US5883932A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate holding device and exposing apparatus using the same
Assignee: Canon Inc
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Filing: 1995-06-05
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Granted: 1999-03-16
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Expires: 2015-06-05
Abstract
Abstract A substrate holding apparatus in which first and second vacuum clamping devices each have a holding surface for holding a portion of a substrate, a first driving device for rotating the first vacuum clamping device relative to the second vacuum clamping device, and a second driving device for reciprocally moving the first vacuum clamping device between a position in which it protrudes by a predetermined amount from the holding surface of the second vacuum clamping device and a position in which it does not protrude from that holding surface. Also disclosed is a substrate holding device in which a vacuum clamping device creates a vacuum clamp force on the holding surface thereof, a cylindrical delivering member surrounds at least a portion of the holding surface and is reciprocally movable between a position in which it protrudes by a predetermined amount from the holding surface and a position in which it does not protrude from the holding surface, and a driving device for moving the delivering member.
Inventors
- 👤 Yuji Chiba
- 👤 Nobutoshi Mizusawa
- 👤 Kazunori Iwamoto
- 👤 Yutaka Tanaka
- 👤 Shinichi Hara
- 👤 Mitsuji Marumo
- 👤 Shin Matsui
- 👤 Hiroshi Kurosawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 14:41
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/70; G03F7/70691; G03F7/707; H; H10; H10P; H10P72/00; H10P72/70; H10P72/78; H01; H01J; H01J2237/00; H01J2237/20; H01J2237/30; H01J2237/317; H01J2237/3175; Y; Y10; Y10T; Y10T279/00; Y10T279/11
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
66 words
A substrate holding device comprising: first and second vacuum clamping means each having a holding surface for holding a portion of a substrate; first driving means for rotating said first vacuum clamping means relative to said second vacuum clamping means; and second driving means for moving said first vacuum clamping means relative to said second vacuum clamping means in a direction perpendicular to the holding surfaces.
Claim 2
Dependent Claim
66 words
A substrate holding device comprising: first and second vacuum clamping means each having a holding surface for holding a portion of a substrate; first driving means for rotating said first vacuum clamping means relative to said second vacuum clamping means; and second driving means for moving said first vacuum clamping means relative to said second vacuum clamping means in a direction perpendicular to the holding surfaces.
Claim 3
Dependent Claim
19 words
A substrate holding device according to claim 1, further comprising exposing means for effecting exposure on the held substrate.
Claim 4
Dependent Claim
17 words
A substrate holding device according to claim 1, further comprising stage means for moving the held substrate.
Claim 5
Dependent Claim
40 words
A substrate holding device according to claim 3, wherein said second vacuum clamping means includes a mechanism fixed to said stage means and comprises means for causing said first vacuum clamping means to be rotatable relative to said stage means.
Claim 6
Dependent Claim
35 words
A substrate holding device according to claim 3, further comprising a mirror for reflecting a light beam for measuring the position of said stage means, which is provided integrally with said second vacuum clamping means.
Claim 7
Dependent Claim
29 words
A substrate holding device according to claim 1, further comprising a liquid flow path for circulating temperature adjusting liquid through each of said first and second vacuum clamping means.
Claim 8
Dependent Claim
79 words
A substrate holding device comprising: first vacuum clamping means and second vacuum clamping means, each having a holding surface for holding a portion of a substrate; first driving means for rotating said first vacuum clamping means relative to said second vacuum clamping means; and second driving means for relatively moving between said first vacuum clamping means and said second vacuum clamping means in a direction perpendicular to the respective holding surfaces of said first and second vacuum clamping means.
Claim 9
Dependent Claim
79 words
A substrate holding device comprising: first vacuum clamping means and second vacuum clamping means, each having a holding surface for holding a portion of a substrate; first driving means for rotating said first vacuum clamping means relative to said second vacuum clamping means; and second driving means for relatively moving between said first vacuum clamping means and said second vacuum clamping means in a direction perpendicular to the respective holding surfaces of said first and second vacuum clamping means.
Claim 10
Dependent Claim
27 words
A substrate holding device according to claim 7, further comprising exposing means for effecting exposure on a substrate held by said first and second vacuum clamping means.
Claim 11
Dependent Claim
25 words
A substrate holding device according to claim 7, further comprising stage means for moving a substrate held by said first and second vacuum clamping means.
Claim 12
Dependent Claim
40 words
A substrate holding device according to claim 9, wherein said second vacuum clamping means comprises a mechanism fixed to said stage means, which comprises means for causing said first vacuum clamping means to be rotatable relative to said stage means.
Claim 13
Dependent Claim
35 words
A substrate holding device according to claim 9, further comprising a mirror for reflecting a light beam for measuring the position of said stage means, which is provided integrally with said second vacuum clamping means.
Claim 14
Dependent Claim
30 words
A substrate holding device according to claim 7, further comprising a liquid flow path for circulating a temperature adjusting liquid through each of said first and second vacuum clamping means.
Claim 15
Dependent Claim
22 words
A substrate holding device according to claim 7, wherein said first vacuum clamping means is disposed within said second vacuum clamping means.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-15 | 2002-09-14 | 2003-03-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-15 | 2006-09-14 | 2007-03-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-15 | 2010-09-14 | 2011-03-16 | $7700.00 | Window Closed / Lapsed |