Patent US5496517A successfully refreshed from Google Patents.
Patent US5882414A successfully refreshed from Google Patents.
US5882414A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for self-cleaning a blocker plate
Assignee: Applied Materials Inc
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Filing: 1996-09-09
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Granted: 1999-03-16
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Expires: 2016-09-09
Abstract
Abstract The present invention provides a method and apparatus for introducing gases into a processing chamber and cleaning isolated surfaces thereof. In one embodiment, the apparatus provides a gas distribution system which comprises a face plate and a blocker plate located adjacent the face plate wherein the blocker plate is electrically insulated from the face plate. An RF power source is electrically connected to the face plate and a switch that selectively connects the blocker plate to the RF power source or grounds the blocker plate. When the power source is applied to the faceplate and the blocker plate is grounded, an energy potential is formed between the face plate and the blocker plate. The energy potential is sufficient to strike a plasma from cleaning gases introduced into the gas distribution system to clean the apertures and surfaces of both the face plate and the blocker plate.
Inventors
- 👤 Gary L. Fong
- 👤 Quoc Truong
- 👤 Visweswaren Sivaramakrishman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:55
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/455; C23C16/45563; C23C16/45565; B; B08; B08B; B08B7/00; B08B7/0035; C23C16/4401; C23C16/4405; H; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/3244; H01J37/32798; H01J37/32853; H01J37/32862; Y; Y10; Y10S; Y10S156/00; Y10S156/916
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
108 words
An apparatus for providing gases into a processing chamber and selectively forming a plasma adjacent a gas diffusing member, comprising: (a) a gas inlet housing having a gas diffusing member disposed therein between a gas inlet port and a gas outlet port, wherein the gas diffusing member is electrically isolated from the inlet port and the outlet port; (b) a power generator selectively coupled to the gas diffusing member and the gas inlet housing; and (c) a switch located between the power generator and the gas diffusing member to selectively ground the gas diffusing member and generate a plasma between the diffusing member and the gas inlet housing.
Claim 2
Independent Claim
108 words
An apparatus for providing gases into a processing chamber and selectively forming a plasma adjacent a gas diffusing member, comprising: (a) a gas inlet housing having a gas diffusing member disposed therein between a gas inlet port and a gas outlet port, wherein the gas diffusing member is electrically isolated from the inlet port and the outlet port; (b) a power generator selectively coupled to the gas diffusing member and the gas inlet housing; and (c) a switch located between the power generator and the gas diffusing member to selectively ground the gas diffusing member and generate a plasma between the diffusing member and the gas inlet housing.
Claim 3
Dependent Claim
46 words
The apparatus of claim 1, further comprising a microprocessor coupled to the switch wherein the microprocessor is programmed to activate the switch to ground the diffusing member during a cleaning process and to couple the diffusing member to the power generator during processing of a substrate.
Claim 4
Dependent Claim
14 words
The apparatus of claim 2, wherein the gas diffusing member is a blocker plate.
Claim 5
Dependent Claim
23 words
The apparatus of claim 3, wherein the power generator and electrical ground are selectively coupled to the blocker plate through an electrical feedthrough.
Claim 6
Independent Claim
100 words
An apparatus for introducing processing and cleaning gases into a processing chamber, comprising: (a) a base plate defining a void therethrough; (b) a face plate disposed through the void formed in the base plate and extending therebelow, said face plate being generally parallel with the base plate; (c) a blocker plate disposed adjacent the face plate, the blocker plate being electrically insulated from the face plate and the base plate; and (d) a power generator connected to the face plate and selectively connected to the blocker plate, wherein the blocker plate is connected to the power generator or is grounded.
Claim 7
Independent Claim
100 words
An apparatus for introducing processing and cleaning gases into a processing chamber, comprising: (a) a base plate defining a void therethrough; (b) a face plate disposed through the void formed in the base plate and extending therebelow, said face plate being generally parallel with the base plate; (c) a blocker plate disposed adjacent the face plate, the blocker plate being electrically insulated from the face plate and the base plate; and (d) a power generator connected to the face plate and selectively connected to the blocker plate, wherein the blocker plate is connected to the power generator or is grounded.
Claim 8
Dependent Claim
19 words
The apparatus of claim 5, wherein the power generator is coupled through an electrical feedthrough to the blocker plate.
Claim 9
Dependent Claim
18 words
The apparatus of claim 6, wherein an insulator is disposed between the blocker plate and the base plate.
Claim 10
Dependent Claim
20 words
The apparatus of claim 5, further comprising an electrical switch to selectively connect the power generator to the blocker plate.
Claim 11
Dependent Claim
18 words
The apparatus of claim 8, further comprising a processor to control the electrical configuration of the chamber components.
Claim 12
Independent Claim
72 words
A method of cleaning a gas inlet member, comprising the steps of: (a) electrically isolating a surface to be cleaned within the gas inlet member; (b) grounding the electrically isolated surface; (c) biasing a second surface within the gas inlet member opposite the electrically isolated surface; and (d) introducing a cleaning gas into a space provided between the surface to be cleaned and the biased surface to generate a cleaning plasma therebetween.
