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US5897372A
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Formation of a self-aligned integrated circuit structure using silicon-rich nitride as a protective layer
Assignee: Micron Technology Inc
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Filing: 1995-11-01
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Granted: 1999-04-27
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Expires: 2015-11-01
Abstract
Abstract Silicon-rich silicon nitride is employed as a protective layer in a self-aligning etch. A thin layer of silicon-rich silicon nitride is deposited conformably over raised structures on a substrate. An etchable layer is then deposited, filling a space between the raised structures and providing a horizontal top surface. A mask layer is then formed on the etchable layer and patterned to expose an area of the etchable layer over the space between the raised structures. The etchable layer is then etched with an etchant selective to silicon nitride to remove the etchable layer from between the raised structures. Then the space between the raised structures is filled with a fill material, forming a self-aligned structure comprised of said fill material and self-aligned to the raised structures. The thin layer of silicon-rich silicon nitride resists the etch of the etchable layer better than the typical stoichiometric silicon nitride, providing increased selectivity, improving the reliability of the self-aligning process by preventing etch-through of protective layers, and thereby improving process control and yield of the self-aligning process.
Inventors
- 👤 Bradley J. Howard
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 02:21
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/069
Claims Analysis
Total Claims: 32
Claim 1
Independent Claim
159 words
A method for forming self-aligned structures, said method comprising: forming two raised structures on said substrate having a space therebetween, each said raised structure having a top surface and a side wall projecting from the substrate to terminate at the top surface, each said side wall having a spacer thereon projecting from the substrate and extending to the top surface of the respective raised structure; forming a layer of silicon-rich silicon nitride conformably over said raised structures, said spacers, and said substrate therebetween; forming a layer of etchable material over said layer of silicon-rich silicon nitride to fill said space; depositing a mask layer over said layer of etchable material; patterning said mask layer to expose an area of said layer of etchable material over said space; anisotropically etching said etchable layer with an etchant selective to silicon nitride; removing the layer of silicon-rich silicon nitride to expose a horizontal surface on said substrate between the two raised structures.
Claim 2
Independent Claim
159 words
A method for forming self-aligned structures, said method comprising: forming two raised structures on said substrate having a space therebetween, each said raised structure having a top surface and a side wall projecting from the substrate to terminate at the top surface, each said side wall having a spacer thereon projecting from the substrate and extending to the top surface of the respective raised structure; forming a layer of silicon-rich silicon nitride conformably over said raised structures, said spacers, and said substrate therebetween; forming a layer of etchable material over said layer of silicon-rich silicon nitride to fill said space; depositing a mask layer over said layer of etchable material; patterning said mask layer to expose an area of said layer of etchable material over said space; anisotropically etching said etchable layer with an etchant selective to silicon nitride; removing the layer of silicon-rich silicon nitride to expose a horizontal surface on said substrate between the two raised structures.
Claim 3
Dependent Claim
51 words
The method as defined in claim 1, wherein removing the layer of silicon-rich silicon nitride comprises anisotropically etching said layer of silicon-rich silicon nitride to remove said layer of silicon-rich silicon nitride from between said raised structures; and wherein said at least one fill material is self-aligned to said raised structures.
Claim 4
Dependent Claim
15 words
The method as defined in claim 2, wherein said fill material comprises a conductive material.
Claim 5
Dependent Claim
73 words
The method as defined in claim 1, wherein forming the two raised structures on said substrate comprises: depositing on said substrate stack layers including a top layer of a protective material; patterning said stack layers to form two stacks comprised of said stack layers; depositing conformably over said stacks and said substrate a spacer layer of said protective material; and anisotropically etching said spacer layer to form said spacers laterally enclosing said stacks.
Claim 6
Dependent Claim
15 words
The method as defined in claim 4, wherein said protective material is stoichiometric silicon nitride.
Claim 7
Dependent Claim
14 words
The method as defined in claim 4, wherein said protective material is silicon oxide.
Claim 8
Dependent Claim
13 words
The method as defined in claim 4, wherein said stacks comprise gate stacks.
Claim 9
Dependent Claim
28 words
The method as defined in claim 1, wherein said layer of silicon-rich silicon nitride has a thickness in the range of about 50 Å to about 500 Å.
Claim 10
Dependent Claim
28 words
The method as defined in claim 1, wherein the layer of silicon-rich silicon nitride has an index of refraction in the range of about 2.1 to about 2.6.
Claim 11
Dependent Claim
34 words
The method as defined in claim 1, wherein said etchable material comprises BPSG, and wherein forming a layer of etchable material over said layer of silicon-rich silicon nitride comprises depositing and reflowing said BPSG.
