US5910880A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor circuit components and capacitors
Assignee: Micron Technology Inc
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Filing: 1997-08-20
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Granted: 1999-06-08
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Expires: 2017-08-20
Abstract
Abstract The invention pertains to semiconductor circuit components and capacitors. In another aspect, the invention includes a capacitor having a) a first capacitor plate; b) a first tantalum-comprising layer over the first capacitor plate; c) a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer having nitrogen; and d) a second capacitor plate over the second tantalum-comprising layer. In another aspect, the invention includes a component having: a) a first tantalum-comprising layer; and b) a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer having nitrogen.
Inventors
- 👤 Scott Jeffrey DeBoer
- 👤 F. Daniel Gealy
- 👤 Randhir P. S. Thakur
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 09:18
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/60; H10P14/69; H10P14/692; H10P14/6938; H10P14/6939; H10P14/69393; H01; H01G; H01G4/00; H01G4/002; H01G4/018; H01G4/06; H01G4/08; H01G4/10; H10D; H10D1/00; H10D1/60; H10D1/68; H10P14/40; H10P14/418; H10P14/65; H10P14/6516; H10P14/6548; H10D1/682; H10D1/684; H10P14/6518; H10P14/6524; H10P14/6526; H10P14/6529; H10P14/6532; H10P14/6544
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
29 words
A semiconductor circuit component comprising: a first tantalum-comprising layer; and a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer consisting essentially of tantalum and nitrogen.
Claim 2
Dependent Claim
29 words
A semiconductor circuit component comprising: a first tantalum-comprising layer; and a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer consisting essentially of tantalum and nitrogen.
Claim 3
Dependent Claim
20 words
The semiconductor circuit component of claim 1 wherein the second tantalum-comprising layer is in contact with the first tantalum-comprising layer.
Claim 4
Dependent Claim
14 words
The semiconductor circuit component of claim 1 wherein the first tantalum-comprising layer comprises oxygen.
Claim 5
Dependent Claim
20 words
The semiconductor circuit component of claim 1 wherein the first tantalum-comprising layer consists essentially of Ta 2 O 5 .
Claim 6
Dependent Claim
45 words
A capacitor comprising: a first capacitor plate; a first tantalum-comprising layer over the first capacitor plate; a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer consisting essentially of tantalum and nitrogen; and a second capacitor plate over the second tantalum-comprising layer.
Claim 7
Dependent Claim
45 words
A capacitor comprising: a first capacitor plate; a first tantalum-comprising layer over the first capacitor plate; a second tantalum-comprising layer over the first tantalum-comprising layer, the second tantalum-comprising layer consisting essentially of tantalum and nitrogen; and a second capacitor plate over the second tantalum-comprising layer.
References Cited (Backward Citations)
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US5471364A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-06-07 | 2002-12-07 | 2003-06-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-06-07 | 2006-12-07 | 2007-06-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-06-07 | 2010-12-07 | 2011-06-08 | $7700.00 | Window Closed / Lapsed |