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US5894057A
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Charged beam drawing method
Assignee: Nuflare Technology Inc
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Filing: 1997-07-03
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Granted: 1999-04-13
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Expires: 2017-07-03
Abstract
Abstract The present invention provides a charged beam drawing method comprising a first step of setting a stripe field independent of drawing pattern definition data and of determining the drawing pattern definition data which belongs to the stripe field set, a second step of setting a sub-field independent of the drawing pattern definition data and of determining the drawing pattern definition data which belongs to the sub-field, among the drawing pattern definition data determined, a third step of drawing the drawing pattern definition data which belongs to the sub-field onto an object to be subjected to drawing, a fourth step of shifting a position of the stripe field by a first predetermined value, and of shifting a position of the sub-field by a second predetermined value, and a fifth step of repeating the first to fourth steps for at least two times.
Inventors
- 👤 Toshio Yamaguchi
- 👤 Kazuto Matsuki
- 👤 Shuichi Tamamushi
- 👤 Souji Koikari
- 👤 Eiji Murakami
- 👤 Shigehiro Hara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 08:54
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/30; H01J37/302; H01J37/3023; H01J37/3026; H01J2237/00; H01J2237/30; H01J2237/317; H01J2237/3175; H01J2237/31761; H01J2237/31764; H01J2237/31767; Y; Y10; Y10S; Y10S430/00; Y10S430/143
Claims Analysis
Total Claims: 11
Claim 1
Independent Claim
137 words
A charged beam drawing method comprising: a first step of setting a stripe field independent of drawing pattern definition data, and of determining the drawing pattern definition data which belongs to the stripe field set; a second step of setting a sub-field independent of the drawing pattern definition data, and of determining the drawing pattern definition data which belongs to the sub-field, among the drawing pattern definition data determined; a third step of drawing the drawing pattern definition data which belongs to the sub-field, onto an object to be subjected to drawing; a fourth step of shifting a position of the stripe field by a first predetermined value, and of shifting a position of the sub-field by a second predetermined value; and a fifth step of repeating the first to fourth steps for at least two times.
Claim 2
Dependent Claim
137 words
A charged beam drawing method comprising: a first step of setting a stripe field independent of drawing pattern definition data, and of determining the drawing pattern definition data which belongs to the stripe field set; a second step of setting a sub-field independent of the drawing pattern definition data, and of determining the drawing pattern definition data which belongs to the sub-field, among the drawing pattern definition data determined; a third step of drawing the drawing pattern definition data which belongs to the sub-field, onto an object to be subjected to drawing; a fourth step of shifting a position of the stripe field by a first predetermined value, and of shifting a position of the sub-field by a second predetermined value; and a fifth step of repeating the first to fourth steps for at least two times.
Claim 3
Dependent Claim
71 words
A charged beam drawing method according to claim 1, wherein the first predetermined amount is an amount obtained by dividing a height of the stripe field by a number of times for which drawing is repeatedly performed on the stripe field, and the second predetermined amount is an amount obtained by dividing a width of the sub-field by a number of times for which drawing is repeatedly performed on the subfield.
Claim 4
Dependent Claim
101 words
A charged beam drawing method according to claim 1, wherein: a width of a region occupied by a small figure group as a unit forming part of figure data included in the drawing pattern definition data is equal to or smaller than a difference between a maximum width which can be allowed by sub-deflection and a width of the sub-field; and determination obtained in the second step depends on whether or not coordinates closest to an origin of the sub-field among coordinates of small figure groups which constitute the drawing pattern definition data determined in the first belong to the sub-field.
Claim 5
Dependent Claim
22 words
A charged beam drawing method according to claim 1, wherein the stripe field is a stripe-like field decided by a main-deflection width.
Claim 6
Dependent Claim
26 words
A charged beam drawing method according to claim 1, wherein the sub-field is a field smaller than a maximum field which can be allowed by sub-deflection.
Claim 7
Dependent Claim
93 words
A charged beam drawing method comprising: a first step of setting a stripe field independent of drawing pattern definition data, and of determining the drawing pattern definition data which belongs to the stripe field set; a second step of setting a sub-field independent of the drawing pattern definition data, and of determining the drawing pattern definition data which belongs to the sub-field, among the drawing pattern definition data determined; and a third step of drawing the drawing pattern definition data which belongs to the sub-field, onto an object to be subjected to drawing.
Claim 8
Dependent Claim
93 words
A charged beam drawing method comprising: a first step of setting a stripe field independent of drawing pattern definition data, and of determining the drawing pattern definition data which belongs to the stripe field set; a second step of setting a sub-field independent of the drawing pattern definition data, and of determining the drawing pattern definition data which belongs to the sub-field, among the drawing pattern definition data determined; and a third step of drawing the drawing pattern definition data which belongs to the sub-field, onto an object to be subjected to drawing.
Claim 9
Dependent Claim
102 words
A charged beam drawing method according to claim 6, wherein: a width of a region occupied by a small figure group as a unit forming part of figure data included in the drawing pattern definition data is equal to or smaller than a difference between a maximum width which can be allowed by sub-deflection and a width of the sub-field; and determination obtained in the second step depends on whether or not coordinates closest to an origin of the sub-field among coordinates of small figure groups which constitute the drawing pattern definition data determined in the first step belong to the sub-field.
Claim 10
Dependent Claim
22 words
A charged beam drawing method according to claim 6, wherein the stripe field is a stripe-like field decided by a main-deflection width.
Claim 11
Dependent Claim
26 words
A charged beam drawing method according to claim 6, wherein the sub-field is a field smaller than a maximum field which can be allowed by sub-deflection.
References Cited (Backward Citations)
JPH03219617A
Cited
JPH05234863A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-04-12 | 2002-10-12 | 2003-04-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-04-12 | 2006-10-12 | 2007-04-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-04-12 | 2010-10-12 | 2011-04-13 | $7700.00 | Window Closed / Lapsed |