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US5878175A
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Electro-optical waveguide element with reduced DC drift phenomena
Assignee: Fujifilm Corp
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Filing: 1996-08-21
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Granted: 1999-03-02
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Expires: 2016-08-21
Abstract
Abstract An electro-optical waveguide element with reduced DC drift phenomena is presented. The waveguide element is made up of an optical waveguide formed on a substrate possessing electro-optical effects, at least a pair of electrodes closely attached to the optical waveguide with a buffer layer sandwiched between the substrate and the electrodes, and a driver circuit for applying a voltage between the electrodes. The buffer layer is made of a material having a dielectric constant in the range of 20-1000. The buffer layer is more preferably made of a material having a dielectric constant in the range of 20-200. The material of the buffer layer is selected from the group consisting of HfO 2 , TiO 2 , SrTiO 3 , BaTiO 3 , LiNbO 3 , LiTaO 3 , Pb(Zr, Ti)O 3 , and (Pb, La)(Zr, Ti)O 3 .
Inventors
- 👤 Shinichiro Sonoda
- 👤 Masami Hatori
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 19:46
CPC Classifications
G; G02; G02F; G02F1/00; G02F1/01; G02F1/03; G02F1/035; G02F2201/00; G02F2201/07; G02F2201/30; G02F2201/302; G02F2203/00; G02F2203/21
Claims Analysis
Total Claims: 4
Claim 1
Independent Claim
95 words
An electro-optical waveguide element comprising: an optical waveguide formed on a substrate having electro-optical effect; at least a pair of electrodes attached to the vicinity of the optical waveguide via a buffer layer, said buffer layer consisting of HfO 2 ; linear grating couplers for input light and linear grating couplers for output light being arranged on said optical waveguide with said pair of electrodes interposed therebetween; a driver circuit for applying a voltage between the electrodes wherein the buffer layer is made of a material having a dielectric constant in the range of 20-1000.
Claim 2
Dependent Claim
95 words
An electro-optical waveguide element comprising: an optical waveguide formed on a substrate having electro-optical effect; at least a pair of electrodes attached to the vicinity of the optical waveguide via a buffer layer, said buffer layer consisting of HfO 2 ; linear grating couplers for input light and linear grating couplers for output light being arranged on said optical waveguide with said pair of electrodes interposed therebetween; a driver circuit for applying a voltage between the electrodes wherein the buffer layer is made of a material having a dielectric constant in the range of 20-1000.
Claim 3
Dependent Claim
79 words
An electro-optical waveguide element comprising: an optical waveguide formed on a substrate having electrooptical effects; at least a pair of electrodes attached to the vicinity of the optical waveguide via a buffer layer sandwiched between the substrate and the electrodes; a driver circuit for applying a voltage between the electrodes, wherein the material of the buffer layer consists of HfO 2 wherein the buffer layer is made of a material having a dielectric constant in the range of 20-1000.
Claim 4
Dependent Claim
79 words
An electro-optical waveguide element comprising: an optical waveguide formed on a substrate having electrooptical effects; at least a pair of electrodes attached to the vicinity of the optical waveguide via a buffer layer sandwiched between the substrate and the electrodes; a driver circuit for applying a voltage between the electrodes, wherein the material of the buffer layer consists of HfO 2 wherein the buffer layer is made of a material having a dielectric constant in the range of 20-1000.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |