Patent US3551652A successfully refreshed from Google Patents.
US5877038A
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Method of making a vertical cavity laser
Assignee: University of California
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Filing: 1996-11-27
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Granted: 1999-03-02
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Expires: 2016-11-27
Abstract
Abstract A highly controllable, compact method for making a vertical cavity laser. By using selective etching and contact layers within the laser cavity, higher efficiencies and lower power requirements for vertical cavity surface emitting lasers (VCSELs) are achieved.
Inventors
- 👤 Larry A. Coldren
- 👤 Steven P. DenBaars
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 10:06
CPC Classifications
H; H01; H01S; H01S5/00; H01S5/10; H01S5/18; H01S5/183; H01S5/18308; H01S5/18316; H01S5/18341; H01S5/18361; H01S5/18369; H01S5/1838; H01S5/20; H01S5/2054; H01S5/2081; H01S5/2086
Claims Analysis
Total Claims: 37
Claim 1
Independent Claim
54 words
A method of making a vertical cavity laser, comprising the step of forming at least one contact within the laser cavity, wherein the contact is positioned between a first mirror and a second mirror of the vertical cavity laser, and an active layer of the vertical cavity laser is a group III nitride film.
Claim 2
Independent Claim
54 words
A method of making a vertical cavity laser, comprising the step of forming at least one contact within the laser cavity, wherein the contact is positioned between a first mirror and a second mirror of the vertical cavity laser, and an active layer of the vertical cavity laser is a group III nitride film.
Claim 3
Dependent Claim
19 words
The method of claim 1, wherein the at least one contact is substantially transparent at a laser output frequency.
Claim 4
Dependent Claim
31 words
The method of claim 1, wherein the at least one contact layer is selected from a group comprising n+ doped gallium nitride, conducting indium tin oxide, and alloys of gallium nitride.
Claim 5
Independent Claim
141 words
A method for making a vertical cavity laser, comprising the steps of: growing a first mirror on a substrate; growing a first contact layer on the first mirror; growing an active layer on the first contact layer; growing a second contact layer on the active layer; growing a second mirror on the second contact layer; undercutting the active layer to a first width; etching the second mirror to a second width, such that the second width of the second mirror is wider than the first width and coaxial with the first width; and etching the second contact layer to a third width, wherein the third width is wider than the second width and is offset from the axis of the first and second widths, and an edge of the second contact layer is flush with an edge of the second mirror.
Claim 6
Independent Claim
141 words
A method for making a vertical cavity laser, comprising the steps of: growing a first mirror on a substrate; growing a first contact layer on the first mirror; growing an active layer on the first contact layer; growing a second contact layer on the active layer; growing a second mirror on the second contact layer; undercutting the active layer to a first width; etching the second mirror to a second width, such that the second width of the second mirror is wider than the first width and coaxial with the first width; and etching the second contact layer to a third width, wherein the third width is wider than the second width and is offset from the axis of the first and second widths, and an edge of the second contact layer is flush with an edge of the second mirror.
Claim 7
Dependent Claim
14 words
The method of claim 4, wherein the first mirror is a distributed Bragg reflector.
Claim 8
Dependent Claim
14 words
The method of claim 4, wherein the second mirror is a distributed Bragg reflector.
Claim 9
Dependent Claim
18 words
The method of claim 4, wherein the first mirror is alternating layers of gallium nitride and aluminum nitride.
Claim 10
Dependent Claim
14 words
The method of claim 4, wherein the first contact is n+ doped gallium nitride.
Claim 11
Dependent Claim
14 words
The method of claim 4, wherein the second contact is p+ doped gallium nitride.
Claim 12
Dependent Claim
26 words
The method of claim 4, wherein the substrate is selected from a group comprising sapphire, silicon, silicon carbide, gallium nitride, and Al x Ga 1-x N.
Claim 13
Dependent Claim
18 words
The method of claim 4, wherein the first contact layer is substantially transparent at a laser output frequency.
Claim 14
Dependent Claim
18 words
The method of claim 4, wherein the second contact layer is substantially transparent at a laser output frequency.
