Patent US5886867A successfully refreshed from Google Patents.
US5886867A
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Ferroelectric dielectric for integrated circuit applications at microwave frequencies
Assignee: RPX Clearinghouse LLC
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Filing: 1997-03-10
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Granted: 1999-03-23
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Expires: 2017-03-10
Abstract
Abstract A ferroelectric dielectric for microwave applications is provided including a polycrystalline perovskite phase of lead zirconate titanate dielectric material. Small grain size material is provided by a low temperature process, by a rapid thermal annealing process. A layer of amorphous ferroelectric precursor material is deposited and annealed in an oxygen containing atmosphere in the presence of water vapour, preferably with the addition of a few percent of ozone, and at a temperature of less than 500 DEG C. Advantageously, the method provides for formation of a ferroelectric material including lead zirconate titanate with a grain size less than 20 nm, with low film stress, high dielectric constant and low leakage current, which has excellent ferroelectric characteristics up to 10 GHz. This material has applications for capacitors, as filters, decoupling, coupling, and bypass elements and also for high frequency surface acoustic wave devices.
Inventors
- 👤 Vasanta Chivukula
- 👤 Pak K. Leung
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:14
CPC Classifications
H; H10; H10B; H10B53/00; H10D; H10D1/00; H10D1/60; H10D1/68; H10D1/682
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
31 words
A ferroelectric dielectric for an integrated circuit operable at microwave frequencies comprising fine grained polycrystalline lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies above 1 GHz.
Claim 2
Dependent Claim
31 words
A ferroelectric dielectric for an integrated circuit operable at microwave frequencies comprising fine grained polycrystalline lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies above 1 GHz.
Claim 3
Dependent Claim
20 words
A dielectric according to claim 1 wherein the polycrystalline lead zirconate titanate is characterized by grain sizes below 20 nm.
Claim 4
Dependent Claim
25 words
A dielectric according to claim 1 wherein the polycrystalline lead zirconate titanate is characterized by grain sizes predominantly in the range 10 to 15 nm.
Claim 5
Dependent Claim
35 words
A dielectric according to claim 1 wherein the polycrystalline lead zirconate titanate is characterized by substantially uniform grain sizes below 20 nm and a dielectric constant greater than 300 at frequencies up to 10 GHz.
Claim 6
Dependent Claim
25 words
A dielectric according to claim 1 wherein the polycrystalline lead zirconate titanate comprises a dopant selected from the group consisting lanthanum, niobium, tantalum and chromium.
Claim 7
Dependent Claim
71 words
A ferroelectric capacitor for an integrated circuit operable at microwave frequencies comprising first and second electrodes and an intervening layer of a ferroelectric capacitor dielectric material, the capacitor dielectric material being selected from doped and undoped polycrystalline lead zirconate titanate, zirconium titanate, and lead titanate, the ferroelectric capacitor dielectric material being characterized by fine grain size and ferroelectric properties which are maintained at operating frequencies of the capacitor above 1 GHz.
Claim 8
Dependent Claim
71 words
A ferroelectric capacitor for an integrated circuit operable at microwave frequencies comprising first and second electrodes and an intervening layer of a ferroelectric capacitor dielectric material, the capacitor dielectric material being selected from doped and undoped polycrystalline lead zirconate titanate, zirconium titanate, and lead titanate, the ferroelectric capacitor dielectric material being characterized by fine grain size and ferroelectric properties which are maintained at operating frequencies of the capacitor above 1 GHz.
Claim 9
Dependent Claim
22 words
A capacitor according to claim 6 wherein the dielectric material is polycrystalline lead zirconate titanate having grain sizes less than 20 nm.
Claim 10
Dependent Claim
25 words
A capacitor according to claim 6 wherein the dielectric material is polycrystalline lead zirconate titanate with grain sizes in the range 10 to 15 nm.
Claim 11
Dependent Claim
40 words
A high frequency surface acoustic wave device comprising a thin layer of fine grained polycrystalline ferroelectric lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies greater than 1 GHz and up to at least 10 GHz.
Claim 12
Dependent Claim
40 words
A high frequency surface acoustic wave device comprising a thin layer of fine grained polycrystalline ferroelectric lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies greater than 1 GHz and up to at least 10 GHz.
Claim 13
Dependent Claim
68 words
A ferroelectric capacitor for an integrated circuit operable at microwave frequencies and comprising first and second electrodes and an intervening layer of a ferroelectric capacitor dielectric material, the capacitor dielectric material being selected from doped and undoped polycrystalline lead zirconate titanate, zirconium titanate, and lead titanate, a dielectric constant of the ferroelectric capacitor dielectric material being greater than 300 for operating frequencies between 1 GHz and 10 GHz.
Claim 14
Dependent Claim
68 words
A ferroelectric capacitor for an integrated circuit operable at microwave frequencies and comprising first and second electrodes and an intervening layer of a ferroelectric capacitor dielectric material, the capacitor dielectric material being selected from doped and undoped polycrystalline lead zirconate titanate, zirconium titanate, and lead titanate, a dielectric constant of the ferroelectric capacitor dielectric material being greater than 300 for operating frequencies between 1 GHz and 10 GHz.
Claim 15
Dependent Claim
111 words
A ferroelectric dielectric for an integrated circuit operable at microwave frequencies comprising fine grained polycrystalline lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies above 1 GHz produced by a process comprising the steps: depositing a layer of amorphous ferroelectric precursor material comprising a mixture of lead, zirconium and titanium compounds on an integrated circuit substrate, and annealing the layer of amorphous ferroelectric precursor material at a temperature sufficient to cause a phase transformation to a fine grained ferroelectric polycrystalline perovskite phase, the annealing step comprising heating in an oxygen containing atmosphere in the presence of water vapour to provide a ferroelectric layer of lead zirconate titanate.
Claim 16
Dependent Claim
111 words
A ferroelectric dielectric for an integrated circuit operable at microwave frequencies comprising fine grained polycrystalline lead zirconate titanate characterized by a dielectric constant greater than 300 at frequencies above 1 GHz produced by a process comprising the steps: depositing a layer of amorphous ferroelectric precursor material comprising a mixture of lead, zirconium and titanium compounds on an integrated circuit substrate, and annealing the layer of amorphous ferroelectric precursor material at a temperature sufficient to cause a phase transformation to a fine grained ferroelectric polycrystalline perovskite phase, the annealing step comprising heating in an oxygen containing atmosphere in the presence of water vapour to provide a ferroelectric layer of lead zirconate titanate.
References Cited (Backward Citations)
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