Claim 12
Dependent Claim
39 words
The method as defined in claim 1, further comprising: forming at least one fill material on the horizontal surface to fill said space; isolating said at least one fill material above the substrate and between the two raised structures.
Claim 13
Independent Claim
269 words
A method for forming self-aligned contact structures in an integrated circuit, said method comprising: forming two raised structures on a substrate, an area of said substrate lying between said raised structures, each said raised structure having a top surface and a side wall projecting from the substrate to terminate at the top surface, each said side wall having a spacer thereon projecting from the substrate and extending to the top surface of the respective raised structure; depositing conformably over said raised structures, said spacers, and said area of said substrate lying therebetween a layer of silicon-rich silicon nitride having a thickness within the range of about 50 to about 500 Angstroms and an index of refraction in the range of about 2.1 to about 2.6; depositing a layer of etchable material over said layer of silicon-rich silicon nitride to fill a space above said area of said substrate and to provide a horizontal top surface on said layer of etchable material; depositing a mask layer over said layer of etchable material; patterning said mask layer to expose an area of said layer of etchable material above said area of said substrate; anisotropically etching said etchable layer with an etchant selective to silicon nitride to remove said etchable layer above said area of said substrate; anisotropically etching said layer of silicon-rich silicon nitride to remove said layer of silicon-rich silicon nitride from said area of said substrate; and depositing a conductive material to electrically contact said area of said substrate; and planarizing said conductive material to electrically isolate said conductive material above the substrate and between the two raised structures.
Claim 14
Independent Claim
269 words
A method for forming self-aligned contact structures in an integrated circuit, said method comprising: forming two raised structures on a substrate, an area of said substrate lying between said raised structures, each said raised structure having a top surface and a side wall projecting from the substrate to terminate at the top surface, each said side wall having a spacer thereon projecting from the substrate and extending to the top surface of the respective raised structure; depositing conformably over said raised structures, said spacers, and said area of said substrate lying therebetween a layer of silicon-rich silicon nitride having a thickness within the range of about 50 to about 500 Angstroms and an index of refraction in the range of about 2.1 to about 2.6; depositing a layer of etchable material over said layer of silicon-rich silicon nitride to fill a space above said area of said substrate and to provide a horizontal top surface on said layer of etchable material; depositing a mask layer over said layer of etchable material; patterning said mask layer to expose an area of said layer of etchable material above said area of said substrate; anisotropically etching said etchable layer with an etchant selective to silicon nitride to remove said etchable layer above said area of said substrate; anisotropically etching said layer of silicon-rich silicon nitride to remove said layer of silicon-rich silicon nitride from said area of said substrate; and depositing a conductive material to electrically contact said area of said substrate; and planarizing said conductive material to electrically isolate said conductive material above the substrate and between the two raised structures.
Claim 15
Dependent Claim
28 words
The method as defined in claim 12, wherein said raised structures comprise gate stacks enclosed in said spacers; and said area of said substrate comprises a source/drain region.
Claim 16
Dependent Claim
34 words
The method as defined in claim 12, wherein said etchable material comprises BPSG, and wherein depositing said layer of etchable material over said layer of silicon-rich silicon nitride comprises depositing and reflowing said BPSG.
Claim 17
Dependent Claim
37 words
The method as defined in claim 12, wherein anisotropically etching said etchable layer with an etchant selective to silicon nitride to remove said etchable layer above said area of said substrate comprises etching in a fluorine-deficient plasma.
Claim 18
Independent Claim
256 words
A method for performing a self-aligned etch during manufacture of an integrated circuit, said method comprising: providing a substrate having two raised structures thereon with an area of said substrate lying between said two raised structures, each said raised structure having a top surface and a side wall projecting from the substrate to terminate at the top surface, each said side wall having a spacer thereon projecting from the substrate and extending to the top surface of the respective raised structure, each said spacer being composed of an electrically insulative material; depositing conformably over said raised structures, said spacers, and said area of said substrate lying between said raised structures a layer of silicon-rich silicon nitride having a thickness within the range of about 50 to about 500 Angstroms and an index of refraction in the range of about 2.1 to about 2.6; depositing and reflowing an oxide of silicon over said layer of silicon-rich silicon nitride; etching said oxide of silicon with an etchant selective to silicon nitride to expose the layer of silicon-rich silicon nitride that is situated between said raised structures; removing the layer of silicon-rich silicon nitride to expose the substrate between the two raised structure; depositing a conductive material on the substrate, between and on the two raised structures, and in contact with the spacers on the raised structures; and removing the conductive material that is situated above the substrate and above the two raised structures to electrically isolate said conductive material above the substrate and between the two raised structures.