Claim 15
Dependent Claim
45 words
The method of claim 4, further comprising the steps of growing an inhibitor layer on the substrate, etching the inhibitor layer, such that the inhibitor layer contains apertures, the apertures exposing the substrate therein; and growing the first mirror on the substrate within the apertures.
Claim 16
Dependent Claim
22 words
The method of claim 13, wherein the inhibitor layer is selected from a group comprising silicon dioxide, silicon nitride, and titanium dioxide.
Claim 17
Independent Claim
251 words
A method for making a vertical cavity laser, comprising the steps of: growing a first inhibitor layer on a substrate; etching the first inhibitor layer, such that the first inhibitor layer contains apertures, the apertures exposing the substrate therein; growing a first mirror on the substrate within the apertures; growing a first contact layer on the first mirror; growing an active layer on the first contact layer; etching the active layer to a first width; growing a second growth inhibitor on a first portion of the first contact layer and the proximate portion of the first inhibitor layer, such that the second growth inhibitor is adjacent to at least a portion of the active layer and such that a second portion of the first contact layer remains exposed; etching the second portion of the first contact layer to a second width, such that the active layer overhangs at least part of the first contact layer, and whereby a portion of the first mirror is exposed; growing a second contact layer on the active layer and the exposed portion of the first mirror; growing a third inhibitor layer on the first inhibitor layer and on a portion of the second contact layer, whereby covering the portion of the second contact layer that overlays the first mirror; growing a second mirror on a portion of the second contact layer not covered by the third inhibitor layer; and etching the second and the third inhibitor layers to expose the first and second contact layers.
Claim 18
Independent Claim
251 words
A method for making a vertical cavity laser, comprising the steps of: growing a first inhibitor layer on a substrate; etching the first inhibitor layer, such that the first inhibitor layer contains apertures, the apertures exposing the substrate therein; growing a first mirror on the substrate within the apertures; growing a first contact layer on the first mirror; growing an active layer on the first contact layer; etching the active layer to a first width; growing a second growth inhibitor on a first portion of the first contact layer and the proximate portion of the first inhibitor layer, such that the second growth inhibitor is adjacent to at least a portion of the active layer and such that a second portion of the first contact layer remains exposed; etching the second portion of the first contact layer to a second width, such that the active layer overhangs at least part of the first contact layer, and whereby a portion of the first mirror is exposed; growing a second contact layer on the active layer and the exposed portion of the first mirror; growing a third inhibitor layer on the first inhibitor layer and on a portion of the second contact layer, whereby covering the portion of the second contact layer that overlays the first mirror; growing a second mirror on a portion of the second contact layer not covered by the third inhibitor layer; and etching the second and the third inhibitor layers to expose the first and second contact layers.
Claim 19
Dependent Claim
23 words
The method of claim 15, wherein the first inhibitor layer is selected from a group comprising silicon dioxide, silicon nitride, and titanium dioxide.
Claim 20
Dependent Claim
23 words
The method of claim 15, wherein the second inhibitor layer is selected from a group comprising silicon dioxide, silicon nitride, and titanium dioxide.
Claim 21
Dependent Claim
23 words
The method of claim 15, wherein the third inhibitor layer is selected from a group comprising silicon dioxide, silicon nitride, and titanium dioxide.
Claim 22
Dependent Claim
34 words
The method of claim 15, wherein a composition of a second mirror is selected from a group comprising insulating titanium dioxide/silicon oxide, magnesium fluoride/zinc sulfide, calcium fluoride/zinc sulfide, and conductive indium tin oxide/zinc oxide.
Claim 23
Independent Claim
155 words
A method for making a vertical cavity laser, comprising the steps of: growing a liftoff layer on a first substrate; growing a first contact layer on the liftoff layer; growing an active layer on the first contact layer; growing a second contact layer on the active layer; growing a first mirror on a second substrate; growing a third contact layer on the first mirror; bonding the second contact layer to the third contact layer; removing the first substrate and liftoff layer from the first contact layer, thereby exposing the first contact layer; depositing a second mirror on the first contact layer; etching the second mirror to a first width; and etching the first contact layer, active layer, second contact layer, and third contact layer to a second width, an axis of the second width being offset with an axis of the first width, such that the first width is offset coaxially from the second width.