Claim 13
Independent Claim
72 words
A method of cleaning a gas inlet member, comprising the steps of: (a) electrically isolating a surface to be cleaned within the gas inlet member; (b) grounding the electrically isolated surface; (c) biasing a second surface within the gas inlet member opposite the electrically isolated surface; and (d) introducing a cleaning gas into a space provided between the surface to be cleaned and the biased surface to generate a cleaning plasma therebetween.
Claim 14
Dependent Claim
23 words
The method of claim 10, wherein the surface to be cleaned is a blocker plate and the biased surface is a face plate.
Claim 15
Dependent Claim
41 words
The method of claim 11, wherein the step of electrically isolating a surface to be cleaned comprises providing an insulating member between the blocker plate and a base plate to which the blocker plate is supported in the gas inlet member.
Claim 16
Dependent Claim
20 words
The method of claim 11, wherein the blocker plate may be switched between a ground potential and a bias potential.
Claim 17
Dependent Claim
28 words
The method of claim 13, further comprising the step of coupling the blocker plate and the face plate to the same RF voltage source through an RF splitter.
Claim 18
Dependent Claim
22 words
The method of claim 14, further comprising the step of disposing an insulating member between the blocker plate and the base plate.
Claim 19
Dependent Claim
27 words
The method of claim 15, further comprising the step of selectively biasing the blocker plate to generate a plasma between the face plate and the blocker plate.
Claim 20
Independent Claim
83 words
A method for selectively providing an electrical potential to a surface within a gas distribution system in a processing chamber, comprising the steps of: (a) electrically isolating the surface to be selectively biased from the other gas distribution system components; (b) providing an electrical power feedthrough to the surface; (c) providing a power source through the feedthrough to the surface during processing; and (d) providing a ground potential through the feedthrough to the surface during a cleaning process for the gas distribution system.
Claim 21
Independent Claim
83 words
A method for selectively providing an electrical potential to a surface within a gas distribution system in a processing chamber, comprising the steps of: (a) electrically isolating the surface to be selectively biased from the other gas distribution system components; (b) providing an electrical power feedthrough to the surface; (c) providing a power source through the feedthrough to the surface during processing; and (d) providing a ground potential through the feedthrough to the surface during a cleaning process for the gas distribution system.
Claim 22
Dependent Claim
19 words
The method of claim 17, wherein the surface is a blocker plate having at least one aperture formed therethrough.
Claim 23
Dependent Claim
13 words
The method of claim 17, wherein the power source comprises an RF generator.
Claim 24
Dependent Claim
21 words
The method of claim 19, wherein the electrical potential provided to the surface is switched between an RF signal and ground.
Claim 25
Dependent Claim
17 words
The method of claim 18, wherein the blocker plate is connected to the power source during processing.
Claim 26
Dependent Claim
23 words
The method of claim 18, wherein the blocker plate is grounded during a cleaning process to generate a cleaning plasma adjacent the surface.
Claim 27
Dependent Claim
117 words
A processing chamber having a self-cleaning gas distribution system, comprising: a gas injection cover plate having a gas inlet port; a faceplate conductively mounted on the cover plate, the faceplate having a plurality of holes and a raised annular outer surface that receives the cover plate; a blocker plate non-conductively mounted on the cover plate within an enclosed region defined by the cover plate and the faceplate, the blocker plate having a plurality of holes; a first RF power source connected to the faceplate; a second RF power source selectively connected to the blocker plate; and a relay switch which delivers power from the second RF power source to the blocker plate or grounds the blocker plate.
Claim 28
Dependent Claim
117 words
A processing chamber having a self-cleaning gas distribution system, comprising: a gas injection cover plate having a gas inlet port; a faceplate conductively mounted on the cover plate, the faceplate having a plurality of holes and a raised annular outer surface that receives the cover plate; a blocker plate non-conductively mounted on the cover plate within an enclosed region defined by the cover plate and the faceplate, the blocker plate having a plurality of holes; a first RF power source connected to the faceplate; a second RF power source selectively connected to the blocker plate; and a relay switch which delivers power from the second RF power source to the blocker plate or grounds the blocker plate.
Claim 29
Dependent Claim
23 words
The processing chamber of claim 23, wherein the first and second RF power sources comprise an RF generator connected to an RF splitter.
Claim 30
Dependent Claim
21 words
The processing chamber of claim 24, further comprising an RF isolation ring which separates the blocker plate and the cover plate.
Claim 31
Dependent Claim
26 words
The processing chamber of claim 24, wherein the switch is connected to the blocker plate with an electrical feedthrough that passes through the cover plate .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-15 | 2002-09-14 | 2003-03-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-15 | 2006-09-14 | 2007-03-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-15 | 2010-09-14 | 2011-03-16 | $7700.00 | Window Closed / Lapsed |