Claim 19
Independent Claim
256 words
A method for performing a self-aligned etch during manufacture of an integrated circuit, said method comprising: providing a substrate having two raised structures thereon with an area of said substrate lying between said two raised structures, each said raised structure having a top surface and a side wall projecting from the substrate to terminate at the top surface, each said side wall having a spacer thereon projecting from the substrate and extending to the top surface of the respective raised structure, each said spacer being composed of an electrically insulative material; depositing conformably over said raised structures, said spacers, and said area of said substrate lying between said raised structures a layer of silicon-rich silicon nitride having a thickness within the range of about 50 to about 500 Angstroms and an index of refraction in the range of about 2.1 to about 2.6; depositing and reflowing an oxide of silicon over said layer of silicon-rich silicon nitride; etching said oxide of silicon with an etchant selective to silicon nitride to expose the layer of silicon-rich silicon nitride that is situated between said raised structures; removing the layer of silicon-rich silicon nitride to expose the substrate between the two raised structure; depositing a conductive material on the substrate, between and on the two raised structures, and in contact with the spacers on the raised structures; and removing the conductive material that is situated above the substrate and above the two raised structures to electrically isolate said conductive material above the substrate and between the two raised structures.
Claim 20
Dependent Claim
75 words
The method as defined in claim 16 wherein etching said oxide of silicon with an etchant selective to silicon nitride comprises: depositing a mask layer over said oxide of silicon; patterning said mask layer to expose an area of said oxide of silicon above said area of said substrate; and anisotropically etching said oxide of silicon with an etchant selective to silicon nitride to remove said oxide of silicon above said area of said substrate.
Claim 21
Dependent Claim
14 words
The method as defined in claim 16 wherein said oxide of silicon comprises BPSG.
Claim 22
Dependent Claim
181 words
An integrated circuit produced according to a method comprising: forming a pair of gate stacks projecting from a semiconductor substrate, the semiconductor substrate having an active area therein that is situated between the two gate stacks, each said gate stack having a side wall with a spacer thereon, each said spacer being composed of an electrically insulative material; forming a layer of silicon-rich silicon nitride over said two gate stacks, the spacers on the side walls of the gate stacks, and upon the active area; forming a layer of an oxide of silicon over said layer of silicon-rich silicon nitride to between the two gate stacks; etching the layer of the oxide of silicon between the two gate stacks with an etchant selective to silicon nitride; removing the layer of silicon-rich silicon nitride to expose the active area on the semiconductor substrate between the two gate stacks; forming an electrically conductive material over the two gate stacks and upon the active area; electrically isolating the electrically conductive material that is situated above the semiconductor substrate and between the two gate stacks.
Claim 23
Dependent Claim
181 words
An integrated circuit produced according to a method comprising: forming a pair of gate stacks projecting from a semiconductor substrate, the semiconductor substrate having an active area therein that is situated between the two gate stacks, each said gate stack having a side wall with a spacer thereon, each said spacer being composed of an electrically insulative material; forming a layer of silicon-rich silicon nitride over said two gate stacks, the spacers on the side walls of the gate stacks, and upon the active area; forming a layer of an oxide of silicon over said layer of silicon-rich silicon nitride to between the two gate stacks; etching the layer of the oxide of silicon between the two gate stacks with an etchant selective to silicon nitride; removing the layer of silicon-rich silicon nitride to expose the active area on the semiconductor substrate between the two gate stacks; forming an electrically conductive material over the two gate stacks and upon the active area; electrically isolating the electrically conductive material that is situated above the semiconductor substrate and between the two gate stacks.
Claim 24
Dependent Claim
33 words
The method as defined in claim 19, wherein electrically isolating the electrically conductive material is a planarization process to remove the electrically conductive material that is situated between and above the gate stacks.
Claim 25
Independent Claim
167 words
A method of forming isolated contacts comprising: forming a pair of gate stacks projecting from a semiconductor substrate, each gate stack being electrically insulated above the semiconductor substrate by a protective covering composed of a dielectric material, the semiconductor substrate having an active area therein that is situated between the two gate stacks; forming a layer of silicon-rich silicon nitride having an index of refraction in the range of about 2.1 to about 2.6 over the protective covering upon the two gate stacks and upon the active area; forming a layer of an oxide of silicon over said layer of silicon-rich silicon nitride between the two gate stacks; etching the layer of the oxide of silicon that is situated between the two gate stacks with an etchant selective to silicon nitride to expose the layer of silicon-rich silicon nitride that situated between the two gate stacks; removing the layer of silicon-rich silicon nitride to expose the active area on the semiconductor substrate between the two gate stacks.