Claim 24
Independent Claim
155 words
A method for making a vertical cavity laser, comprising the steps of: growing a liftoff layer on a first substrate; growing a first contact layer on the liftoff layer; growing an active layer on the first contact layer; growing a second contact layer on the active layer; growing a first mirror on a second substrate; growing a third contact layer on the first mirror; bonding the second contact layer to the third contact layer; removing the first substrate and liftoff layer from the first contact layer, thereby exposing the first contact layer; depositing a second mirror on the first contact layer; etching the second mirror to a first width; and etching the first contact layer, active layer, second contact layer, and third contact layer to a second width, an axis of the second width being offset with an axis of the first width, such that the first width is offset coaxially from the second width.
Claim 25
Dependent Claim
35 words
The method of claim 20, where the liftoff layer is selected from a group comprising In x Ga y N, where x is less than 0.2, zinc oxide, lanthanum gallium oxide, silicon, and gallium arsenide.
Claim 26
Dependent Claim
27 words
The method of claim 20, where the first substrate is selected from a group comprising sapphire, silicon, gallium nitride, silicon carbide, and Al x Ga 1-x N.
Claim 27
Dependent Claim
13 words
The method of claim 20, where the active layer is indium gallium nitride.
Claim 28
Dependent Claim
20 words
The method of claim 20, where the first mirror is alternating layers of aluminum gallium arsenide and oxidized aluminum arsenide.
Claim 29
Dependent Claim
17 words
The method of claim 20, where the third contact layer is partially oxidized p+ aluminum gallium arsenide.
Claim 30
Dependent Claim
14 words
The method of claim 20, where the step of bonding is done by fusion.
Claim 31
Dependent Claim
27 words
The method of claim 20, wherein the step of bonding is performed with an optically transparent material, selected from a group comprising epoxy bonding and optical cementing.
Claim 32
Independent Claim
145 words
A method for making a vertical cavity laser, comprising the steps of: growing a liftoff layer on a first substrate; growing a first contact layer on the liftoff layer; growing an active layer on the first contact layer; growing a second contact layer on the active layer; growing a first mirror on the second contact layer; bonding the first mirror to a second substrate; removing the first substrate and the liftoff layer from the first contact layer, thereby exposing the first contact layer; depositing a second mirror on the exposed first contact layer; and etching the second mirror to a first width; and etching the first contact layer, active layer, and second contact layer to a second width, an axis of the second width being offset with an axis of the first width, such that the first width is offset coaxially from the second width.
Claim 33
Independent Claim
145 words
A method for making a vertical cavity laser, comprising the steps of: growing a liftoff layer on a first substrate; growing a first contact layer on the liftoff layer; growing an active layer on the first contact layer; growing a second contact layer on the active layer; growing a first mirror on the second contact layer; bonding the first mirror to a second substrate; removing the first substrate and the liftoff layer from the first contact layer, thereby exposing the first contact layer; depositing a second mirror on the exposed first contact layer; and etching the second mirror to a first width; and etching the first contact layer, active layer, and second contact layer to a second width, an axis of the second width being offset with an axis of the first width, such that the first width is offset coaxially from the second width.
Claim 34
Dependent Claim
50 words
The method of claim 28, wherein the first mirror is selected from a group comprising alternating layers of titanium oxide and silicon oxide, alternating layers of magnesium fluoride and zinc sulfide, alternating layers of calcium fluoride and zinc sulfide, and alternating layers of conductive indium tin oxide and zinc oxide.
Claim 35
Dependent Claim
29 words
The method of claim 28, wherein the method further comprises the step of attaching a backing layer to the first mirror for increasing a reflectivity of the first mirror.
Claim 36
Dependent Claim
29 words
The method of claim 28, wherein the method further comprises the step of attaching a backing layer to the second mirror for increasing a reflectivity of the second mirror.
Claim 37
Dependent Claim
29 words
The method of claim 28, wherein the step of bonding is performed with an optically transparent material, selected from a group comprising epoxy bonding optical cementing, and wafer fusing.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 2002-03-01 | 2002-08-31 | 2003-03-02 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 2006-03-01 | 2006-08-31 | 2007-03-02 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2010-03-01 | 2010-08-31 | 2011-03-02 | $7700.00 | Window Closed / Lapsed |