: N is a nitrogen atom; C is a carbon atom; and each of R 1 , R 2 , R 3 , R 4 , R 5 , R 6 , R 7 , R 8 , and R 9 is a monovalent covalent substituent subject to any pair of R 2 -R 9 on any of the carbon atoms being replaced with a single bivalent substituent double covalently bonded to that carbon atom, or/and up to one pair of R 2 -R 9 on an adjacent pair of carbon atoms being replaced with a covalent bond between that pair of carbon atoms to create a double covalent bond therebetween, or/and R 1 and R 2 being replaced with a covalent bond between the nitrogen atom and the carbon atom bonded to R 2 to create a double covalent bond therebetween.
Claim 35
Dependent Claim
17 words
A method as in claim 24 wherein the liquid comprises at least one of chlorobenzene and cyclohexanone.
Claim 36
Dependent Claim
56 words
A method as in claim 24 wherein the polycarbonate material is representable as: ##STR15## where: O is an oxygen atom; C is a carbon atom; R is a bivalent group; each of T 1 and T 2 is a terminating group; n is a plural integer; and ##STR16## is a monomeric repeating unit repeated n times.
Claim 37
Dependent Claim
15 words
A method as in claim 24 wherein the solid track layer consists largely of polycarbonate.
Claim 38
Independent Claim
117 words
A method comprising the steps of: providing a liquid chemical formulation that comprises: polycarbonate material; a liquid capable of dissolving the polycarbonate material to a concentration of at least 1% by mass of the formulation at 20° C. and 1 atmosphere; and a surfactant; forming a liquid layer of the formulation over a substructure; processing the liquid layer to largely remove the liquid and convert the liquid layer into a solid track layer; causing charged particles to pass into the track layer to form a multiplicity of charged-particle tracks at least partway therethrough; and creating corresponding apertures at least partway through the track layer by a procedure that entails etching the track layer along the charged-particle tracks.
Claim 39
Independent Claim
117 words
A method comprising the steps of: providing a liquid chemical formulation that comprises: polycarbonate material; a liquid capable of dissolving the polycarbonate material to a concentration of at least 1% by mass of the formulation at 20° C. and 1 atmosphere; and a surfactant; forming a liquid layer of the formulation over a substructure; processing the liquid layer to largely remove the liquid and convert the liquid layer into a solid track layer; causing charged particles to pass into the track layer to form a multiplicity of charged-particle tracks at least partway therethrough; and creating corresponding apertures at least partway through the track layer by a procedure that entails etching the track layer along the charged-particle tracks.
Claim 40
Independent Claim
120 words
A method comprising the steps of: providing a liquid chemical formulation that comprises: polycarbonate material; a liquid capable of dissolving the polycarbonate material to a concentration of at least 1% by mass of the formulation at 20° C. and 1 atmosphere; and an adhesive or adhesion promoter; forming a liquid layer of the formulation over a substructure; processing the liquid layer to largely remove the liquid and convert the liquid layer into a solid track layer; causing charged particles to pass into the track layer to form a multiplicity of charged-particle tracks at least partway therethrough; and creating corresponding apertures at least partway through the track layer by a procedure that entails etching the track layer along the charged-particle tracks.
Claim 41
Independent Claim
120 words
A method comprising the steps of: providing a liquid chemical formulation that comprises: polycarbonate material; a liquid capable of dissolving the polycarbonate material to a concentration of at least 1% by mass of the formulation at 20° C. and 1 atmosphere; and an adhesive or adhesion promoter; forming a liquid layer of the formulation over a substructure; processing the liquid layer to largely remove the liquid and convert the liquid layer into a solid track layer; causing charged particles to pass into the track layer to form a multiplicity of charged-particle tracks at least partway therethrough; and creating corresponding apertures at least partway through the track layer by a procedure that entails etching the track layer along the charged-particle tracks.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-06-21 | 2002-12-21 | 2003-06-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-06-21 | 2006-12-21 | 2007-06-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-06-21 | 2010-12-21 | 2011-06-22 | $7700.00 | Window Closed / Lapsed |