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US5904996A
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Method of manufacturing a magnetic field sensor
Assignee: Philips North America LLC
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Filing: 1997-06-19
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Granted: 1999-05-18
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Expires: 2017-06-19
Abstract
Abstract A method of manufacturing a magnetic field sensor having a stacked structure of: an exchange-biasing layer (2) comprising nickel oxide on a substrate (1) and a magnetic layer (3) which is exchange-biased with the exchange-biasing layer (2), whereby at least the exchange-biasing layer (2) is provided by sputter deposition using a sputter gas which comprises Ne and/or He. The magnetic layer (3) preferably comprises permalloy. In a particular embodiment, the magnetic layer (3) is separated from a second magnetic layer (5) by an interposed non-magnetic layer (4), so as to form a spin-valve trilayer.
Inventors
- 👤 Pieter J. Van der Zaag
- 👤 Hendrik T. Munsters
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 23:07
CPC Classifications
G; G01; G01R; G01R33/00; G01R33/02; G01R33/06; G01R33/09; G01R33/093; B; B82; B82Y; B82Y25/00; Y; Y10; Y10S; Y10S428/00; Y10S428/90; Y10T; Y10T428/00; Y10T428/11; Y10T428/1107; Y10T428/1121
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
61 words
A method of manufacturing a magnetic field sensor having a stacked structure which comprises: a substrate; an exchange-biasing layer comprising nickel oxide; a magnetic layer which is exchange-biased with the exchange-biasing layer, whereby at least the exchange-biasing layer is provided by sputter deposition, characterized in that the said sputter deposition is conducted using a sputter gas which comprises Ne and/or He.
Claim 2
Independent Claim
61 words
A method of manufacturing a magnetic field sensor having a stacked structure which comprises: a substrate; an exchange-biasing layer comprising nickel oxide; a magnetic layer which is exchange-biased with the exchange-biasing layer, whereby at least the exchange-biasing layer is provided by sputter deposition, characterized in that the said sputter deposition is conducted using a sputter gas which comprises Ne and/or He.
Claim 3
Dependent Claim
30 words
A method according to claim 1, characterized in that the magnetic layer is separated from a second magnetic layer by an interposed non-magnetic layer, so as to form a trilayer.
Claim 4
Dependent Claim
19 words
A method according to claim 1, characterized in that the sensor is provided with at least one flux guide.
Claim 5
Dependent Claim
47 words
A magnetic field sensor having a stacked structure which comprises: a substrate; an exchange-biasing layer comprising nickel oxide; a magnetic layer which is exchange-biased with the exchange-biasing layer, characterized by the presence of Ne and/or He atoms at the interface between the substrate and the exchange-biasing layer.
Claim 6
Dependent Claim
47 words
A magnetic field sensor having a stacked structure which comprises: a substrate; an exchange-biasing layer comprising nickel oxide; a magnetic layer which is exchange-biased with the exchange-biasing layer, characterized by the presence of Ne and/or He atoms at the interface between the substrate and the exchange-biasing layer.
Claim 7
Dependent Claim
30 words
A magnetic field sensor according to claim 4, characterized in that the quantity of Ne and/or He atoms at the said interface is at least 10 12 atoms/cm 2 .
References Cited (Backward Citations)
EP0594243A2
Cited
JPH08129721A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-05-17 | 2002-11-16 | 2003-05-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-05-17 | 2006-11-16 | 2007-05-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-05-17 | 2010-11-16 | 2011-05-18 | $7700.00 | Window Closed / Lapsed |