Claim 26
Independent Claim
167 words
A method of forming isolated contacts comprising: forming a pair of gate stacks projecting from a semiconductor substrate, each gate stack being electrically insulated above the semiconductor substrate by a protective covering composed of a dielectric material, the semiconductor substrate having an active area therein that is situated between the two gate stacks; forming a layer of silicon-rich silicon nitride having an index of refraction in the range of about 2.1 to about 2.6 over the protective covering upon the two gate stacks and upon the active area; forming a layer of an oxide of silicon over said layer of silicon-rich silicon nitride between the two gate stacks; etching the layer of the oxide of silicon that is situated between the two gate stacks with an etchant selective to silicon nitride to expose the layer of silicon-rich silicon nitride that situated between the two gate stacks; removing the layer of silicon-rich silicon nitride to expose the active area on the semiconductor substrate between the two gate stacks.
Claim 27
Dependent Claim
71 words
The method as defined in claim 21, further comprising: forming an electrically conductive material over the protective covering upon the two gate stacks and upon the active area, the electrically conductive material extending from the active area above the protective covering of each said gate stack; removing the electrically conductive material that extends above the protective covering of each said gate stack and that is situated between the two gate stacks.
Claim 28
Dependent Claim
16 words
The method as defined in claim 21, wherein the protective covering is composed of silicon nitride.
Claim 29
Independent Claim
258 words
A method of forming gate stack structures comprising: forming a pair of gate stacks projecting from a semiconductor substrate, each gate stack having a side intersecting with a top, said side and top of each said gate stack being electrically insulated above the semiconductor substrate by a protective covering composed of a dielectric material, the semiconductor substrate having an active area therein that is situated between the two gate stacks; forming a layer of silicon-rich silicon nitride having an index of refraction in the range of about 2.1 to about 2.6 over the protective covering upon the two gate stacks and upon the active area; forming a layer of an oxide of silicon over said layer of silicon-rich silicon nitride between the two gate stacks; etching the layer of the oxide of silicon that is situated between the two gate stacks with an etchant selective to silicon nitride to expose the layer of silicon-rich silicon nitride that situated: on the protective material that is on the side of each said gate stack; on the semiconductor substrate between the two gate stacks, wherein said layer of oxide remains on the layer of silicon-rich silicon nitride that is on the protective covering that is on the top of each said gate stack; removing the layer of silicon-rich silicon nitride that is situated upon the semiconductor substrate to expose the active area on the semiconductor substrate between the two gate stacks, wherein the layer of silicon-rich silicon nitride remains on the protective covering on the side of each said gate stack.
Claim 30
Independent Claim
258 words
A method of forming gate stack structures comprising: forming a pair of gate stacks projecting from a semiconductor substrate, each gate stack having a side intersecting with a top, said side and top of each said gate stack being electrically insulated above the semiconductor substrate by a protective covering composed of a dielectric material, the semiconductor substrate having an active area therein that is situated between the two gate stacks; forming a layer of silicon-rich silicon nitride having an index of refraction in the range of about 2.1 to about 2.6 over the protective covering upon the two gate stacks and upon the active area; forming a layer of an oxide of silicon over said layer of silicon-rich silicon nitride between the two gate stacks; etching the layer of the oxide of silicon that is situated between the two gate stacks with an etchant selective to silicon nitride to expose the layer of silicon-rich silicon nitride that situated: on the protective material that is on the side of each said gate stack; on the semiconductor substrate between the two gate stacks, wherein said layer of oxide remains on the layer of silicon-rich silicon nitride that is on the protective covering that is on the top of each said gate stack; removing the layer of silicon-rich silicon nitride that is situated upon the semiconductor substrate to expose the active area on the semiconductor substrate between the two gate stacks, wherein the layer of silicon-rich silicon nitride remains on the protective covering on the side of each said gate stack.
Claim 31
Dependent Claim
73 words
The method as defined in claim 24, further comprising: forming an electrically conductive material: upon the layer of oxide that remain on the layer of silicon-rich silicon nitride that is on the protective covering that is on the top of each said gate stack; upon the semiconductor substrate between the two gate stacks; upon the layer of silicon-rich silicon nitride remains on the protective covering on the side of each said gate stack.
Claim 32
Dependent Claim
46 words
The method as defined in claim 25, further comprising: removing the electrically conductive material that extends above the layer of oxide that remain on the layer of silicon-rich silicon nitride that is on the protective covering that is on the top of each said gate stack.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 2002-04-26 | 2002-10-26 | 2003-04-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-04-26 | 2006-10-26 | 2007-04-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-04-26 | 2010-10-26 | 2011-04-27 | $7700.00 | Window Closed / Lapsed |